• 한국정보처리학회:학술대회논문집
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• 한국정보처리학회 2022년도 춘계학술발표대회
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• pp.477-480
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• 2022

반도체 성능 향상으로 신호를 전달하는 회로의 단위가 마이크로 미터에서 나노미터로 미세화되어 선폭(linewidth)이 점점 좁아지고 있다. 이러한 변화는 검출해야 할 불량의 크기가 작아지고, 정상 공정상태와 비정상 공정상태의 차이도 상대적으로 감소되어, 공정오차 및 공정조건의 허용범위가 축소되었음을 의미한다. 따라서 검출해야 할 이상징후 탐지가 더욱 어렵게 되어, 높은 정밀도와 해상도를 갖는 검사공정이 요구되고 있다. 이러한 이유로, 미세 공정변화를 파악할 수 있는 신규 검사 및 계측 공정이 추가되어 TAT(Turn-around Time)가 증가하게 되었고, 웨이퍼가 가공되어 완제품까지 도달하는데 필요한 공정시간이 증가하여 제조원가 상승의 원인으로 작용한다. 본 논문에서는 웨이퍼의 검계측 데이터가 아닌, 제조공정 과정에서 발생하는 다양한 센서 및 장비 데이터를 기반으로 웨이퍼 제조 결과가 양품인지 그렇지 않으면 불량인지 구별할 수 있는 가상계측 모델을 제안한다. 기계학습의 여러 알고리즘 중에서 다양한 장점을 갖는 XGBoost 알고리즘을 이용하여 예측모델을 구축하였고, 데이터 전처리(data-preprocessing), 주요변수 추출(feature selection), 모델 구축(model design), 모델 평가(model evaluation)의 순서로 연구를 수행하였다. 결과적으로 약 94% 이상의 정확성을 갖는 모형을 구축하는데 성공하였으나 더욱 높은 정확성을 확보하기 위해서는 반도체 공정과 관련된 Domain Knowledge 를 반영한 모델구축과 같은 추가적인 연구가 필요하다.

• Current Optics and Photonics
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• 제7권1호
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• pp.47-53
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• 2023

We propose a centralized passive-optical-network monitoring scheme using the resonance-spectrum properties of a Fabry-Perot cavity based on fiber Bragg gratings. Each cavity consists of two identical uniform fiber Bragg gratings and a varying cavity length or grating length, which can produce a unique single-mode resonance spectrum for the drop-fiber link. The output spectral properties of each cavity can be easily adjusted by the cavity length or the grating length. The resonance spectrum for each cavity is calculated by the transfer-matrix method. To obtain the peak wavelength of the resonance spectrum more accurately, the effective cavity length is introduced. Each drop fiber with a specific resonance spectrum distinguishes between the peak wavelength or linewidth. We also investigate parameters such as reflectivity and bandwidth, which determine the basic performance of the fiber Bragg grating used, and thus the output-spectrum properties of the Fabry-Perot cavity. The feasibility of the proposed scheme is verified using the Optisystem software for a simplified 1 × 8 passive optical network. The proposed scheme provides a simple, effective solution for passive-optical-network monitoring, especially for a high-density network with small end-user distance difference.

• 드라이브 ㆍ 컨트롤
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• 제21권1호
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• pp.8-15
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• 2024

This thesis investigates the jetting characteristics of an aerosol jet printing (AJP) process as a function of design and operating conditions. The governing equations of the AJP system are derived for experimentation and analysis. To understand the characteristics of the AJP system, it analyzes the jetting characteristics as a function of the flow rate of the carrier gas and the sheath gas, and the variation of the linewidth with the nozzle exit size based on particle tracking. The thesis focuses on computational fluid dynamics (CFD), which is a computer simulation. The particle tracking results obtained by CFD were analyzed using MATLAB. CFD analytical models can be analyzed in environments with different conditions and consider more specific situations than mathematical computational models. The validity of the CFD analysis is shown by comparing the experimental results with the CFD analysis.

