• Title/Summary/Keyword: Local oxidation

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Fabrication and characterization of SILO isolation structure (SILO 구조의 제작 방법과 소자 분리 특성)

  • Choi, Soo-Han;Jang, Tae-Kyong;Kim, Byeong-Yeol
    • Proceedings of the KIEE Conference
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    • 1988.07a
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    • pp.328-331
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    • 1988
  • Sealed Interface Local Oxidation (SILO) technology has been investigated using a nitride/oxide/nitride three-layered sandwich structure. P-type silicon substrate was either nitrided by rapid thermal processing, or silicon nitride was deposited by LPCVD method. A three-layered sandwich structure was patterned either by reactive ion etch (RIE) mode or by plasma mode. Sacrificial oxidation conditions were also varied. Physical characterization such as cross-section analysis of field oxide, and electrical characterization such as gate oxide integrity, junction leakage and transistor behavior were carried out. It was found that bird's beak was nearly zero or below 0.1um, and the junction leakages in plasma mode were low compared to devices of the same geometry patterned in RIE mode, and gate oxide integrity and transistor behavior were comparable. Conclusively, SILO process is compatible with conventional local oxidation process.

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Kinetics and Mechanistic Chemistry of Oxidation of Butacaine Sulfate by Chloramine-B in Acid Medium

  • Shubha, Jayachamarajapura Pranesh;Kotabagi, Vinutha;Puttaswamy, Puttaswamy
    • Bulletin of the Korean Chemical Society
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    • v.33 no.11
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    • pp.3539-3543
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    • 2012
  • Butacaine sulfate is an ester of p-aminobenzoic acid which has been widely used as a local anaesthetic and it is a long standing agent particularly for spinal anaesthesia. For this reason, a kinetic study of oxidation of butacaine sulfate by sodium N-chlorobenzenesulfonamide (chloramine-B or CAB) has been carried out in $HClO_4$ medium at 303 K in order to explore this redox system mechanistic chemistry. The rate shows a first-order dependence on both $[CAB]_o$, and $[substrate]_o$, and a fractional-order dependence on acid concentration. Decrease of dielectric constant of the medium, by adding methanol, increases the rate of the reaction. Variation of ionic strength and addition of benzenesulfonamide or NaCl have no significant effect on the rate. The reaction was studied at different temperatures and the activation parameters have been evaluated. The stoichiometry of the reaction has been found to be 1:2 and the oxidation products have been identified by spectral analysis. The observed results have been explained by plausible mechanism and the related rate law has been deduced.

Tunnel i unction-Mangnetorsistance in Co-Al-O$_{x}$-NiFe with oxidation conditions of Al thickness

  • Jeon, Dong-Min;Park, Jin-Woo;Suh, Su-Jeong
    • Journal of the Korean institute of surface engineering
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    • v.34 no.5
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    • pp.494-498
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    • 2001
  • Ferromagnets(FM)-Al-$O_{x}$ -Ferromagnets (FM) tunneling junctions were evaluated by changing the fabricating conditions of an Al-X$/_{x}$ layer. The junction composed of a thicker Al-$O_{x}$ shows the low resistance and the stable MR ratio about 16% in a wide range of oxidation time. For the junctions with the thinner Al-$O_{x}$ , they showed a fast increase of the barrier width as an increase of an oxidation time and exhibited a strong bias dependence. As oxidation time increased, the coercivity ($H_{c}$ ) of bottom Co layer increased gradually due to the local oxidation of Co bottom layer at a interface. However, the small formation of Co oxide did not largely influence on the deterioration of MR ratio.

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The Effects of Various Anti-Oxidation Additives in Silicon Carbide Refractory Saggars (탄화규소질 내화판에 있어서 내산화 첨가제의 영향)

  • 이준근
    • Journal of the Korean Ceramic Society
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    • v.17 no.3
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    • pp.145-150
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    • 1980
  • This paper deals with the clay-bonded silicon carbide refractory saggars in terms of its oxidation resistance. Oxidation is one of the major causes of failure in silicon carbide refractory saggars during its services. Various anti-oxidation additives are coated on or added into silicon carbide refractories and their effects are studied while other conditions are equal. Several conclusions can be derived for optimum anti-oxidation additive as: 1. The additive should wet each silicon carbide grain completely during its firing. 2. The additive should have high viscosity at temperatures around $1, 350^{\circ}C$ where most silicon carbide refractory saggars are being used. 3. The additive should have ability to absorb or desorb oxygen depending on the local atmosphere inside of saggar during it service. 4. The addition should be kept as minimum as possible to prevent any "sweating" or "bloating" phenomena.ing" phenomena.mena.

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Micro Raman Spectroscopic Analysis of Local Stress on Silicon Surface in Semiconductor Fabrication Process (반도체 제조 공정에서 실리콘 표면에 유입된 Stress의 마이크로 Raman 분광분석)

  • Son, Min Young;Jung, Jae Kyung;Park, Jin Seong;Kang, Sung Chul
    • Analytical Science and Technology
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    • v.5 no.4
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    • pp.359-366
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    • 1992
  • Using micro-Raman spectrometer, we investigated the evaluation of microstress on silicon surface after the local thermal oxidation. The induced stress of silicon surface after local thermal oxidation shows maximum value at the interface of silicon oxide and active area. The smaller the size of active area, the larger stress. From the evaluation of three other device isolation processes, A, B and moB, whose active size has $0.45{\mu}m$ in length, moB process is turned out to have the lowest stress value and the smallest bird's beak effect.

