• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2012년도 춘계학술발표대회
• /
• pp.110.1-110.1
• /
• 2012

Recently, advances in ZnO based oxide semiconductor materials have accelerated the development of thin-film transistors (TFTs), which are the building blocks for active matrix flat-panel displays including liquid crystal displays (LCD) and organic light-emitting diodes (OLED). However, the electrical performances of oxide semiconductors are significantly affected by interactions with the ambient atmosphere. Jeong et al. reported that the channel of the IGZO-TFT is very sensitive to water vapor adsorption. Thus, water vapor passivation layers are necessary for long-term current stability in the operation of the oxide-based TFTs. In the present work, $Al_2O_3$ and $TiO_2$ thin films were deposited on poly ether sulfon (PES) and $SnO_x$-based TFTs by electron cyclotron resonance atomic layer deposition (ECR-ALD). And enhancing the WVTR (water vapor transmission rate) characteristics, barrier layer structure was modified to $Al_2O_3/TiO_2$ layered structure. For example, $Al_2O_3$, $TiO_2$ single layer, $Al_2O_3/TiO_2$ double layer and $Al_2O_3/TiO_2/Al_2O_3/TiO_2$ multilayer were studied for enhancement of water vapor barrier properties. After thin film water vapor barrier deposited on PES substrate and $SnO_x$-based TFT, thin film permeation characteristics were three orders of magnitude smaller than that without water vapor barrier layer of PES substrate, stability of $SnO_x$-based TFT devices were significantly improved. Therefore, the results indicate that $Al_2O_3/TiO_2$ water vapor barrier layers are highly proper for use as a passivation layer in $SnO_x$-based TFT devices.

• 대한의용생체공학회:의공학회지
• /
• 제21권3호
• /
• pp.273-277
• /
• 2000

순 티타늄(공업용 순 티타늄, 2급)의 0.5M에서 0.7M 농도의 $H_3PO_4$ 용액에서 $0.3\~l.0 A/dm^2$의 정전류 밀도변화에 따른 anodizing 거동을 관찰하였다. 이때 형성된 산화피막을 SEM과 XRD로 관찰, 분석하였다. 실험결과 0.05M $H_3PO_4$ 용액의 조건에서 전압-시간 (V-T)곡선의 초기에는 직선적인 관계를 보였고, 전류밀도가 증가함에 따라 포물선의 형태를 나타내었다. 그리고 V-T곡선의 형태는 전해질의 농도의 증가에 따라 큰 변화가 없었지만, 최종적인 전압은 감소하였다. 티타늄의 산화피막은 전해질 농도와 전류밀도가 증가할수록 미세한 입자 형태에서 눈꽃과 같고 층을 이룬 입자들로 구성된 구조를 나타내었다. 산화막과 전해질의 계면에서의 방전에 의해 산화피막의 국소적인 침착과 용해를 동반하였다. 산화피막의 결정성은 anodizing 전압이 증가할수록 증가하였고 전해질의 농도가 증가할수록 감소하는 경향을 보였다.

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
• /
• pp.123.1-123.1
• /
• 2010

The solid oxide fuel cell (SOFC) has attracted great deal of attention due to its high electrical efficiency, high waste-heat utilization, fuel flexibility, and application versatility. However, SOFC technology is still not matured enough to fulfill the practical requirements for commercialization. Therefore, all the research and development activities are mainly focused on a development of practically viable SOFCs with higher performance and better reliability. We were successful in fabricating high-performance anode-supported unit cells by employing hierarchically controlled multi-layered electrodes for both structural reliability and high performance. In addition, a novel composite sealing gasket made it possible to achieve excellent sealing integrity even with considerable surface irregularities in a multi-cell planar arrayed stack.

• 전자공학회논문지D
• /
• 제35D권9호
• /
• pp.48-53
• /
• 1998

실리콘 벌크 마이크로머시닝과 표면 마이크로머시닝기술을 혼합하여 새로운 구조의 정전렌즈를 제작하였다. 표면 마이크로머시닝을 위한 구조층과 희생층으로는 폴리실리콘을 사용하였으며 구조층을 열산화막으로 보호하여 실리콘 습식 식각시 손상되지 않도록 하였다. 이전의 마이크로컬럼에 사용되던 정전렌즈에 비하여 이 구조가 갖는 장점은 1) 양극 접합의 수를 줄일 수 있어 구멍간 정렬, 렌즈의 생산성, 신뢰도, 손상 면에서 우수하고, 2) 마이크로컬럼의 집적화를 통한 arrayed lithography에도 유리하다는 것이다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1993년도 추계학술대회 논문집
• /
• pp.97-102
• /
• 1993

