• Title/Summary/Keyword: Laser ablation

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Measurement and analysis of recoil force during Nd-YAG laser ablation of silicon (Nd-YAG 펄스레이저에 의한 실리콘 가공시 발생하는 증발반동압력 측정 및 분석)

  • 이동준;정성호
    • Laser Solutions
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    • v.6 no.3
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    • pp.11-17
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    • 2003
  • Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400 $\mu\textrm{m}$ thick and 13 mm long silicon cantilever. The vibration amplitude of the cantilever induced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever with a theoretical model, the recoil momentum is estimated. For laser irradiance in the order of 10$\^$11/ W/$\textrm{cm}^2$, the recoil pressure reached a value over 40${\times}$10$\^$9/ Pa.

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Theoretical analysis on the maximum volume ablation rate for copper ablation with a 515nm picosecond laser (515nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최대 가공율에 대한 이론적 분석)

  • Shin, Dongsig;Cho, Yongkwon;Sohn, Hyonkee;Suh, Jeong
    • Laser Solutions
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    • v.16 no.2
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    • pp.1-6
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    • 2013
  • Picosecond lasers are a very effective tool for micromachining metals, especially when high accuracy, high surface roughness and no heat affected zone are required. However, low productivity has been a limit to broadening the spectrum of their industrial applications. Recently it was reported that in the micromachining of copper with a 1064nm picosecond laser, there exist the optimal pulse energy and repetition rate to achieve the maximum volume ablation rate. In this paper, we used a 515nm picosecond laser, which is more efficient for micromachining copper in terms of laser energy absorption, to obtain its optimal pulse energy and repetition rate. Theoretical analysis based on the experimental data on copper ablation showed that using a 515nm picosecond laser instead of a 1064nm picosecond laser is more favorable in that the calculated threshold fluence is 75% lower and optical penetration depth is 50% deeper.

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A Study on the Deposition of Permalloy Nanostructured Thin Film Utilizing Supersonic Deposition of Nanoparticles Formed by Laser Ablation of Microparticles (마이크로입자의 레이저 Ablation으로 형성된 나노입자의 수펴소닉 적층법을 이용한 퍼멀로이 나노구조박막 적층에 관한 연구)

  • Yun, Eui-Jung;Jung, Myunghee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.5
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    • pp.478-483
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    • 2005
  • In this paper, we synthesized 10 to 20 nm diameter NiFe nanoparticles and nanoparticle films utilizing supersonic jet deposition of nanoparticle aerosols generated by laser ablation of $30\;to\;45{\mu}m$ diameter permalloy $(Ni_{81}Fe_{19} \;at\;{\%})$ microparticles. The component and composition of the nanoparticles were characterized by an energy dispersive X-ray spectroscopy. The morphology of the nanoparticles and nanoparticle films was analyzed by a high-resolution transmission electron microscopy and a scanning electron microscopy, respectively. The experimental results showed that the nanoparticles and nanoparticle films have remarkable properties with an excellent preservation of the composition of feedstock permalloy microparticles. The purpose of the present work is to present details on the composition and nanostructural characterizations for NiFe nanoparticles and nanoparticle films prepared by laser ablation of microparticles (LAM).

Micro Sampling System for Highly Radioactive Specimen by Laser Ablation (Laser Ablation에 의한 고방사성시편의 미세영역 시료채취 장치개발)

  • Han Sun Ho;Ha Yeong Keong;Han Ki Chul;Park Yang Soon;Jee Kwang Yong;Kim Won Ho
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.3 no.1
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    • pp.17-21
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    • 2005
  • Shielded laser ablation system composed of laser system, image analyser, XYZ translator with motion controller, ablation chamber, manipulator and various optics was designed. Nd:YAG laser which can be tunable from 1064 nm to 266 m was selected as light source. CCD camera(< $\pm$200) was chosen to analyze a crater less than 50 un in diameter. XYZ translator was composed of three linear stage which can travel 50 w with a minimum movement of 1 um and motion controller. Before the performance test, each part of system was optically aligned. To perform the ablation test, the specimen was ablated by 50 um interval and observed by image analyser The shape of crater was almost round, indicating laser beam has homogeneous energy distribution. The resolution and magnification of image system were compatible with the design.

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The excimer laser ablation of PET for nickel electroforming (니켈 전주도금을 위한 PET의 엑시머 레이저 어블레이션)

  • Shin, Dong-Sik;Lee, Je-Hoon;Seo, Jung;Kim, Do-Hoon
    • Laser Solutions
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    • v.6 no.2
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    • pp.35-41
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    • 2003
  • In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

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A Study on Surface Fabrication of Super Hydrophobic using Pico Second Laser (피코초 레이저를 이용한 초소수성 표면 제작에 관한 연구)

  • Cho, Il-Hwan;Lee, Jae-Hoon;Noh, Ji-Whan;Lee, Seoung-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.2
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    • pp.161-169
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    • 2012
  • Recently, a study for the functional surface production of super hydrophobic of natural and biomimetic artificial has attracted much attention. To make process methods of super hydrophobic surface has a variety of ways such as lithography, etching, and laser ablation. However, we were used ultra-shot pulse laser ablation process which has the virtue of more environmental friendliness and simple process. In this paper, we were fabricated a multiplicity of super hydrophobic patterns on mold surface(NAK80) using by optimizing the laser processing conditions and it was transferred on PDMS. Also, we measured contact angle super hydrophobic patterns on PDMS. The result showed there is no patterns on PDMS were measured 94 degrees, by contrast, optimized super hydrophobic patterns on PDMS was 157 degrees. Therefore we fabricated super hydrophobic surface on mold. Based on these experimental results, it is possible to mass production using ultra shot pulse laser ablation of super hydrophobic pattern and to be applied for a variety of industries.

Analysis of Sapphire Microdrilling by a Nano Second Visible Laser Pulse (나노초 가시광 레이저 펄스를 이용한 사파이어 미세천공 공정의 해석)

  • O, Bu-Guk;Jeong, Yeong-Dae;Kim, Nam-Seong;Kim, Dong-Sik
    • Laser Solutions
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    • v.12 no.1
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    • pp.7-13
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    • 2009
  • Engineering ceramics as sapphire are widely used in industry owing to their superior mechanical and corrosion properties. However, micromachining of sapphire is a considerable challenge due to its transparency. Recently, direct ablation of sapphire has been demonstrated with a visible laser pulse at sufficiently high laser intensity. In this work, the theoretical model for pulsed laser ablation of sapphire is suggested and numerical analysis is carried out using the model. Sapphire ablation begins with plasma generation by the laser interaction with surface defects, impurities and contaminations in the initial stage of machining. Subsequent absorption of the visible laser beam can be explained by three mechanisms: metalization of sapphire surface due to the EUV radiation from the hot plasma, increments of surface roughness and temperature-dependent absorption coefficient. Comparison of the computation results with experimental observation indicates that the proposed model of sapphire is reasonable.

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