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A Study on Plastic Injection Molding of NanosStructured Surface with a Local Mold Heating System (국부 가열 금형을 이용한 플라스틱 나노 구조표면 사출성형 연구)

  • La, Moon Woo;Park, Jang Min;Kim, Dong Earn
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.14 no.4
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    • pp.8-13
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    • 2015
  • In this study, we fabricated and characterized a nanostructured surface based on a plastic injection molding with a local mold heating (LMH) system. A metal mold core with a closed packed nano convex array (CVA) was achieved by integrated engineering procedures: (1) master template fabrication by anodic aluminum oxidation (AAO), (2) nickel electroforming (NE) process, and (3) post-processing by precision machining. The nickel mold core was utilized to replicate a surface with a closed packed nano concave-array (CCA) based on injection molding using cyclic olefin copolymer (COC) as a plastic material. In particular, an LMH system was introduced to enhance transcription quality of the nano structures by delaying solidification of molten polymer near the surface of the mold core.

Effects of Oxidized Tallow on the Rabbit Serum Lipids and Antioxidant Activity of the In-vitro Lipids

  • Zeb, Alam;Rahman, Waheed Ur
    • Toxicological Research
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    • v.28 no.3
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    • pp.151-157
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    • 2012
  • This paper describes the effects of thermally oxidized tallow on the serum lipids profile and radical scavenging activity (RSA) of the lipids extracted from the different tissues of the rabbits. Tallow was thermally oxidized at $130^{\circ}C$ for 9, 18, 27, 36 and 45 h respectively. Thermally oxidized tallow was fed to the local strain of Himalayan rabbits for one week. Results show that oxidation increases the formation of hydroperoxides and decrease the level of radical scavenging activity of the tallow. The rabbit serum lipids profile showed a dose dependent increase in triglyceride, total cholesterol and LDL-cholesterol. However, no statistically significant increase was observed in the HDL-cholesterol with an increase of oxidation time. Serum glucose and rabbits body weight decrease significantly (p < 0.05) and was highly correlated with the serum lipids profile. The percent RSA of the lipids extracted from the liver, brain and muscles tissues showed a significant decrease with respect to 0.5, 1.0 and 1.5 g/body weight as well as oxidation time. Data suggests that thermal oxidation and use of thermally oxidized beef tallow is harmful and therefore an alternative way of cooking should be used.

A Surface Study of 304 and 316 Stainless Steel Oxidized between $300^{\circ}C$ and $500^{\circ}C$ ($300^{\circ}C$$500^{\circ}C$사이에서 산회된 304, 316 스테인리스강의 표면특성)

  • 김경록;이경구;강창석;최답천;이도재
    • Journal of the Korean institute of surface engineering
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    • v.32 no.1
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    • pp.43-48
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    • 1999
  • Oxidation behavior of 304 and 316 stainless steels was studied. After solution heat treatment, specimens were polished up to 1$mu \textrm{m}$ using $Al_2O_3$ powder and then subjected to oxidation between $300^{\circ}C$ and 50$0^{\circ}C$ in dry air. TEM and EDS were used for analyzing the components and structure of oxide film. TEM analysis of oxide film revealed that thin amorphous Fe oxide ($Fe_2O_3$) was formed on the top of surface while polycrystalline (Cr, $Fe_2O_3$ was formed below the amorphous Fe oxide layer. The specimens oxidized at $500^{\circ}C$ showed that 316 stainless steel had higher oxidation resistance than 304 stainless steel. These results suggest that Mo component of 316 stainless steel suppresses the formation of Cr carbide which may result in a local Cr depleted area.

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A Study on Surface Properties in SUS 300 base Stainless Steel (SUS 300계 스테인리스강의 표면특성에 관한 연구)

  • Lee, K.K.;Yoon, D.J.;Ghi, W.B.;Choi, D.C.;Lee, D.J.
    • Journal of the Korean Society for Heat Treatment
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    • v.12 no.1
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    • pp.31-39
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    • 1999
  • In the present study, oxidation behavior of 304 and 316 stainless steels was investigated. After solution treatment, specimens were polished up to $1{\mu}m$ $Al_2O_3$ grade and then subjected to oxidation treatment in dry air. The range of temperature was used for oxidation treatment at $300^{\circ}C{\sim}500^{\circ}C$ and TEM was used for analyzing the components and structure of oxide film. Also, these results were compared with the results of ESCA and TG. According to the results of TEM analysis, it was found that Cr oxide film was formed on top of the surface after room temperature oxidation but amorphous Fe oxide was formed on top of the surface and polycrystalline $(Cr,Fe)_2O_3$ was formed below the amorphous Fe oxide layer after $500^{\circ}C$ oxidation treatment. The oxidized specimens at $500^{\circ}C$ showed that 316 stainless steel resists more strongly to grain and grain boundary oxidation than 304 stainless steel. These results suggested that Mo component resolved in 316 stainless steel matrix suppressed the formation of Cr carbide which may results in local Cr deplete area.

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