• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.245-245
• /
• 2016

본 연구에서는 선형 대향 타겟 스퍼터 (Linear Facing Target Sputtering: LFTS) 시스템을 이용하여 ITO와 Ti doped $In_2O_3$ (TIO) 타겟을 Co-sputtering한 InSnTiO 투명 전극의 전기적, 광학적 특성을 연구하였다. InSnTiO 투명전극의 전기/광학적 및 구조적 특성은 Hall measurement, UV/Vis spectrometry, X-ray Diffraciton 분석법을 통해 최적화 하였고, DC power, substrate to target distance (TSD), target to target distance (TTD), ambient treatment 변수 조절을 통해 최적화된 LFTS InSnTiO 투명전극을 제작하였다. LFTS 공정을 이용한 InSnTiO 투명전극의 성막 공정 중 DC파워와 공정압력 변화에 따른 구조적, 표면적 특성 변화는 Field-Emission Scanning Electron Microscopy (FE-SEM) 과 X-ray Diffractometer (XRD) 분석을 통해 관찰하였다. 이렇게 증착된 InSnTiO 투명전극은 급속열처리 시스템으로 (Rapid Thermal Annealing system) 후열처리를 진행하여 투과도의 향상과 면저항의 감소를 확인하였다. 본 연구에서는 다양한 분석을 통해 Co-sputtering한 InSnTiO 박막의 특성과 다양한 장점을 소개한다.

• Journal of Biomedical Engineering Research
• /
• v.8 no.2
• /
• pp.171-176
• /
• 1987

Wiener filtering method was applied to the dual energy imaging procedure in digital radiography(D.R.). A linear scanning photodiode arrays with 1024 elements(0.6mm H 1.3mm pixel size) were used to obtain chest images in 0.7 sec. For high energy image acquisition, X-ray tube was set at 140KVp, 100mA with a rare-earth phosphor screen. Low energy image was obtained with X-ray tube setting at 70KVp, 150mA. These measured dual energy images are represented in the vector matrix notation as a linear discrete model including the additive random noise. Then, the object images are restored in the minimum mean square error sense using Wiener filtering method in the transformed domain. These restored high and low energy images are used for computation of the basis image decomposition. Then the basis images are linearly combined to produce bone or tissue selective images. Using this process, we could improve the signal to noise ratio characteristics in the material selective images.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.16 no.5
• /
• pp.7-13
• /
• 2007

This study proposes a new screw measurement system that is capable of measuring the pitch or lead of a screw, which is one of the most important parameters representing the screw quality. There are various conventional methods for screw measurement including some mechanical and optical ones, but they can not be applied to measure the lead except the profiles or sizes. The newly suggested method is able to measure the pitch or lead directly. This is executed by scanning the thread with a digital probe while the target screw rotates. The devised measurement system is a integrated computer system which is composed of a stepping motor, a digital linear gauge and a chuck device for holding the measured screw. In order to operate the system effectively and conveniently, a computer program having graphical user interface facility is developed. Some experiments were done to prove the effectiveness of the system.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.15 no.3
• /
• pp.111-119
• /
• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.08a
• /
• pp.177-179
• /
• 2011

The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.

• Macromolecular Research
• /
• v.9 no.6
• /
• pp.297-302
• /
• 2001

Rice starch was incorporated into linear low density polyethylene (LLDPE) using a Brabender Plastic-Corder internal mixer at a temperature of 140$\^{C}$ and 40 rpm. The starch loading was varied from 0 to 30% with 5 intervals. Studies on brabender torque development, mechanical properties and water absorption were investigated. The starch loading did not influence the brabender torque significantly. With respect to mechanical properties; the tensile strength and elongation at break decrease with increasing starch loading. The Young's modulus also increases with the starch filling. Mechanical properties were deteriorated as the starch absorbed moisture. The rate of water absorption was dependent on the starch filling in the composites. The scanning electron microscope (SEM) analysis was performed for the tensile fracture surfaces and it revealed the starch agglomeration and a poor dispersion of starch in the LLDPE matrix.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.223-223
• /
• 2010

