• 한국광학회지
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• 제32권3호
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• pp.108-113
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• 2021

본 논문에서는 어떤 음원에 의하여 진동하는 물체로부터 그 음원의 소리를 레이저 도플러 간섭계를 이용하여 원거리에서 복원하는 방법을 고안하고 실험적으로 시연하였다. 어떤 음파에 의하여 진동하는 물체를 간섭계를 통하여 측정할 경우, 측정되는 간섭계의 주파수는 도플러 효과에 의하여 그 소리의 주파수와 동일하게 변한다. 이 현상을 이용하여 어떤 소리에 영향을 받는 대상의 진동 주파수를 레이저 도플러 간섭계를 통해 원거리에서 실시간으로 측정하고, 간섭계 출력의 최대 주파수를 추적하는 신호처리를 통하여 얻은 결과가 음원의 소리와 같은 주파수 특성을 갖는다는 것을 실험적으로 확인하였다. 또한, 각각의 단일 톤 음원뿐만 아니라 여러 가지 주파수가 혼합된 음원의 복원도 가능함을 확인하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.397-402
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• 2003

The FM demodulation method for a bulk homodyne laser interferometer is presented. The Doppler frequency that represents the surface velocity of a vibrating object is obtained by using the bulk homodyne laser interferometer, and converted to the voltage signal by using the proposed analogue FM demodulation circuit. The DC offsets of the interferent signals that are obtained from the bulk homodyne interferometer are eliminated by using a simple subtraction. The new method for compensation of the asymmetry of each channels is presented. The light power variation of the interferometer is normalized by using the Auto Gain Controller(AGC). The proposed FM demodulation algorithm is proved by the theoretical method, and validated by the experimental results. In experiments, the proposed FM demodulation algorithm is compared with the conventional demodulation methods.

• 동력기계공학회지
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• 제10권2호
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• pp.99-103
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• 2006

The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1738-1740
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• 1996

Laser Doppler Vibrometer using heterodyne method with a 632.8 nm He-Ne laser, has been developed for the measurement of small displacement and velocity. The measurement uses heterodyne method can be made insensitive to undesired vibration effect acting the system and can yield the sign of Doppler shift at the expense of increased complexity. A Bragg cell gives a frequency shift of 40MHz for heterodyne method. Frequency Modulated output is detected by spectrum analyzer.

• 한국기계가공학회지
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• 제5권2호
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1195-1198
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• 2003

Micro former has been known as a useful tool for machining micro parts. It makes micro holes automatically with punches, a hole-shape die and material by rotation of crank shaft synchronously. Micro displacement in micro forming affects on the performance of machining because micro forming size is similar with its mechanical displacement. Therefore, the measurement of this micro displacement is essential to be guaranteed to obtain high forming precision in the whole machine as well as its devices. This paper addresses the development of a laser interferometer to measure micro displacement for a micro former. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. For the experiment, a laser probe is installed on the optical table with optical devices and a micro displacement generating device. The velocity decoding board is also added to calculate doppler shift frequency directly. Finally simple experiments are conducted to confirm its functional operation.

• 한국정밀공학회지
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• 제15권11호
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• pp.58-66
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• 1998

A low power consuming laser scanning vibrometer is studied for its development. For its optical system, a laser interferometer is constructed to use the Doppler effect. In order to reduce the driving power of the scanning system, a small displacement of the scanning system is produced, which is achieved by using a magnetostrictive actuator. A sufficient rotating angle of the scanning system is obtained by using an amplified displacement from the resonant phenomena of a second order mechanical system composed of a mass and spring. The control of the magnetostrictive actuator using a Terfenol-D is performed without using a feedback system to help reduce the power consumption. The vibration analysis is made for the sinusoidal scanning input to have the space domain information from the time domain of the velocity of a vibration object. As a partial work of development of a tow power consuming laser scanning vibrometer, in this work, a scanning system which has the above features is developed and experimentally investigated. For the purpose of the optical system calibration, the vibration measurement for one axis is presented and the future works are discussed.

• 한국광학회지
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• 제11권5호
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• pp.306-311
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• 2000

본 논문에서는 초음파영역에서 진동하는 물체의 진동주파수와 크기를 측정할 수 있는 레이저 도플러 진동계(Laser Doppler Vibrometer, 이하 LDV)를 설계, 제작하였다. LDV의 광원으로는 파장이 632.8 nm인 He-Ne 레이저를 사용하였으며 Bragg셀에 의해 주파수가 천이되도록 한 마이켈슨형 간섭게 (Michelson interferometer)로 구성하였다. PIN다이오드의 출력은 중심주파수가 40 MHz인 주파수 변조된 신호이며, 이 신호를 증폭하고 주파수를 2.5MHz로 낮춘 후 디지털로 변환하였다. Digital Phase Locked Loop(이하 DPLL)를 사용하여 진동하는 표면의 속도에 비례하는 전압출력을 얻었으며, 이 신호로부터 진동주파수와 크기를 추출하고 주파수특성을 보상하기 위하여 마이크로프로세서를 사용하였다. 그 결과 300 kHz까지의 진동을 측정할 수 있었으며 300 kHz로 진동하는 경우 측정 가능한 최소진폭은 1 nm이었다. 본 연구에서 개발된 LDV는 대용량 전기기기의 부분방전에 의해 발생되는 초음파진동으로부터 최소형 전기 기기의 미세진동까지 측정하는 비접촉식 진동 측정에 사용할 수 있다고 사료된다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2434-2437
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• 1999

In order to detect the ultrasonic that is generated by the partial discharge of the heavy electric machinery, a Laser Doppler Vibrometer (LDV) was developed. A Michelson type interferometer which employed heterodyne signal process technique was built to measure the frequency and amplitude of vibration. The output signal of the fast photodetector was a frequency modulated signal centered at 40 MHz. The signal from the detector was amplified and downconverted to intermediate frequency centered at 1 MHz after mixing process. The voltage output that was proportional to the velocity of the moving surface(PZT) was obtained using PLL. The spectrum of the FM signal was analyzed and integration method was introduced to obtain amplitude information. This LDV can be used to measure the vibration of MEMS devices, automobiles, HDD and CDP.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2195-2197
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• 2000

In order to detect the ultrasonic that is generated by the partial discharge of the heavy electric machinery a Laser Doppler Vibrometer (LDV) is developed. A Michelson type interferometer which employed heterodyne signal process technique is built to measure the frequency and amplitude of vibration. The output signal of the fast photodetector is a frequency modulated signal centered at 40 MHz. The signal from the detector is amplified and converted to intermediate frequency centered at 1 MHz after mixing process. The voltage output that is proportional to the velocity of the moving surface(PZT) is obtained using PLL. The spectrum of the FM signal is analyzed and integration method was introduced to obtain amplitude information. This LDV can be used to measure the vibration of MEMS devices, automobiles, HDD and CDP.