A study on the $YBa_{2}Cu_{3}O_{x}$ phase deposition by liquid aerosol PECVD
(미립액상 분말에 의한 $YBa_{2}Cu_{3}O_{x}$ 초전도체의 PECVD 증착법)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.6 no.2
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- pp.229-237
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- 1996