• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.849-850
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.645-646
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.251-252
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.234-236
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• 2006

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.41-46
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• 2004

This paper proposes a robust discrete time Kalman filter (RDKF) for the dynamic compensation of nonlinearity in a homodyne laser interferometer for high-precision displacement measurement and in real-time. The interferometer system is modeled to reduce the calculation of the estimator. A regulator is applied to improve the robustness of the system. An estimator based on dynamic modeling and a zero regulator of the system was designed by the authors of this study. For real measurement, the experimental results show that the proposed interferometer system can be applied to high precision displacement measurement in real-time.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.800-803
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• 2004

The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12$\mu$m to 0.17$\mu$m by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15$\mu$m. English here.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.31 no.12A
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• pp.1177-1181
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• 2006

In this paper, we proposed the new wavelength tunable filter for wide tunability of fiber ring laser. The proposed filter consists of the cascaded connection of Fiber Reflection Mach-Zehnder Interferometer and Sagnac filter or of hybrid filter and fiber Reflection Mach-Zehnder Interferometer. The simulation shows that the continuous tunable range of 50nm can be obtained and that more stable single mode operation of ring laser can be expected due to narrow FWHM. of filter spectrum.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.10a
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• pp.204-209
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• 1998

The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics Stylus instrument method, STM, SEM, Laser interferometer method which are used for measuring the quasi-static error of machine tools. Because the measurement has been done to unload condition without considering of mechanical stiffness in the case of machining center as we measure the quasi-static error of machine tools on general studies, people who works on the spot has many problems on the data value. Therefor we will help working more accurately on the spot by measuring, analyzing, displaying the deflection of the table and support shaft when we load on the table and the support shaft of machining center using laser interferometer. Also we try to settle new conception of the measurement method and more accurate grasp of the deflection tendency by verifing the tendency of the error measured through the comparison of the simulated error using ANSYS, a common finite element analysis program, which is able to measure heat deformation, material deformation, and error resulted form this study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.573-576
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• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.