• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.147-154
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• 2005

A precision hi-directional actuator for a high precision leveling system with $Z{\Theta}_x{\Theta}_y$ motions is proposed and designed in this paper. The actuator is composed of a force generation structure, a guide mechanism, and a symmetric structure. At first, its driving force is generated by a change of flux in air gaps by permanent and changeable flux. The permanent flux is generated by a permanent magnet. The changeable flux is created by variable current flowing through coil. The combination of permanent and changeable flux makes various flux densities in air gaps between moving part and fixed yokes. And then, the difference between flux densities in lower and upper gaps creates forces fur the $bi-direction({\pm}z)$ motion. The guide mechanism of this actuator is composed of two circular plates and one shaft. Reducing motions generated by forces except z-motion, these circular plates endow the actuator with high stiffness for fast settling time. And the function of the shaft is to transfer motion to an object. At last, total body has a symmetric structure to be stable on thermal error. The actuator is designed by MAXWELL 2D and ProMECHANICA. The designed actuator is evaluated by 8nm laser doppler vibrometer, dynamic signal analyzer, and simple PID controller.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.10
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• pp.83-88
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• 2000

multi-beam optical drive is a method to improve the data transfer rate for the optical disc systems by parallel recording and reading on neighboring multi-tracks. In this paper, the beam rotating actuator, which is necessary for the multi-bean optical disc drive to from beam spots on multi-tracks simultaneously, has been developed. The Voice Coil Motor is used as a drive mechanism for high resolution and small size of the actuator. And rotating guide based on link structure is designed for frictionless and axisless rotation of rotating part including dove prism and for rotating in axis of geometric center of dove prism. The characteristics of the actuator are experimented by laser vibrometer, Polytec OFV1102 and a dynamic analyzer, HP35670A. It shows that the actuator has good linearity, rotating range $\pm0.34^\circ$, minimum rotating angle $0.0066^\circ$and natural frequency 113.9Hz. Therefore the actuator can be applied in a multi-beam optical disc system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.11
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• pp.1885-1895
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• 1997

As track density needs to increase to the order of 10, 000 tpi, the suspension has become a critical component in hard disk drives. One of the main obstacles to attain high track density is the structural resonances of the suspension in lateral direction. We investigate the suspension dynamics through the experimental modal analysis and the finite element method. An LDV (Laser Doppler Vibrometer) is employed to measure the response of the suspension which is excited by a shaker and an inpulse hammer for the free condition and the loaded condition, respectively. After comparing the experimental and numerical results, we study how the initial geometry of the bend region affects the suspension dynamics. It is found that the natural frequency of the sway mode decreases as the bend ratio and the bend angle increase. The shape of torsional mode changes as the mass of a slider increases, resulting in a local decrease in the natural frequency.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.9
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• pp.724-730
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• 2014

It is essential to control noise and vibration in various industrial fields. In the automobile industry, various plastics have been developed and replaced metallic materials in order to reduce mass and vibration effectively. In this study, we measured and analyzed the Young's moduli and the loss factors of Acrylonitrile butadiene styrene(ABS) and Polypropylene(PP). In order to solve the fundamental error to determine the two quantities, a loudspeaker was used instead of conventional electromagnetic devices to generate bending motion to the specimens and a laser vibrometer was also used in detection of vibration signal of the specimen. The measured Young's moduli and loss factors of the ABS specimen were nearly constant as the temperature($-10{\sim}60^{\circ}C$) was increased. The loss factor of PP specimen showed peak value at $20^{\circ}C$ and it means that there is glass transition for the PP specimen. Young's modulus of PP specimen was linearly decreased as the temperature was increased.

• Smart Structures and Systems
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• v.22 no.3
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• pp.277-290
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• 2018

In this paper, wavelet finite element model (WFEM) updating technique is employed to detect sub-element damage in thin plate structures progressively. The procedure of WFEM-based detection method, which can detect sub-element damage gradually, is established. This method involves the optimization of an objective function that combines frequencies and modal assurance criteria (MAC). During the damage detection process, the scales of wavelet elements in the concerned regions are adaptively enhanced or reduced to remain compatible with the gradually identified damage scenarios, while the modal properties from the tests remains the same, i.e., no measurement point replacement or addition are needed. Numerical and experimental examples were conducted to examine the effectiveness of the proposed method. A scanning Doppler laser vibrometer system was employed to measure the plate mode shapes in the experimental study. The results indicate that the proposed method can detect structural damage with satisfactory accuracy by using minimal degrees-of-freedoms (DOFs) in the model and minimal updating parameters in optimization.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.314-317
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• 2009

This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The $1.2{\mu}m$ and $0.4{\mu}m$ thick polycrystalline 3C-SiC cantilever and doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at temperature range of $25{\sim}200^{\circ}C$. The TCF(Temperature Coefficient of Frequency) of 60, 80 and 100 On long cantilever resonators were -9.79, -7.72 and -8.0 ppm/$^{\circ}C$. On the other hand, TCF of 60, 80 and $100{\mu}m$ long doubly clamped beam resonators were -15.74, -12.55 and -8.35 ppm/$^{\circ}C$. Therefore, polycrystalline 3C-SiC resonators are suitable with RF MEMS devices and bio/chemical sensor applications in harsh environments.

• 한국가시화정보학회:학술대회논문집
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• 2002.04a
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.4
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• pp.333-338
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• 2011

This paper describes the design process of floor damping material optimization to reduce structure borne noise. This process uses finite element analysis(FEA) along with experimental techniques to complement each other. The objective of this approach was to develop an optimized damping material application layout and thickness at the initial design stage. The first step is to find the sensitivity areas of vehicle body without damping material applied using FEA. In order to determine the high vibration areas of the floor panel, the velocity was measured using a scanning laser vibrometer from 20 Hz to 300 Hz. To excite the floor panel vibration, shaker was placed at the front suspension attachment point. The second step is the optimization process to determine the light weight solution of damping material. The design guideline of damping material was suggested that the lightweight solution was verified using test result of road noise. Design engineer could efficiently decide the design variable of damping material using parameter analysis results in early design stage.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.8-14
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• 2006

The object transport system is used in many industry field such as the conveyor belt, which transports huge goods in container harbor, the magnetic levitation system, and the indexing system which transports precision components such as semiconductor and optical components. In conventional transport system, the magnetic field may damage semiconductor and the contact force may scratch on the optical lens. So ultrasonic wave transport system has been proposed to replace the previous transport system. In this paper, the good transport condition of optical lens is obtained according to the flexural beam shapes. The working frequency and transport speed are measured and the vibration characteristics of the flexural beams are investigated by Laser Scanning Vibrometer.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1857-1862
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• 2008

Resonant frequency tuning of micro devices is essential to achieve performance uniformity and high sensitivity. Previously reported frequency tuning methods using electrostatic force or mass deposition are not directly applicable to non-conducting polymer devices and have limitations such as dielectric breakdown or low tunable bandwidth. In this paper, thermally frequency-tunable microactuators with poly-dimethylsiloxane membranes are proposed. Permanent and/or nonpermanent frequency tunings are possible using a simple temperature control of the device. Resonant frequency and Q-factor variations of devices according to temperature change were studied using a micro heater and laser Doppler vibrometer. The initial resonant frequencies determined by polymer curing and hardening temperatures are reversibly tuned by thermal cycles. The measured resonant frequency of 9.7 kHz was tuned up by ${\sim}25%$ and Q-factor was increased from 14.5 to 27 as the micro heater voltage increased from 0 to 70 V.