• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.436-437
• /
• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• Journal of the Mineralogical Society of Korea
• /
• v.19 no.3 s.49
• /
• pp.189-195
• /
• 2006

Compression work on a pyrite powder has been carried out using energy dispersive X-ray diffraction (EDXRD) with Mao-Bell type diamond anvil cell (DAC) and synchrotron radiation(SR) at room temperature. It has been reported the bulk moduli of pyrite show the large variations depending on the experimental conditions as well as the apparatus used. Thus, two kinds of sample in different pressure transmitting media of both NaCl and MgO powder emerged in alcoholic fluids were subjected to measure their compressibilities. Bulk moduli thus obtained are 138.9 GPa and 198.2 GPa, respectively, and this result contradicts to the anticipated values according to the hydrostaticity conditions of the sample chamber. This might be due to the alcoholic fluids phase transition mainly with the side effects from the difference of both solid state detector (SSD) used and E*d value applied. All experiments were performed at the Beam Line 1B2 of Pohang Light Source (PLS).

• Transactions of the Korean Society of Automotive Engineers
• /
• v.5 no.3
• /
• pp.54-65
• /
• 1997

To quantify the LII signals from soot particle of flames in diesel engine cylinder, a new method has been proposed for correcting LII signal attenuated by soot particles between the measuring point and the detector. It has been verified by an experiment on a laminar jet ethylene-air diffusion flame. Being proportional to the attenuation, the ratio of LII signal at two different detection wavelengths can be used to correct the measured LIIsignal and obtain the unattenuated LII signal, from which the soot volume fraction in the flame can be estimated. Both the 1064-nm and frequency-doubled 532-nm beams from the Nd : YAG laser are used. Single-shot, one-dimensional(1-D) line images are recorded on the intensified CCD camera, with the rectangular-profile laser beam using 1-mm-diameter pinhole. Two broadband optical interference filters having the center wavelengths of 647 nm and 400 nm respectively and a bandwidth of 10 nm are used. This two-wavelength correction has been applied to the ethylene-air coannular laminar diffusion flame, previously studied on soot formation by the laser extinction method in this laboratory. The results by the LII measurement technique and the conventional laser extinction method at the height of 40 nm above the jet exit agreed well with each other except around outside of the peaks of soot concentration, where the soot concentration was relatively high and resulting attenuation of the LII signal was large. The radial profile shape of soot concentration was not changed a lot, but the absolute value of the soot volume fraction around outside edge changed from 4ppm to 6.5 ppm at r=2.8mm after correction. This means that the attenuation of LII signal was approximately 40% at this point, which is higher than the average attenuation rate of this flame, 10~15%.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.32 no.7
• /
• pp.37-42
• /
• 2004

In order to monitor the impact locations in smart structures, multipoint ultrasonic sensors are to be employed. In this study, a multiplexing demodulator with wide dynamic range was proposed to detect the impact locations using FBG sensors, and a stabilization controlling system was also developed for the maintenance of maximum sensitivity of sensors. Two FBG sensors were attached on the bottom side of the aluminum beam specimen and low velocity impact tests were performed to detect the one-dimensional impact locations. As a result, multiplexed in-line FBG sensors could detect the moment of impact precisely, and found the impact locations with the average location error below 0.58mm.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.33 no.1
• /
• pp.78-84
• /
• 2005

In the chemical laser system with a radial expansion nozzle array, the laser beam generation is achieved by mixing F atom from supersonic nozzle and $D_{2}$ molecule from holes of round-bended supply line. Based on that the fuel injection angle with main stream has a great influence of performance on supersonic combustor, the effects of $D_{2}$ injection angles with the main F flow on mixing enhancement are numerically investigated. The results are discussed by comparison with three cases of $D_{2}$ injection angles; $10^{o}$, $20^{o}$ and $40^{o}$ with the main flow direction. Major results reveal that as the $D_{2}$ injection angle increases, the maximum small signal gains and the static pressure in the laser cavity become higher. Consequently, the $D_{2}$ injection angle between $20^{o}$ and $40^{o}$ is recommended as an optimized geometric parameter in consideration of both of high gains and low cavity pressure.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.13 no.6
• /
• pp.582-589
• /
• 2002

This paper presents 12.2 GHz ~ 12.7 GHz frequency band reflection type 5-bit digital phase shifter with constant insertion loss property that was fabricated with relatively low cost's InGaAs HEMT for amplifier. The unavoidable large insertion loss difference between on and off states of HEMT, when it is designed by conventional design theory based on ideal switching device, is removed by transforming the HEMT impedances at on and off states to other proper values connecting a certain length transmission line to HEMT and then applying the conventional design theory. The fabricated 5-bit digital phase shifter shows very good insertion loss properties of less than 1.5 dB insertion loss difference and -4.5 dB ~ -6 dB insertion loss in 35 phase steps at 12.2 GHz ~ 12.7 GHz. These results verify the design method presented in this paper, which is useful to design phase shifter of constant insertion loss with non-ideal switching device.