• 드라이브 ㆍ 컨트롤
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• 제21권2호
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• pp.8-14
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• 2024

This paper investigates the jetting characteristics of an aerosol jet printing (AJP) process as a function of design and operating conditions. The governing equations of the AJP system are derived for experimentation and analysis. To understand the characteristics of the AJP system, this thesis analyzes the jetting characteristics as a function of the flow rate of the carrier gas and the sheath gas, and the variation of the linewidth with the nozzle exit size based on particle tracking. This thesis focuses on computational fluid dynamics (CFD), which is a computer simulation. The particle tracking results obtained by CFD were analyzed using MATLAB. CFD analytical models can be analyzed in environments with different conditions and consider more specific situations than mathematical computational models. The validity of the CFD analysis is shown by comparing the experimental results with the CFD analysis.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.152-152
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• 2016

We studied the effect of the silver grid size on graphene transparent conducting films for flexible organic solar cells (OSCs). The silver grid was used an assistant layer of the graphene to reduce the sheet resistance of substrates. Silver grid with various graphene sizes for optimizing transmittance and sheet resistance of substrates were fabricated on polyethylene terephthalate (PET) substrates to form the hybrid films. The optimized grid geometry on the single layer graphene (SLG) was the grid dimension $200{\mu}m{\times}200{\mu}m{\times}50nm{\times}2{\mu}m$ (length ${\times}$ width ${\times}$ height ${\times}$ linewidth), where the sheet resistance was $55.73{\Omega}/square$ with the average transmittance of ~ 92.83 % at 550 nm. The properties of the OSCs fabricated using SLG with optimized silver grids on PET substrates show a short circuit current of $10.9mA/cm^2$, an open circuit voltage of 0.58 V, a fill factor of 60.8 %, and a power conversion efficiency (PCE) of 3.9 %. The PCE was improved about 91% than that of the OSCs using the SLG without the silver grid. These results demonstrate that the optimized grid geometry to the based on the graphene transparent electrodes contribute to improving the performance of OSCs.

• 한국광학회지
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• 제7권3호
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• pp.238-243
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• 1996

XeCl 레이저로 펌핑하는 쌍공진기 색소레이저와 2단 증폭시스템을 개발하여 DIAL시스템에 적합한 두개의 파장을 동시 또는 순차적으로 출력하였다. 개발된 쌍공진기는 1200g/mm의 회절격자를 갖는 grazing-incidence 방법에서 제1차 및 제2차 회절차수를 이용하여 구성되었다. 출력특성은 스펙트럼 선폭이 10pm이하이고 펌프 에너지에 대한 전체효율은 6% 이상이다. 또한, 파장가변 영역은 제1차 및 제2차의 회절차수에 대해 각각 434-470nm, 436-468nm이며 2단의 증폭기의 증폭이득은 37dB, 추출효율은 9%이다. 개발된 레이저 증폭시스템에서 Coumarine-450의 색소로 발진하고 이의 출력 6mJ을 DIAL 시스템의 레이저 광으로 전송하여 수원 상공의 NO$_{2}$가스 농도분포를 측정하였다. 이 결과 개발된 색소레이저 시스템은 DIAL의 레이저 광원으로 매우 적합함을 확인하였다.

• 한국세라믹학회지
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• 제40권5호
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• pp.428-433
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• 2003

이 연구에서는 소결온도와 Zr치환에 따른 아이솔레이터/서클레이터용 YIG 페라이트의 미세구조와 전자기적 특성의 변화를 고찰하고자 하였다. 조성은 $Y_{2.1}$C $a_{0.9}$F $e_{4.4-x}$ $V_{0.5}$I $n_{0.05}$A $l_{0.05}$Z $r_{x}$ $O_{12}$에서 x의 값을 0, 0.05, 0.1, 0.2로 변화시켰으며, 일반적인 세라믹 제조 공정으로 YIG페라이트를 제조하였다. 그 결과, Zr이 0.1 mol 정도 치환된 YIG 페라이트가 가장 높은 포화자화(1097 gauss) 값을 나타내었으며, 또한, Zr을 0.2 mol 치환한 경우 격리도 18.60 dB, 삽입손실 0.45 dB의 마이크로파 특성을 나타내었다. 자기 공명 선폭($\Delta$H)은 Zr의 치환량이 증가할수록 감소하는 경향을 보였다.다.다.다.

