• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.2
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• pp.93-101
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• 2002

We have proposed and fabricated two lateral type field emission diodes, poly-Si emitter by utilizing the local oxidation of silicon (LOCOS) and GaN emitter using metal organic chemical vapor deposition (MOCVD) process. The fabricated poly-Si diode exhibited excellent electrical characteristics such as a very low turn-on voltage of 2 V and a high emission current of $300{\;}\bu\textrm{A}/tip$ at the anode-to-cathode voltage of 25 V. These superior field emission characteristics was speculated as a result of strong surface modification inducing a quasi-negative electron affinity and the increase of emitting sites due to local sharp protrusions by an appropriate activation treatment. In respect, two kinds of procedures were proposed for the fabrication of the lateral type GaN emitter: a selective etching method with electron cyclotron resonance-reactive ion etching (ECR-RIE) or a simple selective growth by utilizing $Si_3N_4$ film as a masking layer. The fabricated device using the ECR-RIE exhibited electrical characteristics such as a turn-on voltage of 35 V for $7\bu\textrm{m}$ gap and an emission current of~580 nA/l0tips at anode-to-cathode voltage of 100 V. These new field emission characteristics of GaN tips are believed to be due to a low electron affinity as well as the shorter inter-electrode distance. Compared to lateral type GaN field emission diode using ECR-RIE, re-grown GaN emitters shows sharper shape tips and shorter inter-electrode distance.

• Journal of Construction Engineering and Project Management
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• v.3 no.3
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• pp.1-9
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• 2013

Environmental problems like global warming have now become important issues that should be considered in all industries, including construction. In South Korea, many studies have been conducted to achieve the government's goals of reduction in environmental impacts. However, the research on buildings has only focused on CO2 emission as a research target despite the fact that other environmental impacts resulting from ozone depletion and acidification should also be considered, in addition to global warming. In this regard, this study attempted to propose assessment criteria and methods to evaluate the environmental performance of the structures from various aspects. The environmental impact category can be divided into global impacts, regional impacts, and local impacts. First, global impacts include global warming, ozone layer depletion, and abiotic resource depletion, while regional impacts include acidification, eutrophication, and photochemical oxidation. In addition, noise and vibration occurring in the building construction phase are defined as local impacts. The evaluation methods on the eight environmental impacts will be proposed after analyzing existing studies, and the methods representing each environmental load as monetary value will be presented. The methods presented in this study will present benefits that can be obtained through green buildings with a clear quantitative assessment on structures. Ultimately, it is expected that if the effects of green buildings are clearly presented through the findings of this study, the greening of structures will be actively expanded.

• Journal of Mechanical Science and Technology
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• v.16 no.7
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• pp.1009-1018
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• 2002

The Representative Interactive Flamelet (RIF) concept has been applied to numerically simulate the combustion processes and pollutant formation in the direct injection diesel engine. Due to the ability for interactively describing the transient behaviors of local flame structures with CFD solver, the RIF concept has the capabilities to predict the auto-ignition and subsequent flame propagation in the diesel engine combustion chamber as well as to effectively account for the detailed mechanisms of soot formation, NOx formation including thermal NO path, prompt and nitrous 70x formation, and reburning process. Special emphasis is given to the turbulent combustion model which properly accounts for vaporization effects on the mixture fraction fluctuations and the pdf model. The results of numerical modeling using the RIF concept are compared with experimental data and with numerical results of the commonly applied procedure which the low-temperature and high-temperature oxidation processes are represented by the Shell ignition model and the eddy dissipation model, respectively. Numerical results indicate that the RIF approach including the vaporization effect on turbulent spray combustion process successfully predicts the ignition delay time and location as well as the pollutant formation.

• Journal of Information Display
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• v.2 no.3
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• pp.60-65
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• 2001

Lateral type poly-silicon field emitters were fabricated by utilizing the LOCOS (Local Oxidation of Silicon) process. For the implementation 'of an ideal field emission device with quasi-zero tunneling barrier, a new and fundamental approach has used conducted by introducing an intelligent carbon-based thin layer on the cathode tip surface via a field-assisted self-aligning of carbon (FASAC) process. Fundamental lowering of the turn-on field for the electron emission was feasible through the control of both the tip shape and surface barrier height.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.6 no.1
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• pp.18-26
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• 1997

Grinding burn formed on the ground surface is related to the maximum temperature of workpiece surface and wheel tempertaure in the grinding process. The thermal characteristics of workpiece and grinding conditions on the surface tempertaure of the oxidation growing layer after get out of contact with the grinding wheel. The assumption used in grinding power signatures leads to the local temperature distribution between grinding wheel and workpiece, i.e., a single curve determines temperatures anywhere within the grinding wheel at anytime. This information is useful in the study of the grinding burn penetration into the wheel and thus provides an presentation of grinding trouble monitoring for the burning. On the basis of grinding power signatures in the wheel, thermally optimum grinding conditions are defined and controlled. To cope with grinding burn, the use of grinding power signatures is an effective monitoring systems when occurring the grinding process. In this paper, the identified parameters suggested in this study which are derived from the grinding power signatures are presented, and prediction model by grinding power utilized a linear regression algorithm is applied.

