• Title/Summary/Keyword: Laser cleaning

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Via Cleaning Process for Laser TSV process (Laser TSV 공정에 있어서 Via 세정에 관한 연구)

  • Seo, Won;Park, Jae-Hyun;Lee, Ji-Young;Cho, Min-Kyo;Kim, Gu-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.16 no.1
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    • pp.45-50
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    • 2009
  • By Laser Through-Silicon-Via process, debris and particles occur when you are forming. Therefore the research of TSV cleaning become important to remove those particles and debris. Both chemical cleaning method that uses a surfactant and physical cleaning method that uses a brush were studied with the via of $30{\mu}m$ diameter and $100{\mu}m$ depth on the 8 inch CMOS Image Sensor wafer. On the DI water and a surfactant in mixture ratio of 2:1, debris show $73{\mu}m^2$ per $0.054mm^2$. Cleaning is superior by lower mixture ratio of DI water and surfactant. In addition, It is less than 5% of debris distribution in the laser condition changed by Laser's frequency and its speed and cleaning had no effect. In the physical cleaning, there are no crack and damage when the system condition is set by $1000{\sim}3000rpm$ strip, $50{\sim}3000rpm$ rinsing, and $200{\sim}300rpm$ brushing Therefore, debris and particles can be removed by enforced chemical method and physical method.

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Experimental Study for Removing Artificial Patinas of Bronze Sculpture by Nd:YAG Laser Cleaning System (청동 조형물의 인공 파티나 제거를 위한 Nd:YAG 레이저 적용 실험 연구)

  • Park, Chang-Su;Cho, Nam-Chul
    • Journal of the Korean institute of surface engineering
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    • v.46 no.5
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    • pp.197-207
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    • 2013
  • In the midst of increasing importance of modern cultural assets, especially, most modern bronze objects are exposed to outdoor environment, and as the objects are corroded steadily due to environmental factors the objects lost their original colors on the surface. We performed artificial patinas on the bronze sample per each color of red, black and green and checked cuprite and tenorite which are detected from actual bronze corrosion by analyzing the components. In addition, we applied the existing corrosion removal methods of grinder and sand blaster on a similar sample of bronze mirror per injection pressure and performed comparative analysis on the result with Nd:YAG laser. As a result of Nd:YAG laser cleaning artificial patina from bronze samples, all of the patinas were removed by laser wavelength 1064 nm better than 532 nm. Upon applying to a similar sample of bronze mirror, the artificial patina could be selectively removed from substrates without surface damage when Nd:YAG laser was conducted other than the existing removal method, and so it showed the possibility of application.

Selective Electrodeposition on Titanium Surface Using Laser Beam (레이저빔을 이용한 티타늄 표면에서의 선택적 구리 전해도금)

  • Shin, Hong Shik
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.26 no.1
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    • pp.44-49
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    • 2017
  • Titanium has been used in various fields due to its good corrosion and erosion resistance, and superior mechanical properties. The process for selective electro-deposition on a titanium surface using laser beam is proposed in this paper. The process consists of laser irradiation, electro-deposition, and ultrasonic cleaning. Laser irradiation can change the surface morphology of titanium. Through laser irradiation, the surface cleaning effect and a rough surface can be achieved. The surface roughness of titanium was measured according to the laser beam conditions. The characteristics of selective electro-deposition on titanium surface according to surface roughness are investigated by various analytical methods such as SEM, and EDS.

Experimental Study of Removing Epoxy Resin from Iron Object using Nd:YAG Laser Cleaning System (철제유물에 사용된 에폭시수지 제거를 위한 Nd:YAG 레이저 클리닝 실험 연구)

  • Lee, Hye-Youn;Cho, Nam-Chul;Lee, Jong-Myoung;Yu, Jae-Eun
    • Journal of Conservation Science
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    • v.27 no.3
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    • pp.301-312
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    • 2011
  • Epoxy resin has superior durability and adhesive strength and proper physical strength so that it is used to diversity materials for multi-purposes. However epoxy resin is hardly removed after hardening specially once it is applied to artefacts, it is difficult to remove them under re-conservation. This paper is an experimental study on removing epoxy resin applied to iron objects using Nd:YAG laser cleaning system. Tests conducted in this study investigated how increasing laser energy and pulses would give effect on samples. The samples were prepared in a way that epoxy resin, itself pure and one which was mixed with pigment and they were applied to iron coupons and corroded iron coupons respectively. As a result of experiment, pure epoxy resin applied to corroded iron coupons was ablated at high laser energy but epoxy resin applied to iron coupons and mixing with pigment were not ablated but discolored and bubbled due to laser-induced heat generation. Results of FT-IR showed no component alteration of shifted resins and no residues on the surfaces ablated by laser irradiation. From SEM-EDS for removed surfaces, the debris from epoxy resin and melting iron was observed. Therefore, this study demonstrated the possibilities and limitations for laser cleaning to remove epoxy resin from iron objects.