• 천문학회지
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• 제35권2호
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• pp.97-103
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• 2002

We have mapped 1 $deg^2$ region toward a high latitude cloud MBM 40 in the J = 1 - 0 transition of $^{12}CO$ and $^{13}CO$, using the 3 mm SIS receiver on the 14 m telescope at Taeduk Radio Astronomy Observatory. We used a high resolution autocorrelator to resolve extremely narrow CO linewidths of the molecular gas. Though the linewidth of the molecular gas is very narrow (FWHP < 1 km $s^{-1}$ ), it is found that there is an evident velocity difference between the middle upper part and the lower part of the cloud. Their spectra for both of $^{12}CO$ and $^{13}CO$ show blue wings, and the position-velocity map shows clear velocity difference of 0.4 km $s^{-1}$ between two parts. The mean velocity of the cloud is 3.1 km $s^{-1}$. It is also found that the linewidths at the blueshifted region are broader than those of the rest of the cloud. We confirmed that the visual extinction is less than 3 magnitude, and the molecular gas is translucent. We discussed three mass estimates, and took a mass of 17 solar masses from CO integrated intensity using a conversion factor $2.3 {\times} 10^{20} cm^{-2} (K\;km s^{-1})^{-1}$. Spatial coincidence and close morphological similarity is found between the CO emission and dust far-infrared (FIR) emission. The ratio between the 100 f.Lm intensity and CO integrated intensity of MBM 40 is 0.7 (MJy/sr)/(K km $s^{-1}$), which is larger than those of dark clouds, but much smaller than those of GMCs. The low ratio found for MBM 40 probably results from the absence of internal heating sources, or significant nearby external heating sources.

• 한국정밀공학회지
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• 제26권8호
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• pp.72-78
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• 2009

We developed a line standards measurement system using an optical microscope and measured two kinds of line standards. It consists of three main parts: an optical microscope module including a CCD camera, a stage system with a linear encoder, and a measurement program for a microscopic image processing. The magnification of microscope part was calibrated using one-dimensional gratings and the angular motion of stage was measured to estimate the Abbe error. The threshold level in line width measurement was determined by comparing with certified values of a line width reference specimen, and its validity was proved through the measurement of another line width specimen. The expanded uncertainty (k=2) was about 100 nm in the measurements of $1{\mu}m{\sim}10{\mu}m$ line width. In the comparison results of line spacing measurement, two kinds of values were coincide within the expanded uncertainty, which were obtained by the one-dimensional measuring machine in KRISS and the line standards measurement system. The expanded uncertainty (k=2) in the line spacing measurement was estimated as $\sqrt{(0.098{\mu}m)^2+(1.8{\times}10^{-4}{\times}L)^2}$. Therefore, it will be applied effectively to the calibration of line standards, such as line width and line spacing, with the expanded uncertainty of several hundreds nanometer.

• Journal of Korean Vacuum Science & Technology
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• 제4권1호
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• pp.23-26
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• 2000

We have fabricated by metal organic chemical vapor deposition (MOCVD) In$\_$0.13/Ga$\_$0.87/N/GaN multiple quantum well (MQW) with thickness as thin as 10 A and barriers also of th same width on (0001) sapphire substrate. We have investigated this thin MQW by steady-state and time-resolved photoluminescence(PL) in picosecond time scale in a wide temperature range from 10 to 290 K. In the PL at 10 K, we observed a broad peak at 3.134 eV which was attributed to the quantum well emission of InGaN. The full width at half maximum (FWHM) of this peak was 129 meV at 10 K and its broadening at low temperatures was considered to be due to compositional fluctuations and interfacial disorder in the alloy. The narrow width of the quantum well was mainly responsible for the broadening of the emission linewidth. We also observed an intense and sharp peak at 3.471 eV of GaN barrier. From the temperature dependent PL measurements, the activation energy of the InGaN quantum well emision peak was estimated to be 69 meV. The lifetime of the quantum well emission was found to be 720 ps at 10 K, which was explained in terms of the exciton localization arising from potential fluctuations.