• Proceedings of the Korea Crystallographic Association Conference
• /
• 2003.05a
• /
• pp.8-8
• /
• 2003

Electron-phonon interaction plays a significant role in forming of colossal magnetoresistance effect (CMR). Polaron formation was observed by neutron diffraction and by extended X-ray absorption fine structure (EXAFS) analysis. Local probe as given by the EXAFS is a useful method to study the polaronic charge and its dependence on temperature and ions size. Here we present the EXAFS study of polaronic charge in La/sub 0.7/Ca/sub 0.3-X/Ba/sub X/MnO₃ compositions. The single phase La/sub 0.7/Ca/sub 0.3-X/Ba/sub X/MnO₃ manganites (x=0; 0.03; 0.06, ..., 0.3) were prepared by ceramic technology [1]. The Curie temperature was determined by extrapolation of the temperature dependence of the magnetization (down to zero magnetization). EXAFS experiments were carried out at the 7C EC beam line of the Pohang Light Source (PLS) in Korea. The atomic pair distribution functions (PDF) were obtained by re-regularization method [2] from filtered spectra. The PDF for the x=0.3 sample showed a single peak function and for x=0.0, 0.03, 0.06, 0.09, 0.12 compositions were asymmetric in agreement with a small Jahn-Teller elongation of two (short and long) bonds of the MnO/sub 6/ octahedron. Dispersion, σ/sub Min-O//sup 2/, and asymmetry, σ/sub Min-O//sup 3/, of the Mn-O bond distances varied significantly with x and showed a maximums at x=0.09. The maximum of σ/sub Min-O//sup 2/ is caused by increase of dynamic rms displacements of the Mn-O distances near the T/sub C/. The observed x dependence of σ/sub Min-O//sup 3/ reflects the reduction of charge carriers mobility at approaching to T/sub C/ from low as well as high temperatures.

• Proceedings of the Korean Environmental Sciences Society Conference
• /
• 1996.04a
• /
• pp.22-22
• /
• 1996

;The Kwinana Shoreline Fumigation Experiment(KSFE) took place in Fremantle, WA, Australia between 23 January and 8 February, 1995. All measurement systems performed to expectation. The CSIRO DAR(Division of Atmospheric Research) LIDAR measured plume sections from near the Kwinana Power Station(KPS) stacks to up to about 5 km downstream. It also measured boundary layer aerosols and the structure of the boundary layer on some occasions. Both stages A and C of KPS were used as tracers at different times. Radiosonde and double theodolite sounding systems measured temperature, humidity, air pressure and wind structure at the coast(Woodman Point) and at the inland(ALCOA residue dump) site at intervals of roughly two hours. These were supplemented by mid afternoon soundings(radiosonde and single theodolite) by Department of Environmental Protection(DEP) at Swanbourne. The Flinders aircraft measured wind, turbulence and temperature structure of the atmospheric boundary layer, concentrations of $C0_2,\;0_3,\;S0_2\;and\;NO_x$ in the smoke plumes and surface radiation over both land and sea. CSIRO DCET(Division of Coal and Energy Technology) vehicle successfully interceptde many smoke plumes and using a range of tracers will be able to identify the various sources much of the time. Routine data from the DEP and Kwinana Industrial Council(KIC) air quality monitoring networks were also automatically logged. Murdoch University measured surface heat flux at Hope Valldy monitoring station and also at Wattleup monitoring station for the last five days. The heart of the LIDAR system is a Neodymium-doped Yttrium-aluminumgarnet(Nd:Y AG) laser operating at a fundamental wavelength of 1064 nm, with harmonics fo 532 nm and 355 nm. A small fraction of the laser beam is scattered back to the LIDAR, collected by a telescope and detedted by a photomultiplier tube. The intensity of the signal as a function of time is a measure of the particle concentration as a function of distance along the line of the laser shot. The results of nine days special field observations are summarized in detail.etail.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.18 no.6
• /
• pp.30-40
• /
• 2014

The demand of underground structure such as box culvert for electric power transmission is increasing more and more, and the service life extension of these structures is very important. Recent observations in field and experimental evidences show that even steel in concrete can be corroded by carbonation reaction of cover concrete. Carbonation-induced corrosion in concrete may often occur in a high carbon dioxide environment. In this study, the risk of carbonation of box culverts in our nation was evaluated by measuring the carbonation rate and concrete cover depth in field. Then, the service life due to carbonation at the cover depth was calculated by in situ information and the Monte Carlo simulation in a probabilistic way. Additionally, the accelerated carbonation test for the cracked beam specimen was executed and the crack effect owing to the carbonation process on the service life of box culvert was numerically investigated via Monte Carlo simulation based on the experimental results.

• Journal of Korean Dental Science
• /
• v.3 no.2
• /
• pp.4-11
• /
• 2010

Purpose: This study aimed at examining the thickness of lateral cortical bone in the mandibular posterior body and the location of the inferior alveolar nerve canal as well as investigating the clinically viable bone grafting site(s) and proper thickness of the bone grafts. Subjects and Methods: The study enrolled a total of 49 patients who visited the Department of Oral and Maxillofacial Surgery at Kyung Hee University Dental Hospital to have their lower third molar extracted and received cone beam computed tomography (CBCT) examinations. Their CBCT data were used for the study. The thickness of lateral cortical bone and the location of inferior alveolar nerve canal were each measured from the buccal midpoint of the patients' lower first molar to the mandibular ramus area in the occlusal plane of the molar area. Results: Except in the external oblique ridge and alveolar ridge, all measured areas exhibited the greatest cortical bone thickness near the lower second molar area and the smallest cortical bone thickness in the retromolar area. The inferior alveolar nerve canal was found to be located in the innermost site near the lower second molar area compared to other areas. In addition, the greatest thickness of the trabecular bone was found between the inferior alveolar nerve canal and the lateral cortical bone. Conclusions: In actual clinical settings involving bone harvesting in the posterior mandibular body, clinicians are advised to avoid locating the osteotomy line in the retromolar area to help protect the inferior alveolar nerve canal from damage. Harvesting the bone near the lower second molar area is judged to be the proper way of securing cortical bone with the greatest thickness.