• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.80-80
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• 1999

플라즈마 디스플레이 패널(PDP)의 공정을 간단히 하기 위하여 포토레지스트, ITO, 격벽재료를 Ar+ laser(λ-514 nm, CW)와 Nd:YAG laser(λ=532, 266nm, pulse)로 직접 패터닝 하였다. 레이저에 의한 포토레지스트의 패턴결과, 아르곤 이온 레이저의 포토레지스트 가공의 반응 메카니즘은 레이저 빔의 열에 의한 시료 표면의 국부적인 온도상승에 의한 용융작용이며, 그 결과 식각 후 형성된 패턴의 단면 모양도 레이저빔의 profile과 같은 가우시안 형태를 나타낸다. Nd:YAG 레이저의 4고조파(532nm)를 이용한 경우 200$\mu\textrm{m}$/sce의 주사속도에서 포토레지스트를 패턴하기 위한 임계에너지(threshold energy fluence) 값은 25J/cm2이며, 약 40J/cm2의 에너지 밀도에서 하부기판의 손상이 발생하기 시작하였다. 글미 1은 Nd:YAG 레이저 4고조파를 이용하여 포토레지스트를 식각한 경우 SEM 표면사진(위)과 단차특정기에 의한 단면형상(아래)이다. ITO 막의 레이저에 의한 직접 패턴 결과, ITO 막은 레이저 펄스에 의한 급속 가열 및 증발에 의한 메커니즘으로 식각이 이루어지며, 레이저 파장에 따른 광흡수 정도의 차이에 의해 2고조파 (532nm)에서 ITO 막의 가공 품질이 4고조파(266nm)에 비해 우수하며 패턴의 폭도 출력에 따라 제어가 용이하였다. 그림 2는 Nd:YAG 레이저 2고조파를 이용하여 ITO를 식각한 경우 SEM표면 사진(위)과 단차측정기에 의한 단면형상(아래)이다. 격벽 재료의 레이저에 의한 직접 패턴 결과, Ar+ 레이저(514nm)는 출력 밀도 32NW/cm2에서 격벽을 유리 기판의 경계면까지 식각하였다. Nd:YAG 레이저(532nm)는 laser fluence가 6.5mJ/cm2에서 격벽을 식각하기 시작하였으며, 19.5J/cm2에서 유리기판의 rudraus(격벽 두께 130$\mu\textrm{m}$)까지 식각하였다.

• Korean Journal of Materials Research
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• v.9 no.1
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• pp.25-29
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• 1999

We have developed a laser molecular beam epitaxy system for the layer-by-layer growth of oxide thin films. Using this system, we could grow and control oxide thin films of LaAlO$_3$in a molecular layer epitaxy mode on the atomically flat SrTiO$_3$ substrate with a LaAlO$_3$single crystal target. Very clear RHEED oscillations were observed during to growth of a LaAlO$_3$ film for a long period under the optimized conditions of substrate temperature at $650^{\circ}C$, oxygen pressure at 1$\times$10\ulcorner torr, and an incident laser fluence of 4.6J/$\textrm{cm}^2$. The height of mono-layer-LaAlO$_3$ film grown during one period of RHEED intensity oscillation was 3.8$\AA$.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.886-888
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• 1998

By irradiating photoresist on Si or glass with $Ar^+$ (${\lambda}$=514 nm, CW) and Nd:YAG (${\lambda}$=266 and 532nm, pulse) laser beam, the photoresist was etched masklessly in air. Using a fourth harmonic Nd:YAG laser beam, the etching threshold of energy fluence was $25\;J/cm^2$ and the damage of substrate was appeared over $40\;J/cm^2$.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.54-61
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• 2005

A simulator for virtual laser machining is developed to help understanding and predicting the effects of machining parameters on the final machined results. Main program is based on the model for polymer ablation with short pulse excimer lasers. Version f of the simulator is built using Visual Fortran to make the user work under visual environment such as Windows on PC, where the important machining parameters can be input via dialog box and the calculated results for machined shape, beam fluence, and temperature distribution can be plotted through the 2-D graphics windows. Version II of the simulator is built using HTML, CGI and JAVA languages, allowing the user to control the input parameters and to see the results plot through the internet.

