• 제목/요약/키워드: Lift-off

검색결과 420건 처리시간 0.028초

Pt를 mask로 이용한 n-type 다공질 실리콘 형성과 응용 (n-type porous silicon formation using Pt mask & its application)

  • 강철구;민남기;이성재
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1760-1762
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    • 2000
  • 본 논문은 기존의 $Si_{3}N_4$, SiN 물질 대신 Pt를 사용해 HF 용액속에서 다공질 실리콘과 전극을 동시에 형성하는 기술을 개발하였다. Pt를 실리콘 웨이퍼 위에 직접 증착한 후 습식 에칭과 Lift-off 공정을 사용하여 Pt를 패터닝하였다. 습식 에칭은 에칭용액의 온도를 일정하게 유지하는 것이 중요하며, 증착한 Pt 박막이 BOE 에칭에 견디고, Lift-off 공정이 가능하기 위해서는 기판온도를 l100$^{\circ}C$ 이하로 해야한다. Pt를 사용하면 기존의 mask에서 발생하는 가장자리 부분에서의 전류 집중이 방지되기 때문에 다공질 실리콘이 일정한 깊이로 형성되고, Al대신 오믹 전극으로 사용할 수 있다. 현재 Pt를 mask와 전극으로 이용한 P-I-N UV detector, 광 바이오센서, 습도센서 제작등에 응용 연구가 진행되고 있다.

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고분자물질과 접촉한 자기조립단분자막 전극 물질의 기계화학 현상 분광학적 연구 (Mechanochemistry on Self-Assembled Monolayer(SAM) /Electrodes after Contacting with Polymeric Stamp)

  • 윤창석
    • 한국표면공학회지
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    • 제53권5호
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    • pp.265-270
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    • 2020
  • We investigated mechanochemical radical, which is concomitant with chemical lift-off lithography(CLL), on the self-assembled monolayer(SAM)/electrodes and a polydimethylsiloxane(PDMS) using a colorimetric and a spectroscopic method. The 11-mercaptoundecanol(MUO)/Au or the 11-hydroxyundecylphosphonic acid (HUPA)/ITO were contacted with bare or activated PDMS. After contact, the each of SAM/substrates and the PDMS were immersed in a 2,2 Diphenyl-1-picrylhydrazyl(DPPH) radical scavenger. The color of the DPPH exposed to the PDMS was changed from purple to yellow and the absorbance decreased definitely at 515 nm wavelength. The SAM/substrates, however, have caused small changes in spectroscopic property, indicating no existence of radical species. We concluded that mechanochemical radicals were formed by homolytic cleavage of PDMS molecules upon external force and hardly transferred on the SAM/substrates.

투과형 펄스와전류 탐상의 수치해석 (Numerical Analysis of Through Transmission Pulsed Eddy Current Testing)

  • 신영길;최동명;이창준
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.2034-2035
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    • 2007
  • 투과형 펄스와전류(Pulsed Eddy Current; PEC) 탐상을 대상으로 수치해석 방법을 사용하여 펄스와전류 탐상신호를 예측하고, 펄스의 폭이 신호에 미치는 영향을 조사하였다. 그 결과 전도도나 두께가 증가하면 PEC 신호의 최대값이 작아지며 최대값 발생시간이 지연됨을 관찰할 수 있었고, 전도도나 두께를 측정할 때 펄스의 폭이 좁으면 신호의 최대치를 사용하는 것이 유리하고, 펄스의 폭이 넓으면 최대치가 나타나는 시간을 사용하는 것이 판별에 유리하다는 것을 알 수 있었다. 또한, lift-off가 커질수록 PEC 신호의 최대값은 작아지지만, 두 코일 사이의 간격만 일정하면 피검사체가 어디에 위치해도 신호는 거의 동일하며, 같은 두께에서 서로 다른 lift-off 변화는 PEC 신호를 한 점에서 만나게 하는 것을 알 수 있었다.

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Electroactive Paper(EAPap)를 이용한 표면탄성파 센서 (Surface Acoustic Wave Sensor Using Electroactive Paper(EAPap))

  • 이민희;김주형;김재환
    • 한국소음진동공학회논문집
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    • 제18권11호
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    • pp.1128-1133
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    • 2008
  • Cellulose based electroactive paper(EAPap) has been developed as a new smart material due to its advantages of piezoelectricity, large displacement, low power consumption, low cost and flexibility. EAPap can be used for a surface acoustic wave (SAW) device using the piezoelectric property of EAPap, resulting in the cost effective and flexible SAW device. In this paper, inter digit transducer(IDT) structure using lift-off technique with a finger gap of 10mm was used for micro fabrication of the cellulose EAPap SAW devices. The performance of IDT patterned SAW device was characterized by a Network Analyzer. The feasibility of cellulose EAPap as a potential acoustic device was presented and explained.

Response of a completely free beam on a tensionless Pasternak foundation subjected to dynamic load

  • Celep, Z.;Guler, K.;Demir, F.
    • Structural Engineering and Mechanics
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    • 제37권1호
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    • pp.61-77
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    • 2011
  • Static and dynamic responses of a completely free elastic beam resting on a two-parameter tensionless Pasternak foundation are investigated by assuming that the beam is symmetrically subjected to a uniformly distributed load and concentrated load at its middle. Governing equations of the problem are obtained and solved by paying attention on the boundary conditions of the problem including the concentrated edge foundation reaction in the case of complete contact and lift-off condition of the beam ina two-parameter foundation. The nonlinear governing equation of the problem is evaluated numerically by adopting an iterative procedure. Numerical results are presented in figures to demonstrate the non-linear behavior of the beam-foundation system for various values of the parameters of the problem comparatively by considering the static and dynamic loading cases.

