Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design and Characteristic Analysis of a Linear Motor for Magnetic Levitation

자기부상 stage 구동 리니어 모터의 설계 및 특성해석

  • Kang, Gyu-Hong (Dept. of Electric Engineering, Chang-Won University) ;
  • Ahn, Ho-Jin (Dept. of Electric Engineering, Chang-Won University) ;
  • Hong, Jung-Pyo (Dept. of Electric Engineering, Chang-Won University) ;
  • Kang, Do-Hyun (Korea Electro-technology Research Institute(KERI))
  • Published : 2001.10.26
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Abstract

This paper deals with design and characteristic analysis of a permanent magnet linear synchronous motor for magnetic levitation stage of semi-conductor manufacture machine. In order to improve the control performance by detent force minimization, skew and PM offset method are used.

Keywords