• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.301-306
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• 2004

In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.

• 한국정밀공학회지
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• 제12권12호
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• pp.109-119
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• 1995

A driveline incorporating universal joints when driving through an angle can excite various components in a vehicle with second order excitation of torsional and bending vibrations, being transmitted either audibly(noise), or physically(vibration). For a certain range of vehicle dpeed noises can be radiated from the cab wall, in which resonances occur by the excitations transmitted from the driveline as a vibration source. In this paper, the excitation mechanism of cab noises is studied especially for the vehicle speed range of 65 .approx. 75 km/h through the simulation for torsional vibrations of the driveline and for bending vibrations of the cab of an 11 Ton grade Cargo Truck, and verified additionally by vibration and noise measurements. As a result, it is found that the uncomfortable noises in the cab are caused mainly by the abrupt increase of the joint angle of driveline near the axle differential resulted from the excessive clearance alignment of the leaf spring gate.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• 한국정밀공학회지
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• 제22권12호
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.750-755
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• 2005

This paper proposes a small VCM (Voice coil motor) type actuator using curved suspensions for auto-focusing and zoom motions for mobile information devices. 1'he proposed focusing actuator adopts a nontraditional type of suspension using curved beams in order to extend output displacement within small height restriction. The curved beam is similar to the leaf spring type which is usually used in optical disk drives. In addition, three different materials are considered for the curved suspension model, and Aluminum shows the best dynamic characteristics. The proposed zoom actuator does not use a suspension supporting bobbin but a moving rail and a sloper mechanism by generating rotational force at lens holder. The sensitivity of design parameters on output performance is studied using ANSYS (3D FEM tool). Experiments using a prototype of the proposed actuator model verified the analytical prediction and performance.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.171-176
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• 2021

Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

• 한국소음진동공학회논문집
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• 제18권1호
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• pp.11-19
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• 2008

This paper proposes small VCM(voice coil motor) type, auto-focusing and zoom actuators for mobile information devices. In order to meet the large output displacement within small height restriction, the proposed auto-focusing actuator adopts curved suspensions, which are similar to a leaf-spring type suspension of optical disk drives. The sensitivity of design parameters on output displacement and dynamic performance is implemented using ANSYS (3D FEM tool) to determine the optimal geometry and stiffness of the curved suspensions. This paper also investigates a new zoom actuator without a suspension supporting a bobbin. The zoom actuator uses a moving rail and a stoper mechanism by generating rotational force at lens holder. Magnetic flux density of the zoom actuator are calculated by both the FEM and permeance method. Experiments using prototypes of the proposed focusing and zoom models show that both actuators meet the required displacement and performance.

• 한국작물학회지
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• 제31권3호
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• pp.375-382
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• 1986

파성정도가 다른 과맥품종에 있어서 유수의 분화 및 발육과정중 peroxidase 의 isoayme pattern 과 활성의 변화를 조사, 비교하여 파성생리기구의 해명을 위한 기초자료로 삼고자 본 연구를 수행하였다. 1. 유수에서의 isoayme은 정상출수품종 (정상형)의 경우, 포분화기와 이중륭기분화기에는 7개, 소수분화기에는 5개 그리고 영화분화기에는 2개만이 나타났는데 좌지형의 경우에는 포분화기에 나타난 7개의 isoayme이 모두 최종재료심취시기인 5월 24 일 까지 뚜렷하였다. 2. 한편, 엽신에서의 isozyme 은 정상형의 경우, 포분화기와 이중륭기분화기에 2개가 관찰되었으나 소수분화기와 영화분화기에는 1개로 감소되었는데 반하여 좌지형의 경우에는 전조기간에 걸쳐 2개로 나타났다. 3. 정상형과 좌지형간에 큰 차이를 보인 것은 유수에서 c와 g Isozyme, 엽신에서 i isozyme 이었는데 정상형에서의 c와 i isozyme 은 소수분화기에 g isozyme은 영화분화기에 각각 소멸되었으나 좌지형에서는 이들 isoayme 이 모두 농염된 채로 남아 있었다. 특히 이들 isozyme 은 생식생장기로의 이행 직전인 포분화기부터 좌지형이 정상형보다 농염으로 나타났다. 4. Peroxidase 의 활성은 정상형의 경우 유수와 엽신에서 포분화기 이후 완만하기는 하나 점차 감소한데 반하여 좌지형에서는 모두 증가하였는데 그 증가정도는 유수에서 현저하였으며 또한 유수에서의 활성정도가 포분화기에서 조차 좌지형의 것이 정상형의 것보다 높았다. 5. 정상형과 좌지형의 포분화기에 나타난 isozyme pattern과 활성정도의 현저한 차이는 추파성도와 관련된 품종의 생리적 표현인 것으로 생각된다.*)와 부의 유의상관을 보이며, 토양통기능과 투수속도는 근양과 유의정상관을 보였고, 근량은 수량( r=-.7378*)과 유의적인 상관관계가 있었다. 8. 처리별 증발산양간에는 유의적인 차리가 없었으나, 투명비닐멀칭구가 다른 처리구에 비하여 높은 경향이었다.circ}C$에서 22.5%, 1$0^{\circ}C$에서 2%가 각각 저하되어서 인삼의 광합성작용에는 광조건보다 고온조건이 아주 큰 영향을 미치는 것으로 보였다.e lower the gel temperature was in the epoxy system. In this study it is concluded that the curing of the silica filled epoxy system was found to be accelerated, as silica was added to the epoxy compound.ed by adults who are middle-aged or elderly. If altered colors are applied to the digital products as much as popular culture changes, it can assist the elderly with their weakened physical abilities.동위효소 사이의 특성을 나타냈고, 골격근과 눈 조직에서 피루브산에 대한 LDH의 친화력이 상당히 크므로 LDH가 혐기적 조건에서 효율적으로 기능을 하는 것으로 사료된다.5) and "Cleanliness of clothes ＆ features" (p ＜0.05) of VIP ward were significantly higher than those of