• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.301-306
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• 2004

In this study, Dual servo mechanism with VCM(Voice Coil Motor) and PZT is designed for a high precision force and position control. We designed the VCM actuator and dual servo mechanism with leaf spring. VCM actuators, with their high linearity, simple structure, low weight, and high efficiency, are increasingly being used in micro-positioning applications. There are many kinds of VCM with a structure. VCM actuators are divided into two types by moving parts. One is moving magnet type and the other moving coil type. We described the properties of these two types of VCM. Design parameters of VCM are defined through the FEM simulation analysis of magnetic field and dynamic model of dual servo mechanism. These researches help to for decreasing loss in the air gap of VCM. We present dual servo mechanism is effective mechanism for a force control in hi h precision, properties of designed VCM.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.12
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• pp.109-119
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• 1995

A driveline incorporating universal joints when driving through an angle can excite various components in a vehicle with second order excitation of torsional and bending vibrations, being transmitted either audibly(noise), or physically(vibration). For a certain range of vehicle dpeed noises can be radiated from the cab wall, in which resonances occur by the excitations transmitted from the driveline as a vibration source. In this paper, the excitation mechanism of cab noises is studied especially for the vehicle speed range of 65 .approx. 75 km/h through the simulation for torsional vibrations of the driveline and for bending vibrations of the cab of an 11 Ton grade Cargo Truck, and verified additionally by vibration and noise measurements. As a result, it is found that the uncomfortable noises in the cab are caused mainly by the abrupt increase of the joint angle of driveline near the axle differential resulted from the excessive clearance alignment of the leaf spring gate.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.750-755
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• 2005

This paper proposes a small VCM (Voice coil motor) type actuator using curved suspensions for auto-focusing and zoom motions for mobile information devices. 1'he proposed focusing actuator adopts a nontraditional type of suspension using curved beams in order to extend output displacement within small height restriction. The curved beam is similar to the leaf spring type which is usually used in optical disk drives. In addition, three different materials are considered for the curved suspension model, and Aluminum shows the best dynamic characteristics. The proposed zoom actuator does not use a suspension supporting bobbin but a moving rail and a sloper mechanism by generating rotational force at lens holder. The sensitivity of design parameters on output performance is studied using ANSYS (3D FEM tool). Experiments using a prototype of the proposed actuator model verified the analytical prediction and performance.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.171-176
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• 2021

Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.1
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• pp.11-19
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• 2008

This paper proposes small VCM(voice coil motor) type, auto-focusing and zoom actuators for mobile information devices. In order to meet the large output displacement within small height restriction, the proposed auto-focusing actuator adopts curved suspensions, which are similar to a leaf-spring type suspension of optical disk drives. The sensitivity of design parameters on output displacement and dynamic performance is implemented using ANSYS (3D FEM tool) to determine the optimal geometry and stiffness of the curved suspensions. This paper also investigates a new zoom actuator without a suspension supporting a bobbin. The zoom actuator uses a moving rail and a stoper mechanism by generating rotational force at lens holder. Magnetic flux density of the zoom actuator are calculated by both the FEM and permeance method. Experiments using prototypes of the proposed focusing and zoom models show that both actuators meet the required displacement and performance.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.31 no.3
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• pp.375-382
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• 1986

This study was carried out to obtain the basic information for the clarification of spring growth habits mechanism of naked barleys. The isozyme patterns and activities of peroxidase in the young spike and leaf blade were analyzed during the differentiation and development of young spike. The characteristic differences between the normal and rosetted type were in c and g isozymes in young spike, and in i isozyme in the leaf blade. In the normal type, c and i isozymes disappeared at the stage of spi-kelet differentiation, g isozyme at the stage of flolet differentiation. But, in the rosetted type, those three isozymes remained in dark stained condition until the time of final sampling. Especially, those three isozymes were higher in the rosetted type than those in the normal type even at the stage of bract differentiation(BDS), just prior to the reproductive stage. The activities of peroxidase decreased slowly after BDS in the young spike and leaf blade in the normal type, While, in the rosetted type, increased linearly, and the degree of increasing was remarkable in the young spike. It was interesting that the degree of activities in young spike was higher in the rosetted type than that in the normal type even at BDS. From the above results, the remarkable differences of the isozyme patterns and activities at BDS between the normal and rosetted type were considered to be the physiological expression of the varieties concerned with the degree of spring growth habits.