• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.6
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• pp.390-402
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• 2006

The elastic properties and thickness of mullite environmental barrier coatings grown through chemical vapor deposition (CVD) on silicon carbide substrates were measured using frequency domain photoacoustic microscopy. In this technique, extremely narrow bandwidth surface acoustic waves are generated with an amplitude modulated laser source. A photorefractive crystal based interferometer is used to detect the resulting surface displacement. The complex displacement field is mapped as a function of source-to-receiver distance in order to extract the wavelength of the surface acoustic wave at a given excitation frequency, and the phase velocity is determined. The coatings tested exhibited spatial variations in thickness and mechanical properties. The measured surface wave dispersion curves were used to extract an effective value for the elastic modulus and the coating thickness. Nanoindentation was used to validate the measurements of the effective elastic modulus. The average elastic modulus measured through the coating thickness using nanoindentation is compared to the effective modulus found using the photoacoustic system. Optical microscopy is used to validate the thickness measurements. The results indicate that the photoacoustic microscopy technique can be used to estimate the effective elastic properties in coatings exhibiting spatial inhomogeneities, potentially providing valuable feedback for the optimization of the CVD growth process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.556-560
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• 2005

The measurement method by Laser Speckle Interferometry which uses the interference law which will grow precedes and with it explains a resolution measurement ability and together the change of place arrowhead and general measurement, at real-time measurement sensitivity it has application boat song from candle precise measurement field it is increasing. But, currently the domestic application technique to sleeps and optical science military merit by optical science interferometer and directness it composes purchases to the level which it applies the expensive commercial business equipment the outside and in spite of the technical ripple effect is deficient even in many strong point. The hazard which complements like this problem point form technical development it leads from the research which it sees and an application degree and to sleep as the measurement equipment which tries to develop the small-sized optical science interference sensor and an interpretation program it raises it does.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.50-57
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• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.64-71
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• 2005

In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.6
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• pp.55-63
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• 1999

The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology. Because the measurement has been done to unload condition without considering of mechanical stiffness in the case of machining center as we measure the quasi-static error of machine tools on general study people who works on the spot has many problems on the data value. Also there are no satisfiable results until now in spite of many studys about this because the deflections of the table and the shaft supporting a workpiece influence, influence the accuracy of the table and shaft supporting a workpiece influence the accuracy of the workpiece. And there is doubt about the inspection method of measured error. In this paper Therefor we will help working more accurately on the spot by measuring analyzing displaying the defoec-tion of the table and support shaft when we load on the table and the support shaft of machining center using laser interfer-ometer. Also we try to settle new conception of the measurement method and more accurate grasp of the deflection tenden-cy by verifing the tendency of the error measured through the comparison of the simulated error measured through the comparison of the simulated error using ANSYS a common finite element analysis program which is able to measure heat deformation material deformation and error resulted from this study.

• Journal of the Optical Society of Korea
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• v.2 no.2
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• pp.74-79
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• 1998

The use of a fiber Fabry-Perot interferometer (FFPI) as an optical current transducer is demonstrated. A conventional inductive pickup coil converts the time-varying current I(t) being measured to a voltage waveform V(t) applied across a piezeolectric strip to which the FFPI is bonded. The strip experiences a longitudinal expansion and contraction, resulting in an optical phase shift ${\phi}(t)$ in the fiber proportional to V(t). This phase shift is measured using a frequency-modulated semiconductor light source, photodiodes to monitor the reflected light from the FFPI and the laser power, and a digital signal processor. Calibration routines compute V(t) and I(t) from the measured phase shift at a l KHz rate. Response to 60 Hz ac over the design range 0-1300A rms is characterized Transient response of the FFPI transducer is also measured.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.1
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• pp.82-88
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• 1998

It is very important to test linear cycle positioning accuracy of NC lathes as it affect all other machines machined by them in industries. For example, if the linear positioning accuracy of x or z-axis directions is bad, the size of works will be wrong and the change-ability will be bad in the assembly of machine parts. In this paper , measuring systems are organized to measure linear displacement of ATC(Automatic tool changer) of NC lathe using laser interferometer, magnescale and tick pulses coming out from computer in order to get data at constant time intervals from the sensors, And each set of data gotten from test is expressed to a plots by computer treatment and the results of linear positioning error motion is estimated to numerics by statistical treatments.

• Transactions of the Korean Society of Mechanical Engineers
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• v.10 no.3
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• pp.285-291
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• 1986

The plane speaker is inspected by the free vibration theory, the sound pressure, and the holographic interferometry. It is shown that time-average holographic interferometry is useful for the vibration analysis of the plane speaker. The position of supporter dertermined experimentally and theoretically, the value of r/a, is 0.68. Theoretical analysis of the free vibration for the plate agrees pretty well with the experimental results. The plane speaker is distorted vibrationally by the suppoter, but the distortion is not seen in the newly designed speaker.

• Journal of the KSME
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• v.34 no.3
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• pp.185-192
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• 1994

공작기계 및 측정기계 등은 여러 가지 요인에 의해서 오차를 갖게 되지만, 이들이 갖는 계통오 차는 정밀한 측정과 보정알고리즘에 의해 보정이 가능하다. 보정을 위한 측정방법은 여러 가지가 있지만 측정정밀도가 높은 헤트로다인레이저간섭계가 가장 많이 사용되고 잇다. 따라서 이글에 서는 헤트로다인레이저간섭계의 측정원리와 측정방법과 그 응용예를 소개하였다. 헤트로다인레 이저간섭계는 외부광학기를 교체하여 측정 가능한 길이, 각도, 진직도의 측정이 가능하므로 이 들에 대한 원리와 사용방법을 소개하였으며, 실예로 본 연구소에서 사용중인 제품과 개발한 제 품에 적용하여 시스템 오차의 측정방법과 보정방법을 통해 시스템의 정밀도가 향상됨을 보여 주었다. 헤트로다인레이저간섭계를 이용하여 측정시에도 측정기 자체가 갖고 있는 오차요인 즉, 빛의 속도가 일정하지 않고 공기의 습도, 온도 및 압력에 의해 결정되는 파장변화에 의한 오차와 피측정물의 온도변화에 의한 오차 등을 고려하여야 한다. 이런 이유로 측정시에는 센서를 사용 하여 현재 환경에 대한 영향을 자동으로 보상하든지 수동으로 온도 및 파장의 값을 기입하여 보정을 실시하여야 한다.

• Transactions of the Korean Society of Mechanical Engineers
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• v.1 no.2
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• pp.73-81
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• 1977

It is well known fact that there is a theoretical analogous relation ship in terms of differential equation between the stress distribution of a bar under pure torsional moment and the deflection of a membrane subjected to a uniform pressure. This relationship has been applied to the experimental determination of torsional stresses with troublesome and elaborative measuring procedure since Griffith's invention of the soap-film apparatus. In this paper, the soap-film was replaced by a highly polished steel plate and whole visualable deflectional contour-line-map was able to obtain by using Michelson Interferometer with Ne-He Gas Laser lignt source enabling to determine the stress distribution in the vicnity of the symmetrical inner-boundary in a section. Experimental results were satisfactory and the margin of error in the measurement was lower than 1%.