• Journal of Photoscience
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• v.6 no.3
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• pp.141-144
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• 1999

A Spectroscopic study on a pulme produced by a reactive laser pulse irradiates the graphite target in a nitrogen atmosphere, two emission bands of C2(d3IIg longrightarrowa3 IIu, Swan band) and CN(B2$\Sigma$+ longrightarrowX$^2$$\Sigma$+, Violet band ) were observed. By simulation of the optical emissionspectra, spectroscopic temperature of $C_2$ and CN molecules were obtained. The depended of vibrational and rotational temperatures on the laser fluence and distance from the target as well as the pressure dependence of the emission intensities of $C_2$ and CN was examined to elucidate the expansion dynamics of the plume and formation mechanisms of $C_2$and CN molecules.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.5
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• pp.303-308
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• 1999

Dielectric thin films of PLT(28) ($(Pb_{0.72}La_{0.28})Ti_{0.93}O_3$) have been deposited on $Pt/Ti/SiO_2/Si$ substrates in situ by a laser ablation. We have systematically changed the laser fluence from 0.4 J/$cm^2$ to 3 J/$cm^2$, and deposition temperature from $450^{\circ}C\; to\; 700^{\circ}C$. The surface morphology was changed from planar grain structure to columnar structure as the nucleation energy was increased. The PLT thin film with columnar structure showed good dielectric properties. The deposition temperature influenced on nucleation energy much stronger than the laser energy density did.

• Laser Solutions
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• v.18 no.1
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• pp.12-17
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• 2015

This work performed numerical analysis of electromagnetic field and thermal phenomena occurring in femtosecond laser irradiation of silver nanowires. The local electric field enhancement was computed to calculate the optical energy dissipation as a Joule heating source and the thermal transport was analysed based on the two-temperature model (TTM). Electron temperature increased up to 1000K after 50fs and its spatial distribution became homogeneous after 80fs at the fluence of 100mJ/cm2. The result of this work is expected to contribute to revealing the photothermal effects on silver nanowires induced by femtosecond laser irradiation. Although the highest increase of lattice temperature was substantially below the melting point of silver, the experimental results showed resolidification and fragmentation of the silver nanowire into nanoparticles, which cannot be explained by the photothermal mechanism. Further studies are thus needed to clarify the physical mechanisms.

• International Journal of CAD/CAM
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• v.6 no.1
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• pp.183-192
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• 2006

A CAD/CAM system has been developed for rapid prototyping (RP) of microfluidic devices based on excimer laser micromachining. The system comprises of two complementary softwares. One, the CAM tool, creates part programs from CAD models. The other, the Simulator Tool, uses a part program to generate the laser tool path and the 2D and 3D graphical representation of the machined microstructure. The CAM tool's algorithms use the 3D geometry of a microstructure, defined as an STL file exported from a CAD system, and process parameters (laser fluence, pulse repetition frequency, number of shots per area, wall angle), to automatically generate Numerical Control (NC) part programs for the machine controller. The performance of the system has been verified and demonstrated by machining a particle transportation device. The CAM tool simplifies part programming and replaces the tedious trial-and-error approach to creating programs. The simulator tool accepts manual or computer generated part programs, and displays the tool path and the machined structure. This enables error checking and editing of the program before machining, and development of programs for complex microstructures. Combined, the tools provide a user-friendly CAD/CAM system environment for rapid prototyping of microfluidic devices.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.15-21
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• 2009

High-order harmonic generation from a solid surface affected by the contrast of a laser pulse was studied using an oscillating mirror model. High-order harmonics generated from solid surfaces have unusual properties such as spectral redshift, and an intensity difference between even- and odd-order harmonics which is not reported for high-order harmonics generated by a gas medium. We confirmed that high-order harmonics from solid surfaces have selectivity of polarization as well as cut-off extension and the enhancement of conversion efficiency proportional to laser intensity. And the principle of operation and the characteristics of a plasma mirror system developed for achieving high contrast laser pulses to pursue the experimental realization of high-harmonic generation from solid surfaces are reported. Energy fluence on the plasma mirrors is tunable between $10\;J/cm^2$ and $1000\;J/cm^2$ and around 1000 shots are available before the plasma mirrors require replacement.

• Bulletin of the Korean Chemical Society
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• v.19 no.8
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• pp.830-835
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• 1998

The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.