• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.1080-1083
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• 2002

In this paper, we have studied with regard to the use of lasers for modifying the surface properties of silicon in order to improve it's wettability and adhesion characteristics. Using an Nd:YAG pulse laser, the wettability and adhesion characteristics of silicon surface have been developed by an Nd:YAG pulse laser. It was found that the laser treatment of silicon surfaces modified the surface energy. In the result of wetting experiments, by the sessile drop technique using the distilled water, wetting characteristic of silicon after the laser irradiation shows a decreased value of the contact angle. In case of the laser treated silicon surface, laser direct writing of copper lines has been achieved by pyrolytic decomposition of copper formate films$(Cu(HCOO)_2{\cdot}4H_2Q)$, using a focused $Ar^+$ laser beam$(\lambda=514.5nm)$ on the silicon substrates. The deposited patterns were measured by energy dispersive X-ray(EDX), Scanning Electron Microscopy(SEM) and surface profiler($\alpha$-step) to examine the cross section of deposited copper lines and linewidth.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.319-321
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• 2004

We report on progress in developing high-power excimer lasers as well as UV-optics for creating low-temperature poly silicon (LTPS). A new high-power excimer laser offers 315 Watts with high pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for line beam excimer laser annealing.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1210-1212
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• 1994

An amplitude modulation technique for increasing the laser penetration efficiency for metals has been studied. By chopping electro-optically Nd:YAG laser pulse, the threshold energy for reliable hole drilling was decreased significantly and the penetration depth was increased. It was observed that the effect of chopping was optimal at 8-12 kHz with 60% duty cycle. It is believed that this improvement is due to an increase in the vapor recoil pressure and reduced plasma screening.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.12
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• pp.1359-1365
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• 2011

The changes of ablation characteristics with respect to laser parameters and material parameters during pulsed laser ablation of solids were discussed with experimental results. Although laser wavelength, laser pulse width, and laser pulse energy are the primary factors to be considered, it is shown that other parameters such as laser spot size and material properties also critically influence on the ablation results. It is further demonstrated that the microstructural characteristics of the target can lead to completely different ablation rate and surface morphology.

• Journal of the Korean institute of surface engineering
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• v.49 no.6
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• pp.555-559
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• 2016

A biodegradable nanofiber scaffolds using electrospining provide fibrous guidance cues for controlling cell fate that mimic the native extracellular matrix (ECM). It can create a pattern using conventional electrospining method, but has a difficulty to generate one or more pattern structures. Femtosecond(fs) laser ablation has much interested in patterning on biomaterials in order to distinguish the fundamental or systemic interaction between cell and material surface. The ablated materials with a short pulse duration using femtosecond laser that allows for precise removal of materials without transition of the inherent material properties. In this study, linear grooves and circular craters were fabricated on electrospun nanofiber scaffolds (poly-L-lactide(PLLA)) by femtosecond laser patterning processes. As parametric studies, pulse energy and beam spot size were varied to determine the effects of the laser pulse on groove size. We confirmed controlling pulse energy to $5{\mu}J-20{\mu}J$ and variation of lens maginfication of 2X, 5X, 10X, 20X created grooves of width to approximately $5{\mu}m-50{\mu}m$. Our results demonstrate that femtosecond laser processing is an effective means for flexibly structuring the surface of electrospun PLLA nanofibers.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.50-56
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• 2007

Femtosecond laser ablation of the Invar alloy and hole drilling for a shadow mask are studied. We used a regenerative amplified Ti-sapphire laser with a 1kHz repetition rate, 184fs pulse duration and 785nm wavelength. Femtosecond laser pulse was irradiated on the Invar alloy with air blowing at the condition of various laser peak power. An ablation characteristic of the Invar alloy was appeared non-linear at $125J/cm^2$ of energy fluence. For the application to a shadow mask, the hole drilling of the Invar alloy with the cross section of a trapezoidal shape was investigated. The ablated micro-holes were characterized using an atomic force microscopy(AFM). The optimal condition of hole pattern f3r a shadow mask was $4\;{\mu}m$ z-axis feed rate, 0.2mm/s circular velocity, $26.4{\mu}J$ laser peak power. With the optimal processing condition, the fine circular hole shape without burr and thermal damage was achieved. Using the femtoseocond laser system, it demonstrates excellent tool for the Invar alloy micro-hole drilling without heat effects and poor edge.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.456-460
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• 1999

Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

• Laser Solutions
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• v.3 no.2
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• pp.25-33
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• 2000

One of perspective direction of microfabrication is direct laser writing technology that allows to create metal, semiconductive and dielectric micropatterns on substrate surface. In this work, a two step method, the combination of seed forming process, in which metallic Al seed was selectively generated on AlN ceramic substrate by direct writing technique using a pulsed Nd : YAG laser and subsequent electroless Ni plating on the activated Al seed, was presented. The effects of laser parameters such as pulse energy, scanning speed and pulse frequency on shape of Alseed and conductor line after electroless Ni plating were investigated. The nature of the laser activated surface is analyzed from XPS data. The line width of this metallic Al and Ni is analyzed using SEM. As a results, Al seed line with 24㎛ width and 100㎛ isolated line space is obtained. Finally, laser direct writing can be applied in the field between thin and thick film technique in electronic industry.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.2
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• pp.66-71
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• 2000

Laser induced surface hardening of Tool steel(STC5) can be achieved either with or without surface melting. In trans-formation hardening as the surface is heated to a temperature below its melting point and is rapidly cooled solidified microstructures are usually much finer and stronger than those of the base matals. For this reason surface modification of tool steel by YAG laser irradiation has been studied as a function of processing parameters such as power density pulse width defocusing distance and molten depth. The high energy density changes and refines the microstructure of the near surface layer. In the case of beam passes martensite formed in the melt zone exhibited very high vickers hardness values. Molten depth and width depend on defocusing distance and energy of black color painting is more absorptive than other color painting.

• Korean Journal of Optics and Photonics
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• v.18 no.1
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• pp.66-73
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• 2007

The various output characteristics of a pulsed Ti:sapphire laser oscillator with a plane-parallel resonator, pumped longitudinally by the second harmonic wave of a Nd:YAG laser, and the output of a Ti:sapphire laser amplifier operated along the single path of the oscillator beam were investigated and analyzed. In the case of the oscillator, we measured the spectrum, the pulse buildup time, the temporal duration time of the pulse, and the output energy according to the variation of the pumping energy, resonator length, and the reflectance of the output coupler. And, in the case of the amplifier, we investigated and analyzed the output energy of the amplifier as a function of the time difference between the two pump beams of the oscillator and the amplifier, the pumping energy of the oscillator, and the pumping energy of the amplifier When pump energies of both the oscillator and the amplifier were 18 mJ/pulse, we could find that the output energy of the amplifier increased linearly and gradually up to the time difference of 35 ns. Finally, we determined that the slope efficiencies of the oscillator and the amplifier were 23.5 % and 11.6 %, respectively.