• Proceedings of the IEEK Conference
• /
• 1998.10a
• /
• pp.629-632
• /
• 1998

This paper presents a new and simple technique to realize high Q inductor on low resistivity silicon wafer with 6 $\Omega$.cm. This technique is very compatible with bipolar and CMOS standard silicon process. By forming the deep and narrow trenches on the low resistivity wafer substrate under inductor pattern, oxidizing and filling with undoped polysilicon, the low resistivity silicon wafer acts as high resistivity wafer being suitable for the fabrication of high Q inductor. By using this technique the quality factor (Q) for 8-turn spiral inductor was improved up to max. 10.3 at 2 ㎓ with 3.0 $\mu\textrm{m}$ of metal thickness. The experiment results show that Q on low resistivity silicon wafer with the trench technique have been improved more than 2 times compared to the conventional low resistivity silicon wafer without trenches.

• Electrical & Electronic Materials
• /
• v.9 no.7
• /
• pp.727-732
• /
• 1996

In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

• Economic and Environmental Geology
• /
• v.32 no.2
• /
• pp.161-167
• /
• 1999

Electric and electromagnetic surveys were conducted to investigate the deep structure of the Ulsan fault in Ipsil area, south of Kyeongju. On this study, especially high-frequency magnetotelluric method of electromagnetic survey in the frequency range of 10~100,000 Hz was mainly employed to study the deep subsurface configuration. High-frequency MT survey was performed at 70 points of spacing 30~50 m, making 3.8 km survey line. As a survey result, a 2-km-depth 2-D cross-section was achieved. It shows vertical and horizontal subsurface variations of resistivity values. Near-surface layer having low resistivity value becomes thicker eastward up to 800m. There is a steep low resistivity zone in the west side of survey line, and there exists two low resistivity zones dipping west in the east side of survey line. Two low resistivity zones are interpreted to be related to major movement pattern of the Ulsan fault. This suggests that major fault lines are developed on both peripheral sides of the broad fault zone.

• 한국지구물리탐사학회:학술대회논문집
• /
• 2008.10a
• /
• pp.179-184
• /
• 2008

Silt or clay alluvium fully saturated with water generally shows low resistivity. Sometimes it is believe that the low resistivity layer is considered as good aquifer but this makes problems in the development of groundwater. To overcome this problem, we adopted induced-polarization(IP) method with resistivity method. Laboratory experiments and resistivity/IP field surveys with non-polarization electrodes were conducted for the study. Laboratory experiments shows that the increase of clay contents in the sample mixed with sand and clay give low resistivity and high chargeability. We used this experiment results in the interpretation of resistivity/IP field data which were obtained in riverbank filtration. Finally, the layer which has low resistivity and chargeabilty would be regarded as a good aquifer for the development of groundwater intake.

• Journal of Korean Society of Rural Planning
• /
• v.5 no.1 s.9
• /
• pp.45-55
• /
• 1999

The applicability of resistivity cone for contaminant investigation in farm land was examined in laboratory and in-situ. To verify the resistivity variations in sand with contaminants, laboratory experiment used soil resistivity test box was performed. Heavy metal and others ions were appeared steep variations in low concentration. Pilot test results were the same as laboratory test results. In the in-situ test used resistivity cone, resistivities of waste landfill layer were low than the common soil layers and resistivities had been difference with concentration of contaminant components. Therefore contaminant investigation in farm land using resistivity cone was expected very effective.

• Proceedings of the KSRS Conference
• /
• v.2
• /
• pp.728-731
• /
• 2006

Ground subsidence near abandoned underground coal mines has become a serious social problem in Korea. The purpose of this study is to perform a comparative analysis between the ground subsidence area and the electrical resistivity measured by field survey at Samcheok City. A raster database composed of ground subsidence areas and electrical resistivity data was constructed for GIS. To analyze correlation between the two constructed raster datasets, we used a frequency ratio model. The results show that low and high electrical resistivity anomaly zones coincide with the existing subsidence areas. We infer that the high anomaly zone means saturated and low anomaly zone means vacant. It suggests that electrical resistivity might be a useful factor for analyzing ground subsidence hazard zone.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.28 no.6
• /
• pp.68-74
• /
• 2014

The electrical parameters of soils are highly dependent on the various factors such as types of soil, chemical compositions, moisture content, temperature, frequency, and so on. The analysis of soil parameters is of fundamental importance in design of grounding systems. In this paper, we present the experimental results of frequency-dependent impedance, resistivity, permittivity of soils as functions of types of soil and moisture content. The impedance and resistivity of soils are decreased as the moisture content and the frequency increase. In particular, the variation of the soil resistivity with the frequency is pronounced in the conditions of high resistivity and low moisture content. On the contrary, the permittivity of soils are sharply decreased with increasing the frequency below 10kHz and the frequency-dependent permittivity of soils are highly changed in the conditions of high moisture and low resistivity.