According as the high integrity of the semi conductor devices is definited required, the concern on the multi-layered wiring, and three-dimensional devices is growing these days. Therefore, plasma-enhanced chemical vapored deposition(PECVD) enables low-teperature process and is widely used, but it causes the instability of the devices due to a lot of impurities within the film. The PECVD oxynitride was formed by changing the gas ratio of (N$_2$O) to (N$_2$+NH$_3$). It's contained a small portion of hydrogen, had higher refrctive index and capacitance than oxide, and showed the capacitance increasement and the chemical stabi1ity. This is caused by nitrogen distribution increase of the interface lather than within the film.

• The Korean Journal of Ceramics
• /
• 제5권3호
• /
• pp.270-277
• /
• 1999

The ballistic capability of an alumina-rich oxide armor ceramic against a shaped jet was characterized as a function of penetration depth in a layered target structure. The penetration resistance of the ceramic, based upon the determination of penetration velocity, was not equally realized throughout the depth of penetration. It was abnormally low at an early stage of penetration, followed by a sudden increase to reach ~16GPa thereafter. There was no apparent change in such a profile with respect to the lateral size of the specimen. Based upon 2-D flash x-ray radiography and 3-D Hull code simulation, the feasibility of forming a pressure-induced predamnaged zone in front of the jet tip was speculated to foster an increased penetration velocity in the initial stage penetration, resulting in the diminished penetration resistance. The disappearance of such a predamaged zone with penetration was interpreted to restore the resistance of the ceramic in the later penetration stage.

• 한국정보통신학회:학술대회논문집
• /
• 한국해양정보통신학회 2002년도 춘계종합학술대회
• /
• pp.523-526
• /
• 2002

This paper presents the simulation of Au / $Ba_{x}$S $r_{1-x}$ Ti $O_3$(BSTO) / Magnesium oxide (MgO) multi-layered and electrically tunable band-pass filters (BPFs) by using high frequency structure simulator (HFSS). This model is a two-pole microstrip edge coupled filter. The filter was designed fur a center frequency about 5.8 GHz. The tunabillity of the filter is achieved using the nonlinear dc electric-field dependence on the relative dielectric constant of BSTO frroelectric thin film. This work seems very promising for future wireless communication systems....

• Bulletin of the Korean Chemical Society
• /
• 제34권5호
• /
• pp.1388-1390
• /
• 2013

Macroporous $SnO_2$ foam was successfully synthesized via a simple soft-chemical route by hybridization between alkylamine and tin(IV) oxide. According to X-ray diffraction (XRD) analysis, the as-prepared $SnO_2$ foam had a highly ordered lamella structure along the crystallographic c-axis, which transformed to a rutile phase after thermal treatment at $300^{\circ}C$. X-ray absorption spectroscopy (XAS) at the Sn K-edge revealed that $SnO_2$ particles in the hybrid material maintained their nanosized structure after hybridization with alkylamine. Scanning electron microscope (SEM) images clearly showed that the as-prepared $SnO_2$ foam had a macroporous structure. This synthetic route can be extended to the development of open frameworks with good electrochemical properties in battery applications.

• 한국진공학회지
• /
• 제8권3A호
• /
• pp.213-217
• /
• 1999

Fe/MnO multilayers with different bilayer thicknesses were grown by pulsed laser deposition method. Grazing incidence X-ray reflectivity results showed obvious multilayer Bragg peaks implying highly layered samples and, through their analysis, some structural parameters were quantiatively estimated. From the X-ray diffraction peak corresponding to MnO(111), Mn-oxide turned out to be dominantly MnO. To characterize the magnetic properties of $Mn^{+2}$, XMCD were carried out. Magnetic moments of MnO near interfaces were ordered in the opposite direction to those of Fe.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2012년도 춘계학술발표회 논문집
• /
• pp.207-208
• /
• 2012

GZO( Ga-doped ZnO) 및 ZTO (zinc tin Oxide) 박막을 DC, RF magnetron sputtering 공정을 이용하여 증착한 후, 대기 및 진공상태에서 200, $300^{\circ}C$ 조건으로 30분 동안 열처리하였다. ZTO/GZO 박막의 전기적 특성은 ZTO 층과 GZO 층의 두께 비에 의존함을 확인 할 수 있었다. 본 연구에서는 GZO단일 박막과 ZTO/GZO double layer 박막의 열처리 온도에 따른 구조적, 전기적, 광학적 특성을 비교검토 하였다.