• Journal of the Korean Society for Precision Engineering
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• v.27 no.6
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• pp.32-38
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• 2010

Laser material processing technology is adopted in several industry as alternative process which could overcome weakness and problems of present adopted process, especially semiconductor and display industry. In semiconductor industry, laser photo lithography is doing at front-end level, and cutting, drilling, and marking technology for both wafer and EMC mold package is adopted. Laser cleaning and de-flashing are new rising technology. There are 3 kinds of main display industry which use laser technology - TFT LCD, AMOLED, Touch screen. Laser glass cutting, laser marking, laser direct patterning, laser annealing, laser repairing, laser frit sealing are major application in display industry.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.3
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• pp.53-56
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• 2017

Laser cladding is a technique for forming beads by melt-sintering with a laser while directly feeding metal powder onto the base material through nozzles. This technique, which is applied in laser surface treatment technology, is useful for repairing broken or worn parts by allowing selective formation of the surface layer of the base metal material. In this paper, laser cladding process was performed on STS316L powder using high power continuous wave laser with IR wavelength and the cladding characteristics according to process conditions were experimentally analyzed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.10
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• pp.1114-1119
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• 2004

The photodepositioned tungsten film by laser CVD has been carried out the taping test with scotch tape over 10 times. As a result, it exhibited strong adhesion to the under-film such as ITO and SiNx patterned on the LCD substrate. However, it was seriously attacked by alkaline solution used for removing polyimide. And a thickness of laser CVD tungsten film had a close relation to a speed of laser scanning. Also we have improved the success rate of a laser CVD repair with making two pairs of contact hole structure and decreasing laser scanning speed.

• Proceedings of the KWS Conference
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• 2007.11a
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• pp.196-198
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• 2007

Laser cladding technology was studied as a method for upgrading the present repair procedures of damaged tubes in a nuclear steam generator and Doosan subsequently developed and designed a new Laser Cladding Repair System. One of the important features of this newly developed Laser Cladding Repair System is that molten metal can be deposited on damaged tube surfaces using a laser beam and filler wire without the need to install sleeves inside the tube. Laser cladding qualification tests on the steam generator tube material, Alloy 600, were performed according to ASME Section IX.

• Journal of the Korean Society for Heat Treatment
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• v.14 no.3
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• pp.145-150
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• 2001

The effect of laser welding and surface treatment, developed as a method of repairing steam generator tubes, on the pitting corrosion resistance of alloy 690 was examined. The surfaces of some heat-treated Alloy 690 materials were melt-treated using the Nd-YAG laser beam, and then examined to characterize the microstructures. The resistance to pitting corrosion was evaluated by measuring of Ep(pitting potential) through the electrochemical tests and also by measuring the degree of pit generation through the immersion tests. The pit formation characteristics were investigated by observing microstructural changes and pit morphologies. The results show that the resistance to pitting corrosion increases in the order of the following list; solution annealed Alloy 690, thermally treated Alloy 690, and laser surface melt-treated Alloy 690. The melted region was found to have a cellular structure and fine precipitates. It was confirmed that the resistance of Alloy 690 to pit initiation and also to pit propagation was higher when it was laser treated than treated otherwise.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.184-189
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• 2005

An experimental study of the femtosecond laser machining of Si materials was carried out. Direct laser machining of the materials for the feature size of a few micron scale has the advantage of low cost and simple process comparing to the semiconductor process, E-beam lithography, ECM and other machining process. Further, the femtosecond laser is the better tool to machine the micro parts due to its characteristics of minimizing the heat affected zone(HAZ). As a result of line cutting of Si, the optimal condition had the region of the effective energy of 2mJ/mm-2.5mJ/mm with the power of 0.5mW-1.5mW. The polarization effects of the incident beam existed in the machining qualities, therefore the sample motion should be perpendicular to the projection of the electric vector. We also observed the periodic ripple patterns which come out in condition of the pulse overlap with the threshold energy. Finally, we could machined the groove with the linewidth of below $2{\mu}m$ for the application of MEMS device repairing, scribing and arbitrary patterning.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.620-623
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• 2003

The material processing by using ultrashort pulse laser, in recently, is actively applying into the micro machining and nano-machining technology since ultrashort pulse has so faster than the time which the electrons energy absorbing photon energy is transmitted to surrounding lattice-phonon that it has many advantages in point of machining. The micro machining of metallic thin film on the plain glass is widely used in the fields such as mask repairing for semiconductor, fabrication of photonic crystal, MEMS devices and data storage devices. Therefore, it is important to secure the machining technology of the sub-micron size. In this research, we set up the machining system by using ultrashort pulse laser and conduct on the Cr 200nm thin film ablation experiments of spot and line with the variables such as energy, pulse number, speed, and so on. And we observed the characteristics of surrounding heat-affected zone and by-products appeared in critical energy density and higher energy density through SEM, and also examined the machining features between in He gas atmosphere which make pulse change minimized by nonlinear effect and in the air. Finally, the pit size of 0.8${\mu}{\textrm}{m}$ diameter and the line width of 1${\mu}{\textrm}{m}$ could be obtained.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.6
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• pp.24-31
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• 2010

Laser carbonization of a polymer layer can be employed in various applications in the microelectronics industry, e.g repairing brightness pixels of an LCD panel. In this work, the process of thermal degradation of LCD color filter polymer by various laser sources with pulsewidths from CW to fs is studied. LCD pixels are irradiated by the lasers and the threshold irradiance of LCD color filter polymer carbonization is experimentally measured. In the numerical analysis, the transient temperature distribution is calculated and the number density of carbonization in the polymer layer is also estimated. It is shown that all the lasers can carbonize the polymer layers if the output power is adjusted to meet the thermal conditions for polymerization and that pulsed lasers can result in more uniform distribution of temperature and carbonization than the CW laser.

• Journal of the Korea Society for Simulation
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• v.11 no.3
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• pp.49-58
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• 2002

It takes 2 or 3 months to manufacture memory device. Defect has to exist owing to hundreds of processes. If there are too many defects, the memory has to be rejected. But if there are a few defects, it will be more efficient and cost reducing for the company to use it by repairing. Therefore, laser-repair process is needed for such a reason and redundancy analysis is needed to establish correct target of laser-repair process. The equipment development company had provided the redundancy analysis and each development company had developed and provided separately. So, to analyze the similar type of defects, redundancy analysis time can be very different by the manufacture. The purpose of this research is to strengthen the competitive price and to apply correlation concept in business for reducing the redundancy analysis time to repair the defects

• Proceedings of the KWS Conference
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• 1998.10a
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• pp.288-291
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• 1998

Inconel 600 alloy is used as the material of nuclear steam generator tubing because of its mechanical properties, formability, and corrosion properties. According to reports, the life time of nuclear power plants decreases because of the pitting, intergranular attack, primary water stress corrosion cracking(PWSCC), and intergranular stress corrosion cracking(IGSCC), and denting in the steam generator. The SCC test is very important because of SCC appears in various environment such as solutions, materials, and stress. The C-Rig specimen was made of the steam generator welded sleeve repairing by the pulsed Nd:YAG laser. In the corrosion invironment, corrosion solutions are Primary Water, Caustic, and Sulfate solution and corrosion time is 1624-4877hr. The permitted stress is 30-60ksi.In this C-Ring SCC test is the relationship between corrosion depth, crack and corrosion environment is evaluated. SCC was happens in Sulfate and Corrosion solution but doesn't happen in Primary Water. The corrosion time and stress is very affected by the severely environment of Sulfate or Caustic solution. The microstructure observation indicates that SCC causes interganular failure in the grain boundary of vertical direction.