• Journal of the Korean Geophysical Society
• /
• v.2 no.3
• /
• pp.217-224
• /
• 1999

Although faults can be found by geological surveys, the surface traces of faults are not easily discovered by traditional geological surveys due to alluvia. In and around faults and fracture zones, the electrical resistivity appears to be lower than that of the surroundings due to the content of groundwater and clay minerals. Therefore, electrical resistivity surveys are effective to search buried faults and fracture zones. The dipole-dipole array electrical resistivity surveys, which could show the two dimensional subsurface electrical resistivity structure, were carried out in two areas, Yongdang-ri, Woongsang-eup, Yangsan-si, Kyungsangnam-do and Malbang-ri, Woedong-eup, Kyungju-si, Kyungsangpook-do. The one was next to the Dongrae Fault and the other near the Ulsan Fault was close to the region in which debatable quaternary fault traces had been found recently. From each measured data set, the electrical resistivity cross-section was obtained using the inversion program the reliability of which was analyzed using analytic solutions. A low resistivity zone was found in the inverted cross-section from the Yongdang-ri area survey data, and two low resistivity zones were found in that from the Malbang-ri area survey data. They were almost vertical and were 15∼20 m wide. Accounting the shape and the very low resistivity values of those zones (<100 Ωm)in the inverted section, they were interpreted as fracture zones although they should be proven by trenching. The reliability of the interpretation might be improved by adding some more parallel resistivity survey lines and interpreting the results in 3 and/or adding other geophysical survey.

• Korean Journal of Materials Research
• /
• v.18 no.5
• /
• pp.283-288
• /
• 2008

The effect of sintering aids and glass-frit on the densification and resistivity of silver paste was investigated in an effort to enhance the sintered density and electrical conductivity of the silver electrode. To prepare Pb-free silver paste for use at low sintering temperatures, two commercial silver powders ($0.8\;{\mu}m$ and $1.6\;{\mu}m$ in size) and 5wt.% lab-synthesized nanoparticles (30-50 nm in size) as a sintering aids were mixed with 3 wt.% or 6 wt.% of glass frit ($Bi_2O_3$-based) using a solvent and three roll mills. Thick films from the silver paste were prepared by means of screen printing on an alumina substrate followed by sintering at $450^{\circ}C$ to $550^{\circ}C$ for 15 min. Silver thick films from the paste with bimodal particles showed a high packing density, high densification during sintering and low resistivity compared to films created using monomodal particles. Silver nanoparticles as a sintering aid enhanced the densification of commercial silver powder at a low sintering temperature and induced low resistivity in the silver thick film. The glass frit also enhanced the densification of the films through liquid phase sintering; however, the optimum content of glass frit is necessary to ensure that a dense microstructure and low resistivity are obtained, as excessive glass-frit can provoke low conductivity due to the interconnection of the glass phase with the high resistivity between the silver particles.

• Proceedings of the Korean Geotechical Society Conference
• /
• 2009.03a
• /
• pp.673-676
• /
• 2009

Non-point pollutants, which mainly originate from high traffic roads and rural areas, contaminate the environment by flowing into various rivers and lakes and thus are of interest as an environmental issue. Accordingly, efforts have been made to design and maintain efficient filter systems for the control of the non-point pollutants. Meanwhile, clay-type materials are widely used for the absorption of chemicals included in pollutants and the absorption performances of various clays have been reported in the literature. Thus, the present study proposes a non-destructive monitoring method for the performance of a clay-type filter using electrical resistivity measurement. A series of experimental tests is performed on celite-based particulate filters with infiltrating non-point source pollutants having the same characteristics as pollutants on high traffic roads. Each test measures permeability, resistivity of the filter materials and resistivity of the filtrated water. As the particulate filter materials filtrate pollutants and absorb heavy chemicals (e.g., $Cr^{6+}$, lead, nickel, among others), ionic concentration increases resulting as the electrical resistivity decrease. When the filter systems approach the end of their lifetime, the electrical resistivity of the filter material converges to a very low value due to lowered filter absorption efficiency. Hence, the electrical resistivity of the filtrated water also converges to a low value due to high concentrations of heavy metals. The permeability converges to a very low value because of significantly reduced porosity due to clogging and absorption of pollutants on the filter material. The experimental results show that electrical resistivity monitoring of filter materials is a promising approach to estimation of filter performance and its life expectancy.