본 연구에서는 Al-doped ZnO (AZO) 박막을 linear facing target sputter (LFTS) 시스템을 이용하여 성막 하였고 박막의 특성을 분석하였다. LFTS 시스템은 마주보는 두 AZO 타겟 사이에 고밀도의 플라즈마를 구속시켜 플라즈마 데미지 없이 산화물 박막을 성막 시킬 수 있는 장치이다. LFTS로 성막된 AZO 박막의 인가된 DC 파워에 따른 전기적 특성을 분석하기 위해 four-point probe와 Hall measurement 장비를 이용하여 분석을 진행 하였으며, 광학적 특성 분석을 위해 UV/Vis spectrometer 장비를 이용하여 분석하였다. AZO 박막의 구조적, 표면적 특성을 분석하기 위해 X-ray diffraction(XRD) 및 scanning electron microscope(SEM)을 사용하여 상온에서 성막된 AZO 박막의 특성을 관찰 하였다. 또한 AZO 박막의 PET 기판과의 접합성 및 구부림 시의 안정성을 평가하기 위해 bending test를 진행 하였다. 최적화된 AZO 박막으로부터 기판에 성막 중 열처리공정이나 후 열처리 공정의 진행 없이 35 ohm/square의 낮은 면저항과 약 80 % 이상의 투과율을 얻을 수 있었다. LFTS 시스템을 이용하여 낮은 공정온도에서 AZO 박막을 성막 하였음에도 불구하고 낮은 저항과 높은 투과도 특성을 나타내고 있어 기존의 투명 박막을 대체 할 수 있는 가능성을 제시하였다

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.6 s.183
• /
• pp.96-103
• /
• 2006

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In the long range (about several tens of ${\mu}m$), measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100{\mu}m\times100{\mu}m$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. As a result, XY scanner can have good performance. Using this AFM system, 3um pitch specimen was measured. The uncertainty of total system has been evaluated. X and Y direction performance is different. X-direction measuring performance is better. So to evaluate only ID pitch length, X-direction scanning is preferable. Its expanded uncertainty(k=2) is $\sqrt{(3.96)^2+(4.10\times10^{-5}{\times}p)^2}$ measured length in nm.

• Progress in Medical Physics
• /
• v.1 no.1
• /
• pp.91-95
• /
• 1990

The solid state detector system was constructed using commercially available rectifier diode for the assessment of quality assurance in radiotherapy. Dosimetry system which consists of the electrometer and the water phanton was used for measuring small field size scanning. The measured results, which had linearity in accordance with variation of radiation dose for gamma-ray of Co- 60 and 6 and 10MV photons of linear accelerator, showed quite linear characteristics within 1% error. The percent depth dose of 10MV photon of Mevatron KD linear accelerator was measured in small field size using diode, and the results were compared with that of using ion chambers. The results show that the difference of percent depth dose between the value of diode and that of ion chamber was negligible in large field size. However, in small size less than 4$\times$4cm, the difference of percent depth dose estimated by diode and ion chamber was 4.7% by extrapolation to 0$\times$0cm. Considering the smaller volume of diode than that of ion chamber, it might be more reliable to use diode for estimating percent depth dose. Above results suggest that diode can be used for routine check such as beam profile, flatness, symmetry and energy

• Laser Solutions
• /
• v.11 no.1
• /
• pp.1-6
• /
• 2008

We proposed new light guide panel (LGP) fabrication method exploiting laser-processed inner scatterers and surface pattern. The proposed method has achieved LGP performance improvement in both brightness and uniformity. The inner scatterers and surface pattern of grid type were fabricated with a 2nd harmonic Nd:YAG pulse laser engraving system and a $CO_2$ laser scanning system, respectively. In the implementation of LGP, inner scatterers was arranged in accordance with linear or curved pattern with changing density and surface pattern was engraved on the surface of an inner-scatterers embedded LGP. The increase of scatterers' density and the use of surface patterns in both linear and curved pattern provided high luminance and uniformity enhancement. While thecurved pattern incorporated with increased scatterers' density and surface patterns yielded brightness improvement with preserving good uniformity, the linear pattern showed highly localized brightness near the light entrance of the LGP. We can also observe that the uniformity was mainly determined by pattern of inner scatterers, and the brightness was improved by the higher density and the utilization of surface patterns. From the results, the use of laser-processed inner and surface patterns can be a potential alternative for efficient and simple LGP fabrication method.