• Title/Summary/Keyword: Low Pressure Chamber

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Infrared absorbance of the Au-black deposited under nitrogen gas-filled low vacuum condition (질소가스 분위기의 저진공으로 증착된 Au-black의 적외선 흡수도)

  • O, Gwang-Sik;Kim, Dong-Jin;Kim, Jin-Seop;Lee, Jeong-Hui;Lee, Yong-Hyeon;Lee, Jae-Sin;Han, Seok-Yong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.2
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    • pp.13-21
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    • 2000
  • Au-black for the application of the long wavelength infrared absorber has been prepared by evaporating Au under nitrogen gas-filled low vacuum condition. Characteristics of the deposited Au-black were carefully investigated through structural analysis, infrared absorbance measurement, and patterning of the layer, all of which are dependent on the deposition condition. High density of micro-cavity that trapped infrared were obtained, and infrared absorbance in the wavelength range from 3 $\mu\textrm{g}$ to 14 $\mu\textrm{g}$ was found to be about 90% when the Au-black layer was produced under the deposition condition of mass Per area of about 600 $\mu\textrm{g}$/cm$^{2}$ and chamber pressure of above 1 Torr. Photoresist lift-off process could be performed to pattern the Au-black, of which mass per area was below 900 $\mu\textrm{g}$/cm/ sup 2/. In view of absorbance, heat capacity, and pattern formation, the deposition condition of chamber pressure of about 1 Tow and mass per area of about 600$\mu\textrm{g}$/cm$^{2}$ was most adequate for preparing the Au-black as an infrared absorber.

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The evaluation of performance and flow characteristics due to the length of throat and diffuser for ship's ejector (선박용 Ejector의 직관부와 디퓨저 길이 변화에 따른 성능비교 및 유동특성에 관한 연구)

  • Lee, Young-Ho;Kim, Mun-Oh;Kim, Chang-Goo;Kim, You-Taek
    • Journal of Advanced Marine Engineering and Technology
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    • v.38 no.1
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    • pp.31-38
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    • 2014
  • Ejector is a simple device which can transport a low-pressure secondary flow by using a high-pressure primary flow. The efficiency of the ejector system is relatively very low, compared to other fluid transport devices driven mainly by the forces acting on the normal direction. However, its major advantage is a simple structure with no moving parts, and it transports a large amount of fluid with a small driving energy. In this study, the performance of side-type liquid ejector commonly used in ships; is analyzed by using experimental and CFD methods under steady and incompressible flow condition by varying the length of the throat and diffuser, the flow pattern and suction phenomenon were studied in detail.

A Experimental Study on the Effects of the Impingement-wall on the Spray and Combustion Characteristics of Direct-Injection LPG (충돌벽면이 직분식 LPG의 분무 및 연소 특성에 미치는 영향에 관한 실험 연구)

  • Hwang, Seong-Ill;Chung, Sung-Sik;Yeom, Jeong-Kuk
    • Journal of Power System Engineering
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    • v.19 no.2
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    • pp.49-56
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    • 2015
  • As an alternative fuel that can be used in SI engine, LPG is one of clean fuels with larger H/C ratio compared to gasoline, low $CO_2$ emission, and small amount of pollutants such as sulfur compounds. When LPG is used in spark ignition engine, volumetric efficiency of the engine can be improved and pumping loss can be reduced by performing direct injection into the combustion chamber instead of port fuel injection. LPG-DI engine allows for lean combustion and stratified combustion under low load. In case of stratified combustion, air fuel ratio can be greatly increased compared to theoretic mixture ratio combustion. Improved thermal efficiency of the engine and reduced pumping loss can be expected from stratified combustion. Accordingly in this study, an experimental apparatus for visualization was designed and manufactured to study the combustion process of LPG after injection and ignition, intended to examine ignition probability and combustion characteristics of spark ignition direct injection(SIDI) LPG fuel. Ambient pressure, ambient temperature and fuel injection pressure were found as important variables that affect ignition probability and flame propagation characteristics of LPG-air mixture. Also, it was verified that the injected LPG fuel can be directly ignited by spark plug under appropriate ambient conditions.

