• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1084-1088
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• 1995

In this paper, an electrostatic plate resonator with four corrugated bridges and another with four flat ones have been fabricated and tested by the electrostatic actuation. The resonators consist of one rigid plate and four bridges. Boron diffusion process and anisotropic etch process with EPW are mainly used to fabricate the resonators. The dynamic characteristics of the fabricated resonators are obtained by measuring the velocity of the center of the rigid plate using a laser vibrometer. The results show that the deflection of the resonator with the corrugated bridges is larger than the resonator with the flat ones. It has been confirmed that the corrugated structure releases the residual tensile stress in the bridges resulted from the diffusion process.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.4 s.121
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• pp.363-369
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• 2007

The purpose of the study is to obtain acoustical information to prevent eavesdropping of the glass window. Speech intelligibility was investigated on the vibration sound detected from the glass window of a conference room. Objective test using speech transmission index(STI) was performed to estimate quantitatively the speech intelligibility. STI was determined based on tile modulation transfer function(MTF) of the room-glass window system. Using Maximum Length Sequency(MLS) signal as a sound source, impulse responses of the glass window and MTF were determined by signals from accelerometers and laser doppler vibrometer. Finally, speech intelligibility of the interior sound and window vibration were compared under different sound pressure levels and amplifier gains to confirm the effect of measurement condition on the speech intelligibility.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.366-372
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• 2007

Self-sensing measurement of piezo inkjet and its application are discussed. The pressure wave inside the inkjet dispenser was measured by current measurement due to self-sensing capability of PZT. The pressure wave measured from current was verified by commercially available laser vibrometer. Here, two applications using self-sensing signal were discussed: waveform design for high speed jetting and condition monitoring. For waveform design, two pulse waveform was designed based on self-sensing signal such that the pressure wave after droplet formation can be minimized. For condition monitoring, self-sensing signal was shown to be effective in detecting air bubble trapped in inkjet printhead.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.649-654
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• 2007

Eavesdropping prevention performance is evaluated on a commercial window shaker, which is used to prevent a glass window from eavesdropping. Speech transmission index (STI) is introduced in order to estimate quantitatively the speech intelligibility of the sound detected on the glass window. Objective test by IEC standard using modulation transfer function (MTF) is performed to determine STI. Using Maximum Length Sequency (MLS) signal as a sound source, MTF is measured by accelerometers and laser doppler vibrometer. STI under different level of disturbing wave are compared to confirm the disturbing effect on the speech intelligibility.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.235-238
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• 1998

In this study, the cymbal actuators with brass and bronze endcap at various endcap thickness were fabricated, and then the displacement vs applied voltage relation and position from the center of endcap relation were investigated The displacement values of all cymbal actuator were measured using laser vibrometer. The displacement of the cymbal actuator was increased linearly with increasing applied voltage. The cymbal actuator with 0.15mm thick brass endcap show approximately 1.3$\mu\textrm{m}$ displacement more than cymbal actuator with uniformly thick bronze endcap. The displacement about 3mm in diameter at the center of the endcap was uniform and rapidly decreased away from 3mm in diameter at the center of the endcap.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1017-1019
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• 1998

In this paper, the fabrication of a micropump with two giant magnetostrictive films of Sm-Fe and Tb-Fe is presented. The pump consist of one silicon wafer and one cover glass. The micropump consists of an actuator diaphragm, a paired nozzle and diffuser, and two through holes. The Structure of the micropump is fabricated by the chemical vapor deposition, the etching and the sputtering of the magnetostrictive films. The deflection of the actuator measured diaphragm is measured by using the laser vibrometer and the flow rate of the micro pump is observed by using a video microscope.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.6
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• pp.494-502
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• 1999

This paper represents an electrostatic micro plate resonator which consists of a rigid plate suspended with four bridges and a counter electrode. The bridges of the resonator are designed corrugated so that the residual stress are released. The FEM simulation results confirmed that the deflection characteristic of the corrugated bridge is hardly affected by the initial residual tensile stress. One resonator with the corrugated bridges and the other with the flat bridges were fabricated by the boron diffusion process and the anisotropic etch process. The vertical deflection of the fabricated electrostatic resonator was measured with a laser vibrometer, and the data were compared with the calculation results. The deflection of the resonator with the flat bridges is smaller than the deflection of that with the corrugated ones because of the residual stress. The residual stress release effect was confirmed by the fact that the measured deflection of the resonator with the corrugated bridges in close to the calculated deflection of the resonator with the flat ones with the initial stress neglected.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.620-623
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• 2003

Non-linear behaviors of multilayer piezoelectric ceramic actuator (MCA) were investigated under electrical and mechanical stress. DC 100 V bias was applied to the MCA to obtain displacement. Laser vibrometer, which using Doppler effect, was employed to characterize displacement caused by $d_{33}$ mode of MCA. To understand this non-linear behavior of MCA, displacement was measured and compared under different load states. By increasing load, electric field-induced strain and piezoelectric constant($d_{33}$) of MCA was decreased. We attribute this phenomenon to the domain wall motion and depoling of MCA under heavy load.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.4
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• pp.303-306
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• 2009

This paper describes the characteristics of polycrystalline 3C-SiC doubly clamped beam micro resonators. The polycrystalline 3C-SiC doubly clamped beam resonators with $60{\sim}100{\mu}m$ lengths, $10{\mu}m$ width, and $0.4{\mu}m$ thickness were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonant frequency was measured by a laser vibrometer in vacuum at room temperature. For the $60{\sim}100{\mu}m$ long cantilevers, the fundamental frequency appeared at $373.4{\sim}908.1\;kHz$. The resonant frequencies of doubly clamped beam with lengths were higher than simulated results because of tensile stress. Therefore, polycrystalline 3C-SiC doubly clamped beam micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.250-250
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the 100 ~ $40{\mu}m$ long cantilevers, the fundamental frequency appeared at 147.2 kHz - 856.3 kHz. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5 kHz and 1.14 MHz. Therefore, polycrystalline 3C-SiC micro resonators are suitable for RF MEMS devices and bio/chemical sensor applications.