• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1307-1310
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• 1995

During measurement of atomic hydrogen in a silane plasma using two-photon excited laser induced fluoresecence, laser-induced dissociation of the gas was observed. This was investigated untill conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions. Absolute density determinations showed atomic hydrogen densities of around $3{\times}10^{17}m^{-3}$.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.49-53
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• 1990

Laser plasma was generated by a 1 GW iodine photodissociation laser(λ=1.315${\mu}{\textrm}{m}$, E-12.7J) whose output beam was focused on a molybdenum target surface. The experiment was conducted in the vacuum chamber under 10-5Torr and several tens of laser shooting were necessary for sufficient exposure to the PBS resist. A speciman was put directly on the resist and located at a distance of 3cm from the X-ray source. The replicas of a mesh, spider's tread, a red blood cell were obtained by PBS resist and were analyzed by Nomarski and SEM. Two main effects of limitation in resolution, source size and Fresnel diffraction, are mentioned and compared with the experimental result. In this experiment, a resolution better than 1000A could be obtained.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.474-478
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• 1996

Process monitoring in laser welding is essential for automation and quality control of products. Various signals from laser welding, such as plasma, sound, optical signals, etc., are utilized for monitoring the process and detecting abnormal weld conditions. In this study, both W light from plasma formed above the weld pool and IR signal from the melting pool are detected with photodiodes and PC-based A/D board, and analyzed to give a guidance about the weld quality. Experimental results show the possibility of using the signals for predicting and evaluating the weld qualify and adapting into the system for on-line process monitoring.

• Journal of the Optical Society of Korea
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• 제20권3호
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• pp.407-412
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• 2016

We analyzed through numerical simulations the properties of a square beam homogenizer near the target for laser shock peening. The efficiency was calculated near the target by considering the plasma threshold of the metals. We defined the depth of focus of the square beam homogenizer with a given efficiency near the target. Then, we found the relationship between the depth of focus for the laser shock peening and four main parameters of the square beam homogenizer: the plasma threshold of the metal, the number of lenslets in the array-lens, the focal length of the condenser lens and the input beam size.

• Bulletin of the Korean Chemical Society
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• 제31권4호
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• pp.798-802
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• 2010

From time-resolved optical emission spectra, we have investigated the effects of a transverse magnetic field on the expansion of a plasma plume produced by laser ablation of a ZnO:$P_2O_5$ ceramic target in oxygen active atmosphere. The emission spectra of $Zn^{+*}$, $P^{+*}$, and $Zn^*$ neutrals in the presence of magnetic field turn out to be considerably different from those without magnetic field. The characteristics of the deposited films grown on amorphous fused silica substrates by pulsed laser deposition (PLD) are examined by analyzing their photoluminescence (PL), X-ray diffraction (XRD), and UV-visible spectra.

• Bulletin of the Korean Chemical Society
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• 제28권5호
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• pp.767-771
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• 2007

By adopting a time-resolved optical emission spectrometry, we have investigated the effects of transverse magnetic field on C2 and CN molecules produced by laser ablation of a graphite target in nitrogen atmosphere. We found that the spectroscopic temperatures of both species, obtained via simulation of the optical emission spectra, as well as their emission intensities from the electronically excited states increased significantly in the presence of a magnetic field. The cyclotron radii and frequencies for electrons and ions were estimated to explain the increase in the number of collisions in the laser-produced carbon plasma plume under a magnetic field.

• 한국진공학회지
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• 제9권1호
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• pp.76-80
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• 2000

CF & $CF_2$ radicals in a $C_4F_8$ inductively coupled plasma were observed with laser induced fluorescence. 251.9nm UV laser was used for the $CF_2$ excitation and 265.3nm UV emitted light for the detection which has the maximum intensity among many induced fluorescence lights. In the case of CF radical detection, 232.9nm UV laser was used for the excitation and 247.6nm for the detection. $CF_2$ radical density increased toward substrate, while CF radical had its maximum at about 10nm away from the substrate. The atomic fluorine density which was studied by the actinometry increased as the position moves away from the substrate. This phenomena was thought to have a close relation with the polymer growth on the wafer. When the bias voltage increased, $CF_2$ , CF radicals decreased while the atomic fluorine increased tio some extent and then decreased, which was thought to be due to the change in the ionization and dissociation.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2002년도 춘계학술발표대회 논문개요집
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• pp.28-33
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• 2002

• 한국재료학회:학술대회논문집
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• 한국재료학회 2008년도 춘계학술발표대회 및 제14회 신소재 심포지엄
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• pp.30.1-30.1
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• 2008

• Journal of Welding and Joining
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• 제20권1호
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• pp.26-33
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• 2002

This study was undertaken to obtain the fundamental knowledges on the weld deflects and it's realtime monitoring method. The paper describes the results of high speed photography, acoustic emission (AE) detection and plasma light emission (LE) measurements during $CO_2$ laser welding of STS 304 stainless steel and A5083 aluminum alloy in different welding condition. The characteristic frequencies of plasma and keyhole fluctuations at different welding speed and shield gases were measured and compared with the results of Fourier analyses of temporal AE and LE spectra, and they had considerably good agreement with keyhole and plasma fluctuation. Namely, the low frequency peaks of AE and LE shifted to higher frequency range with the welding speed increase, and leer the argon shield gas it was higher than that in helium and nitrogen gases. The low frequencies dominating in fluctuation spectra of LE probably reflect keyhole opening instability. It is possible to monitor the weld bead deflects by analyzing the acoustic and/or plasma light emission signals.