Effects of Pre-Aging Treatment on the Corrosion Resistance of Low Temperature Plasma Nitrocarburized AISI 630 Martensitic Precipitation Hardening Stainless Steel (저온 플라즈마 침질탄화처리된 마르텐사이트계 석출경화형 스테인리스강의 내식성에 미치는 시효 전처리의 영향)

  • Lee, Insup;Lee, Chun-Ho
    • Journal of the Korean institute of surface engineering
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    • v.53 no.2
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    • pp.43-52
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    • 2020
  • Various aging treatments were conducted on AISI 630 martensitic precipitation hardening stainless steel in order to optimize aging condition. Aging treatment was carried out in the vacuum chamber of Ar gas with changing aging temperature from 380℃ to 430℃ and aging time from 2h to 8h at 400℃. After obtaining the optimized aging condition, several nitrocarburizing treatments were done without and with the aging treatment. Nitrocarburizing was performed on the samples with a gas mixture of H2, N2 and CH4 for 15 h at vacuum pressure of 4.0 Torr and discharge voltage of 400V. The corrosion resistance was improved noticeably by combined process of aging and nitrocarburizing treatment, which is attributed to higher chromium and nitrogen content in the passive layer, as confirmed by XPS analysis. The optimized condition is finalized as, 4h aging at 400℃ and then subsequent nitrocarburizing at 400℃ with 25% nitrogen and 4% methane gas for 15h at vacuum pressure of 4.0 Torr and discharge voltage of 400V, resulting in the surface hardness of around 1300 HV0.05 and α'N layer thickness of around 11 ㎛ respectively.

The study of plasma source ion implantation process for ultra shallow junctions (Ulra shallow Junctions을 위한 플라즈마 이온주입 공정 연구)

  • Lee, S.W.;Jeong, J.Y.;Park, C.S.;Hwang, I.W.;Kim, J.H.;Ji, J.Y.;Choi, J.Y.;Lee, Y.J.;Han, S.H.;Kim, K.M.;Lee, W.J.;Rha, S.K.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.111-111
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    • 2007
  • Further scaling the semiconductor devices down to low dozens of nanometer needs the extremely shallow depth in junction and the intentional counter-doping in the silicon gate. Conventional ion beam ion implantation has some disadvantages and limitations for the future applications. In order to solve them, therefore, plasma source ion implantation technique has been considered as a promising new method for the high throughputs at low energy and the fabrication of the ultra-shallow junctions. In this paper, we study about the effects of DC bias and base pressure as a process parameter. The diluted mixture gas (5% $PH_3/H_2$) was used as a precursor source and chamber is used for vacuum pressure conditions. After ion doping into the Si wafer(100), the samples were annealed via rapid thermal annealing, of which annealed temperature ranges above the $950^{\circ}C$. The junction depth, calculated at dose level of $1{\times}10^{18}/cm^3$, was measured by secondary ion mass spectroscopy(SIMS) and sheet resistance by contact and non-contact mode. Surface morphology of samples was analyzed by scanning electron microscopy. As a result, we could accomplish the process conditions better than in advance.

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Low-Temperature Si and SiGe Epitaxial Growth by Ultrahigh Vacuum Electron Cyclotron Resonance Chemical Vapor Deposition (UHV-ECRCVD)

  • Hwang, Ki-Hyun;Joo, Sung-Jae;Park, Jin-Won;Euijoon Yoon;Hwang, Seok-Hee;Whang, Ki-Woong;Park, Young-June
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1996.06a
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    • pp.422-448
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    • 1996
  • Low-temperature epitaxial growth of Si and SiGe layers of Si is one of the important processes for the fabrication of the high-speed Si-based heterostructure devices such as heterojunction bipolar transistors. Low-temperature growth ensures the abrupt compositional and doping concentration profiles for future novel devices. Especially in SiGe epitaxy, low-temperature growth is a prerequisite for two-dimensional growth mode for the growth of thin, uniform layers. UHV-ECRCVD is a new growth technique for Si and SiGe epilayers and it is possible to grow epilayers at even lower temperatures than conventional CVD's. SiH and GeH and dopant gases are dissociated by an ECR plasma in an ultrahigh vacuum growth chamber. In situ hydrogen plasma cleaning of the Si native oxide before the epitaxial growth is successfully developed in UHV-ECRCVD. Structural quality of the epilayers are examined by reflection high energy electron diffraction, transmission electron microscopy, Nomarski microscope and atomic force microscope. Device-quality Si and SiGe epilayers are successfully grown at temperatures lower than 600℃ after proper optimization of process parameters such as temperature, total pressure, partial pressures of input gases, plasma power, and substrate dc bias. Dopant incorporation and activation for B in Si and SiGe are studied by secondary ion mass spectrometry and spreading resistance profilometry. Silicon p-n homojunction diodes are fabricated from in situ doped Si layers. I-V characteristics of the diodes shows that the ideality factor is 1.2, implying that the low-temperature silicon epilayers grown by UHV-ECRCVD is truly of device-quality.