Micro-patterning of ZnO nanowire arrays

  • ;최지혁;명재민
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2008년도 추계학술발표대회 및 제15회 신소재 심포지엄
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    • pp.24.2-24.2
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    • 2008
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Effects of Lift Resistance on Dynamic Load Acting on a Circular Wheel

  • Kishimoto, Tadashi;Taniguchi, Tetsuji;Sakai, Jun;Choe, Jung-Seob;Ohtomo, Koh-Ichi
    • 한국농업기계학회:학술대회논문집
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    • 한국농업기계학회 1993년도 Proceedings of International Conference for Agricultural Machinery and Process Engineering
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    • pp.1166-1175
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    • 1993
  • The objective of this study is to measure contra-retractive adhesion and lift resistance acting on the rim section of a circular wheel for analyses of their effects on the dynamic load. A circular iron wheel was used for experiments. A part of the wheel rim was cut off, and transducers which can measure normal and tangential forces were installed in this section. Experiments were conducted on a laboratory soil bin which was filled with clayey soil under wet and dry conditions. The mechanism of generating contra -retractive adhesion on a circular wheel were analyzed by the experiments and motion analyses of the wheel. Effects of lift resistance on dynamic load were analyzed by measured forces under wet soil conditions in comparison in comparison with those under dry conditions. The showed that a part of the lift resistance were transferred to the dynamic load. These results may become basic data and ideas for analyses of tractor dynamic under wet soil conditions.

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틸트각 변화에 따른 틸트로터 항공기 주위의 유동해석 (Flow Analysis around Tilt-rotor Aircraft at Various Tilt Angles)

  • 김수연;최종욱
    • 한국가시화정보학회지
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    • 제9권2호
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    • pp.40-47
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    • 2011
  • Tilt-rotor aircraft can be used in various fields because they have the capabilities of the vertical take-off and landing and the high-speed cruise flight. In the present study, the flow analysis of a tilt-rotor aircraft is conducted at various tilt angles. The lift and drag forces of the tilt-rotor aircraft are obtained and the wakes by the rotor-blade are visualized. The result shows that the rotor-blade affects the lift force in a hovering mode and the main wing has an influence on the lift force in a cruise mode. Additional thrust is required at the tilt angle of around 40 degree due to the least lift force. The drag force is dependent on the rotor-blade at overall tilt angles. The minus drag force appears between the tilt angles of 90 degree and 55 degree. Also, the drag force is dramatically increased at the other tilt angles. The wake by rotor-blade affects the flow around the fuselage of the tilt-rotor aircraft at the tilt angles of 75 degree and 60 degree.

모터링 시동 및 시동정지 사이클에서 경사진 축을 갖는 저어널베어링의 마모 해석 - Part II: 경사진 축을 지지하는 두 저어널베어링의 마모해석 (Wear Analysis of Journal Bearings Operating in a Shaft During Motoring Start-up and Coast-down Cycles - Part II: Wear Analysis of two Journal Bearings Supporting a Misaligned Shaft)

  • 전상명
    • Tribology and Lubricants
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    • 제33권4호
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    • pp.168-186
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    • 2017
  • This paper presents a wear analysis procedure for calculating the wear of journal bearings during the start-up and coast-down cycles of a motoring stripped-down single cylinder engine operating with a tilted shaft. In order to decide whether the lubrication state of a journal bearing is in the mixed-elasto-hydrodynamic lubrication regime, we utilize lift-off speed and MOFT (most oil film thickness) under mixed-elasto-hydrodynamic lubrication regime at the corresponding aligned shaft. We formulate an equation for the modified film thickness in a misaligned journal bearing considering the additional wear volume described in Part I of this study. For this, we use the calculation results of the degree of misalignment and tilting angle obtained after finding the eccentricities of the two bearings supporting the crankshaft of a single cylinder engine. In this Part II, we calculate the wear of journal bearings using the fractional film defect coefficient, the asperity load sharing factor, and the modified specific wear rate for the application of mixed-elasto-hydrodynamic lubrication regime. We show that the accumulated wear volume after turning the ignition switch on and off once, increases to ${\sigma}=39{\mu}m$ and then decreases from ${\sigma}=39{\mu}m$ with increasing in surface roughness.

이중범프 공기포일베어링의 성능시험 (Performance Test of Double-Bumped Air Foil Bearings)

  • 김영철;이동현;김경웅
    • Tribology and Lubricants
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    • 제25권2호
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    • pp.108-113
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    • 2009
  • This paper presents a experimental results for the performance evaluation of a double-bumped air foil bearing. The test results of a double-bumped AFB is compared with a single-bumped AFB at a heavily-loaded condition. The diameter of the test bearing is 50 mm, and the axial length is 50 mm. Nominal clearance of the single-bumped AFB is evaluated as $105{\mu}m$, and that of the double-bumped AFB is as $95{\mu}m$. The test of the AFBs are demonstrated at 3 test mode; the load variation mode, the speed variation mode, and start-stop mode. The single-bumped AFB demonstrated a upward load-carrying capacity of 95 N and a downward load-carrying capacity of 130 N at 20,000 rpm. The double-bumped AFB demonstrated a upward load-carrying capacity of 170 N and a downward load-carrying capacity of 170 N at 20,000 rpm. The single-bumped AFB demonstrated a downward lift-off speed of 16,300 rpm at 105 N. The double-bumped AFB demonstrated a downward lift-off speed of 15,400 rpm at 105 N. The start-stop test of the AFBs assure 5,000 cycle endurance life. The test results are compared with the theoretical calculation results. The test and theorectical results show thata double-bump air foil bearing provides a higher load-carrying capacity, stiffness and damping than a single-bump air foil bearing in a heavily-loaded condition.