• Journal of Environmental Science International
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• v.26 no.4
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• pp.447-456
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• 2017

Chemical properties of aerosols were investigated by analyzing the inorganic water-soluble content in $PM_{2.5}$ collected in the downtown area of Jeju City in Jeju Island. Due to an increase in both the number of visiting tourists and the size of local population, the number of cars in this area is increasing, causing an increase in $PM_{2.5}$. Eight $PM_{2.5}$-bound major inorganic ions were analyzed during the summer and winter periods. The water-soluble inorganic component represents a significant fraction of $PM_{2.5}$. In particular, secondary inorganic aerosols contribute 36.2% and 47.5% of $PM_{2.5}$ mass in summer and winter, respectively. Nitrate concentrations increase for $[NH_4{^+}]/[SO_4{^{2-}}]$>1.5, and excess ammonium, which is necessary for ammonium nitrate formation, is linearly correlated with nitrate. These results are clearly observed during the winter because conditions are more conducive to the formation of ammonium nitrate. A significant negative correlation between Nitrogen Oxidation Ratio (NOR) and temperature was observed. The obtained results can be useful for a better understanding of the aerosol dynamics in the downtown area in Jeju City.

• Journal of Korean Society for Atmospheric Environment
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• v.8 no.1
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• pp.45-51
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• 1992

A study on acidity in fog, dew and frost was carried out. Samples were taken during May 1990-February 1991 at two sites in Chongwon, Choongbook. The acidity of dew and of fog collected from grass at site A was 4.89 and 5.46, respectively. Dew in summer showed very strong acidity. The volume of dew deposited on grass was much less than the volume of rain, but dew is effective to diffuse acid predursors and acid materials. Dew and fog can remove more effectively atmospheric acid materiasl deoposited on grass by diurnal turbulent motion rather than direct absorption of acid predursors and materials in the atmosphere. In a polluted area, acidic dew and fog can be occurred by the direct absorption and oxidation of acidic predursors in the atmosphere as well as the role of wet removal on grass surface. Acidity of frost collected on teflon surface showed little difference to acidity of dew and fog on teflon surface. This suggests a similar absorption mechanism of atmospheric precursors and materials into dew and frost in the atmosphere. Strong acidity in dew, fog and frost appeared to occur from local pollution sources of several ten kilometres. In particular, strong acidity in dew, fog, and frost together with acid rain can accelerate a damage in ecosystems. Discussion is made on scientific analyses and seasonal variations of acidity of fog, dew and frost. A mechanism on acidification of fog, dew and frost is also discussed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.06a
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• pp.544-547
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• 2007

본 연구에서는 Shallow trench isolation(STI)를 형성하기 위한 과정을 제시할 것이다. 소자간 분리를 위한 전통적인 방법으로 LOCOS(Local Oxidation of Silicon) 방식이 사용되어왔으나, 소자가 미세해짐에 따라 LOCOS 방식에서 나타나는 단차와 Birds Beak이라는 횡 방향의 산화에 의한 활성 영역의 손실을 무시할 수 없게 되어 새로운 소자 분리 방법이 필요하게 되었으며 이러한 요구에 의해 도입된 Isolation 기술이 Shallow Trench Isolation(STI) 기술이다. 다양한 etching options은 중요한 부분이다. 이 경우에 trench etching의 방향은 점점 좁아지는 측면을 경사지게 하면서 협곡을 만드는 효과적인 방법을 사용할 것이다. 본 연구에서는 좁은 협곡(Shallow trench)의 절반만 시뮬레이션 될 것이다. 만약 모든 협곡의 시뮬레이션을 필요로 한다면 다변의 etching은 사용될 수 있다. STI 공정의 핵심은 trench etch를 좁게하면서 반도체 소자를 어떻게 하면 잘 분리할 수 있는가에 있다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.1
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• pp.1-5
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• 2001

STI(shallow trench isolation)-CMP(chemical mechanical polishing) process have been substituted for LOCOS(local oxidation of silicon) process to obtain global planarization in the below sub-0.5㎛ technology. However TI-CMP process, especially TI-CMP with RIE(reactive ion etching) etch back process, has some kinds of defect like nitride residue, torn oxide defect, etc. In this paper, we studied how to reduced torn oxide defects after STI-CMP with RIE etch back processed. Although torn oxide defects which can occur on trench area is not deep and not severe, torn oxide defects on moat area is not deep and not severe, torn oxide defects on moat area is sometimes very deep and makes the yield loss. Thus, we did test on pattern wafers which go through trench process, APECVD process, and RIE etch back process by using an IPEC 472 polisher, IC1000/SUVA4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the origin of torn oxide defects.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.723-725
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• 1998

STI CMP process are substituting gradually for LOCOS(Local Oxidation of Silicon) process to be available below sub-0.5um technology and to get planarized. The other hand, STI CMP process(especially STI CMP with RIE etch back process) has some kinds of defect like Nitride residue, Torn Oxide defect, etc. In this paper, we studied how to reduce Torn Oxide defects after STI CMP with RIE etch back process. Although Torn Oxide defects which occur on Oxide on Trench area is not deep and not sever, Torn oxide defects on Moat area is sometimes very deep and makes the yield loss. We did test on pattern wafers witch go through Trench process, APCVD process, and RIE etch back process by using an REC 472 polisher, IC1000/SUV A4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the root causes of torn oxide defects.