• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.51-55
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• 2018

As the OLED industry develops, display equipment is becoming larger. As a result, the stage required for display equipment is getting bigger. This enlargement led to increase in OLED production and industrial development. However, due to the large scale of the stage, other problems due to overheating and overheating caused by heavy load on the linear motor, which is mainly used in the stage, must be solved. In this study, a linear motor equipped with a cooling channel is modeled and the three - dimensional heat conduction flow analysis for this model is simulated using Fluent to analyze the cooling efficiency and cooling efficiency according to the cooling water flow rate. As a result, the cooling channel was effective and the cooling effect and efficiency were the best when the flow rate was about 5 ~ 10 L./min. In addition, the cooling effect is increased when the flow rate is increased, but the efficiency is significantly lowered when the flow rate is more than the predetermined value.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.798-800
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• 2001

Precision control technologies are required for photolithography. The linear BLDC motor is used for the stage operations. The stage that is installed in a photolithography device is basically controlled in three directions(x, y, z axes). This paper presents precision control technologies of the linear BLDC motor in one direction by computer simulations. A position control system with linear BLDC motor is now being tested.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.11-15
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• 2002

This paper presents the thermal characteristic analysis of a high-speed HMC with spindle speed of 50,000rpm. The spindle is supported by two radial and axial magnetic bearings. and the built-in motor is located between the axial and rear radial magnetic bearings. The X-axis and Y-axis feeding systems are composed of linear motor and linear motion guides, and the Z-axis feeding system is composed of servo-motor, ballscrew and linear motion guide. The thermal analysis model of high-speed HMC is constructed by the finite element method, and the thermal characteristics in the design stage are estimated based on the temperature distribution and thermal deformation under the conditions related to the heat generation of built-in motor, magnetic bearings, linear motors, servo-motor, ballscrew, and so on.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.316-320
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• 2000

An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic oscillator which generates elliptical oscillations. Elliptical oscillations are generated by synthesizing two degenerated modes. The design of a stator for an Ultrasonic linear motor was optimized with respect to vibration mode and direction of vibratory displacement by employing the finite element method. The motors were designed by varying the width of stator vibrator and the thickness, the length and the position of piezoceramics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.5 s.182
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• pp.85-92
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• 2006

Recently in the field of precision positioning device, the contact-free stages are gaining focuses with their outstanding performances by eliminating mechanical frictions. This paper presents the driving algorithm for contact-free linear stage based on switched reluctance principle. The proposed driving algorithm has a similar structure of that of switched reluctance motor but this study has its own originality in terms of reducing the normal farces and force ripple at the same time. The simulation and experiment are executed to verify the proposed algorithm.

• Proceedings of the KIEE Conference
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• 2001.10a
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• pp.9-11
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• 2001

This paper deals with design and characteristic analysis of a permanent magnet linear synchronous motor for magnetic levitation stage of semi-conductor manufacture machine. In order to improve the control performance by detent force minimization, skew and PM offset method are used.