• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.692-695
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• 2000

This paper is concerned with Accuracy Design of LM Guide System in Machine Tools. Elastic deformation of bearing is calculated by Hertz contact theory and motion error of LM block is analyzed. A new algorithm using block stiffness is proposed fur the analysis of motion accuracy of the table. The best advantage of this algorithm is fast analysis speed because it isn't necessary iteration processes for satisfying equilibrium equation of the table. Motion errors of the table analyzed under artificial form error of rail theoretically and experimentally. Only one of two rails is bent by putting a thickness gauge into horizontal direction. This form error of rail is measured by gap sensor against the other rail. Then, motion errors of the table are predicted by proposed new algorithm theoretically and measured by laser interferometer. Measurements are carried out by changing the preload and thickness. The results show that the table motion errors are reduced from 1/2 to 1/60 times than form error of rail according to its height and width. And the effect of preloading is almost negligible.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• 한국안전학회지
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• 제24권4호
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• pp.11-16
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• 2009

This research investigates contact angle of Linear Guide Way through a experimental result and theoretical analysis. Since last ten years, most of researchers who concerned with the precision machinery and semiconductor device production etc. so the researches about Linear Guide Way have been unnoticed. The precision machinery and semiconductor device production system has the principle which transfers the mechanical moving to accuracy position control. The Linear Guide Way system has the principle which transfers mechanical moving to accuracy position control is very important to improve performance of the precision machinery and semiconductor device production system. So, In this research, in order to improvement for producing Linear Guide Way, bearing loading analysis and contact angle change through Linear Guide Way theoretical analysis and bearing modeling. Through this study, we may expect that there will be more improvement for producing Linear Guide Way.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.250-256
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clarance of table is actively controlled corresponding to the amount of error with the nariable capillary,anmed as ACC. In previous paper,through the basic test, it was confirmed that by the use of ACC,the error motion within 2.7 .mu.m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the freqency bandwidth of 5.5Hz structurally. In this paper,we performed practital compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy,iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error,the linear and angular motion error are improved upto 0.25 .mu.m and 0.4arcsec,which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.347-353
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• 2004

Due to various advantages over the conventional linear motion device such as ball-screw, linear motors have been used in wide variety of industrial applications for years. Driven by increased demand for precision machine tools, the importance of high positioning accuracy, high stiffness and high thrust are greatly increasing. The merits of linear motor are high speed high acceleration and good positioning accuracy. In addiction, Linear motor for high qualify machine tool call for high thrust, high stiffness. In this paper, thrust ripple, detent force and thermal behavior are considered for the development of high performance linear motor whose thrust is up to 1,900N. This paper presents a comprehensive study for an iron core type linear motor characteristics that include the influence of PM position on thrust ripple by detent force and motor dynamics as well.

• 한국정밀공학회지
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• 제28권3호
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• pp.265-274
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• 2011

This paper presents current state of the prediction simulator of structural characteristics of machinery equipment accuracy. Developed accuracy prediction simulator proceeds and estimates the structural analysis between the designer and simulator through the internet for convenience of designer. 3D CAD model which is input to the accuracy prediction simulator would simplified by the process of removing the small hole, fillet and chamfer. And the structural surface joints would be presented as the spring elements and damping elements for the structural analysis. The structural analysis of machinery equipment joints, containing rotary motion unit, linear motion unit, mounting device and bolted joint, are presented using Finite Element Method and their experiment. Finally, a general method is presented to tune the static stiffness at a rotation joint considering the whole machinery equipment system by interactive use of Finite Element Method and static load experiment.

• 한국정밀공학회지
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• 제31권5호
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.