• Journal of the Korean Ceramic Society
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• v.36 no.4
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• pp.417-424
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• 1999

Laser lapping of diamond films is performed with focused beam of copper vapor laser. Both spherical and rod-shape laser beam are used. Diamond surface is scanned at various scan speeds(0,125, 0.5, 0.75 mm/sec) and baem shifts (5, 10, 20, 40, 100$\mu\textrm{m}$) At 0.125 mm/sec 10$\mu\textrm{m}$ scan condition the level difference of di-amond surface of about 700$\mu\textrm{m}$ over 20 mm is reduced to 200$\mu\textrm{m}$ In addition surface roughness is also im-proved from 3.53$\mu\textrm{m}$ to 2.47$\mu\textrm{m}$ at 5$\mu\textrm{m}$ beam shift. But at higher beam shift than 10$\mu\textrm{m}$ laser scan makes the surface rougher which is considered to be due to the non uniform spatial distribution of laser en-ergy. It is concluded that homogenized laser beam with high average power is needed for large area laser lapping of diamond films at appreciable rates.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.107-114
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• 2011

In this study, a correlation between the roughness of nanoscale lapping surface and its laser scattering pattern has been identified experimentally. The characteristics of laser scattering on a reflected surface are investigated, and a laser scattering mechanism is newly designed by adopting the dark-field method. Laser scattering patterns resulting from nanoscale lapping shape are in the shape of crossed irregular lattice. In addition, optimum laser scattering images are obtained by the design of experiment, and the roughness of nanoscale lapping surface is estimated using regression analysis certain useful features of the laser scattering patterns. The results of fifty experiments on three types of nanoscale lapping surfaces show that the roughness of nanoscale lapping surfaces can be accurately estimated by the proposed mathematical modeling method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.737-738
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• 2010

• Journal of the Korean Society for Precision Engineering
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• v.19 no.11
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• pp.211-220
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.9
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• pp.36-45
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• 1992

The Modified Multi-Quantum Well(MMQWAl) structures have been grown by Mental-Organic chemical Vapor Deposition(MOCVD) method and stripe type MMQW laser diodes have been investigated. In the case of GaAs/AlGaAs superlattice and quantum well growth by MOCVD, the periodicity, interface abruptess, Al compositional uniformity and layer thickness have been confirmed though the shallow angle lapping technique, double crystal x-ray diffractometry (DCXD) and photoluminescence (PL) measurement. stripe-type MMQW laser diodes have been fabricated using the process technology of photolithography, chemical etching, ohmic contact, back side removing and cleaving. As the result of the electrical and opticalmeasurement of these laser diodes, we have achieved the series resistance of $1[\Omega}~2{\Omega}$ by current-voltage measurements, the threshold current of 200-300mA by currnt-light measurements and the lasing wavelength of 8000-8400$\AA$ by lasing spectrum measurements.

• Tribology and Lubricants
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• v.26 no.6
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• pp.311-316
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• 2010

Surface texturing of micro dimple or pore-shaped pattern was prepared using a fiber laser system. Surface texturing was designed to have a square pattern with a particular pitch distance for each corresponding density of 5, 10, 20, and 30%. Thermal damages such as bulges and burrs formed during laser irradiation were observed around the dimples. Thermal damages were later removed by lapping using alumina particles of $0.3{\mu}m$ in diameter. Oscillating friction tests were performed against heat-treated high speed steels under lubricated condition. The lubricant used was SAE 5W-30 automotive engine oil. Normal contact pressure and oscillating frequency was 0.28 MPa and 20 Hz, respectively. The tests were continued for 20 minutes, and friction plots were recorded for examination. Results revealed that the coefficient of friction was lowered regardless of texturing density. Moreover, the lowest coefficient of friction was obtained for 10% density texturing. It is attributed to increased lubricity due to the introduction of surface texturing. In addition, it is concluded that the optimum texturing density and pattern must be found for the best lubricity and low friction.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.51-57
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• 2001

A light beam reflected from a machined surface generally containes information concerning about its surface roughness. This study examines and proposes a surface roughness measurement technique for on-machine measurement of machined surfaces. The technique is based on the measurement of a reflected laser beam pattern and the statistical analysis of its light intensity distribution. The surface roughness was found to be closely related to the standard deviation of the light intensity on the primary axis of the reflected pattern. An image acquisition device is made up of a laser diode, a half mirror, a screen, and a CCD camera. The exact image with the primary and secondary axes of a reflected laser beam pattern is calculated through such image processing algorithm as thresholding, edge detection, image rotation, segmentation, etc. A median filter and a surrounding light correction algorithm are improve the image quality and reduce the measuring error. Using the developed measuring device the effect of screen materials and workpiece and workpiece materials was investigated. Experimental results regarding to relatively high-quality surfaces machined by grinding, polishing, lapping processes have shown the measurement error is within 10% in the range of $0.1{mu}m~0.8{\mu}m R_q.$Therefore, the proposed method is thought to be effectively used when quick measurements is needed with workpieces fixed on the machine.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.94-97
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• 2003

A precise fabrication technology of glass is increasingly demanded fer the latest Industrial applications of spherical lenses. micro-optical components, laser applications and so on. Most of cases, the surface roughness of glass is required to be minute for improving the optical characteristics. Then. the machining characteristics of SF-5 glass and quarts glass were studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with ELID generator was used to make the mirror surface of glass and a Mitutoyo surface tester and a nano-hardness tester were also used to measure the grinded surface or glass. As the results of experiments. they showed that the surface roughness(Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 nm using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.

• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.39-47
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology. Especially, the Process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the process reliability. The mirror size was $2.5mm{\times}3mm$ and it needed about 35V for displacement of $3.2{\mu}m$.