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Numerical Analysis and Demonstration Test on the Performance of a Static Mixer for mixing Biogas and Town Gas for the 5MW Biogas Turbine (5MW 바이오가스 터빈의 바이오가스와 도시가스 혼합용 정적 혼합기의 성능에 관한 수치해석 및 실증 연구)

  • Cha, Hyoseok;Song, Soonho;Park, Jong Yeon;Kim, Young Il;Mun, Sung Young
    • Journal of Energy Engineering
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    • v.24 no.1
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    • pp.51-57
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    • 2015
  • The purpose of this study is to verify the performance of a static mixer for mixing of biogas and town gas by numerical analysis and demonstration test. The reason for designing a static mixer is that there is a need to mix town gas with biogas when there is less production of biogas in biogas sites. Non-uniformity in the outlet section was calculated for investigating the performance of a static mixer. Non-uniformity was based on the mole fraction of methane in a mixture of biogas and town gas. Low non-uniformity means that biogas and town gas are mixed well through this static mixer. Also, pressure drop at the outlet section of a static mixer was calculated. The pressure drop is less than 0.2% in this static mixer. This static mixer is suitable for applying to a 5MW bio-gas turbine through the demonstration test in the field.

Analysis of Stacking-Fault Proportion on the Mixed Phase of the $Bi_2Sr_2Ca_{n-1}Cu_nO_x$(n=0, 1, 2) Superconducting Thin Films ($Bi_2Sr_2Ca_{n-1}Cu_nO_x$(n=0, 1, 2) 초전도 박막의 혼합상에 대한 고용비 해석)

  • Yang, Seung-Ho;Lee, Ho-Shik;Park, Yong-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.486-487
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    • 2007
  • $Bi_2Sr_2Ca_{n-1}Cu_nO_x$(n=0, 1, 2) thin films have been fabricated by co-deposition at an ultra-low growth rate using ion beam sputtering(IBS) method. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. MgO(100) was used as a substrate. In order to appreciate stable existing region of Bi 2212 phase with temperature and ozone pressure, the substrate temperature was between 655 and $820^{\circ}C$ and the highly condensed ozone gas pressure in vacuum chamber was varied between $2{\times}10^{-6}{\sim}4{\times}10^{-5}$ Torr. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, $PO_3$ dependance on structural formation was scarcely observed regardless of the pressure variation.

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An Experimental Study on Characteristics of Engine Oil Diluted by a Bio-Alcohol Mixture Fuel (바이오알코올 혼합연료의 엔진오일 희석특성에 대한 실험적 연구)

  • Kim, HyunJun;Lee, HoKil;Oh, SeDoo;Kim, Shin
    • Tribology and Lubricants
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    • v.32 no.6
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    • pp.183-188
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    • 2016
  • Engine oil plays an important role in the mechanical lubrication and cooling of a vehicle engine. Recently, engine development has focused on the adoption of gasoline direct injection (GDI) and turbocharging methodology to achieve high-power and high-speed performance. However, oil dilution is a problem for GDI engines. Oil dilution occurs owing to high-pressure fuel injection into the combustion chamber when the engine is cold. The chemical components of engine oil are currently developed to accommodate gasoline fuel; however, bio-alcohol mixtures have become a recent trend in fuel development. Bio-alcohol fuels are alternatives to fossil fuels that can reduce vehicle emissions levels and greenhouse gas pollution. Therefore, the chemical components of engine oil should be improved to accommodate bio-alcohol fuels. This study employs a 2.0 L turbo-gas direct injection (T-GDI) engine in an experiment that dilutes oil with fuel. The experiment utilizes a variety of fuels, including sub-octane gasoline fuel (E0) and a bio-alcohol fuel mixture (Ethanol E3~E7). The results show that the lowest amount of oil dilution occurs when using E3 fuel. Analyzing the diluted engine oil by measuring density and moisture with respect to kinematic viscosity shows that the lowest values of these parameters occur when testing E3 fuel. The reason is confirmed to influence the vapor pressure of the low concentration bio-alcohol-fuel mixture.

Effects of Pressure Variation on the Combustion Characteristics of a Gaseous CH4/O2 Bipropellant in a Model Combustor (모델연소실 내 압력 변화가 메탄/산소 이원추진제의 연소특성에 미치는 영향)

  • Choi, Sun;Kim, Tae Young;Kim, Hee Kyung;Koo, Jaye;Kwon, Oh Chae
    • Journal of the Korean Society of Propulsion Engineers
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    • v.21 no.1
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    • pp.63-71
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    • 2017
  • Liquid methane ($CH_4$)/oxygen ($O_2$) bipropellants have been recently considered as a next-generation propellant due to eco-friendly and non-toxic properties, low cost and high performance. In this study, the combustion characteristics of gaseous $CH_4/O_2$ nonpremixed coflow flames in a model combustor with variation of internal pressure are investigated through measuring the combustion stability limits and visualizing flames. Results show that the combustion stability limits are extended and the reaction region is widened with increasing internal pressure of the combustion chamber for fuel-rich condition.