• Laser Solutions
• /
• v.9 no.1
• /
• pp.17-23
• /
• 2006

The technologies of laser micromachining are changed toward more complex-micropatterning, from the micro circle-shaped hole drilling to the micro arbitrary-shaped hole drilling. In this paper, the fundamental experiments by using DPSS 3rd harmonic $Nd:YVO_4\;laser({\lambda}=355nm)$ were carried out in order to obtain the feasibility of flexible micropatterning by various fixed masks. Fixed masks and Galvano scanners were investigatde to make micro patterns. from these experimental results, micropatterns on PEN film were rapidly manufactured in large area.

• Proceedings of the Korean Society of Laser Processing Conference
• /
• 2005.11a
• /
• pp.132-136
• /
• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.10a
• /
• pp.199-200
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.612-615
• /
• 2003

Maskless laser patterning process is developed using 3rd harmonic Diode Pumped Solid State Laser with near visible wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and polymer optical property to gain the optimal conditions. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8${\mu}{\textrm}{m}$ width and 5.4${\mu}{\textrm}{m}$ height. This process could be applied to fabricate a single mode waveguide without expensive mask projection method.

• Proceedings of the Korean Society of Laser Processing Conference
• /
• 2006.06a
• /
• pp.123-128
• /
• 2006

We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.

• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.5
• /
• pp.375-380
• /
• 2014

To enhance biocompatibility between the orthopedic implant stem and obsteoblast cells, bone-forming cells, micro-size holes are patterned in Ti plate surface. Initially, the house built laser power stabilization system is applied to the laser micro patterning machine to convince repeatable result. Various pulse widths are irradiated Ti plate and relationship between diameters of patterned holes and pulsed width is derived. Effect of multi pulse is observed and optimal pulse number is considered to avoid heat affected zone. After MG-63 osbeoblast cells are cultured, micro patterned Ti plates are compared with control plates. In SEM image, cells are well aligned and aggregation is observed in both 60, and $100{\mu}m$ patterned plates. Finally, free form surface stem model is prepared to test micro hole patterning.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.177-178
• /
• 2012

• Proceedings of the Korean Society of Laser Processing Conference
• /
• 2005.06a
• /
• pp.121-125
• /
• 2005

• Proceedings of the Korean Society of Laser Processing Conference
• /
• 2000.06a
• /
• pp.47-50
• /
• 2000

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.640-643
• /
• 2003

We present investigations of the surface micromachining for transparent glass substrate, e.g. soda lime glass using tightly focused 800nm Ti:sapphire femtosecond laser. In this study, experiment conditions such as laser intensity, scanning speed, focus position were controlled as variable parameters to decide optimal machining conditions. This study shows clearly that laser intensity and scanning speed are dominant factors for good surface morphology. Using the optimal conditions, grooves with 50${\mu}{\textrm}{m}$ line width were fabricated on glass substrate and their surface morphologies were investigated from SEM image.