• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1056-1060
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• 1997

An optical technique to align the laser beam with the rotation axis of a cylindrical microstructure is developed for laser microfabrication. The sample surface is first set normal to the rotation axis by applying a simple reflection law of geometrical optics and then the laser beam is aligned with the rotation axis using translation stages with quadrant photodiodes. Principle and the configuration of the alignment technique are described. An application of the present technique to laser microstereolithography showed that it could be effectively used for fabrication of micro cylindrical structures.