• 비파괴검사학회지
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• 제22권1호
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• pp.22-31
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• 2002

일반적으로 구조물용 외부의 정적 및 동적 하중과 외부환경으로 인하여 피로균열과 부식이 발생하며, 이것은 구조물의 변형을 유발하여 결국 파단으로 이어지기 때문에 균열과 부식의 검출 및 평가와 함께 구조물의 변형에 의한 진동, 변위 기울기와 같은 거동을 감시하는 것도 매우 중요하다. 이에 레이저 센서 시스템을 이용하여 이러한 거동을 측정하여 이상 유무를 모니터링 할 수 있는 구조물 안전감시 시스템을 개발하였다. 본 시스템은 2차원으로 배열한 광전센서를 이용하여 구조물의 변형에 의해 유발된 광궤적의 변화를 감시하며, 또한 데이터를 취득하고 신호처리 할 수 있는 운용 프로그램도 갖추고 있다. 본 연구에서는 개발한 안전 진단 시스템의 필드 적용에 앞서 실험실에서의 몇 가지 실험을 통하여 그 효용성을 검증하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2007년도 제28회 춘계학술대회논문집
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• pp.45-48
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• 2007

기존에 사용되는 피에조 타입의 센서는 추력의 측정 범위가 제한되어 있으므로 이를 개선하고자 레이져 변위측정기와 cantilever를 이용하여 변위 측정 장치를 개선하였고, 스테인레스 캐필러리를 이용하여 추력 모델을 만든 후 추력을 측정하였다. 이와 더불어 extrude shape의 노즐을 갖는 마이크로 추력 장치를 PMMA(Polymethyl methacrylate)를 이용하여 공정하였으며, 매니스커스의 형상 변화를 관찰하였다.

• 한국정밀공학회지
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• 제12권4호
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• pp.119-126
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• 1995

This paper presents a non-contact measuring system using one point measuring method to measure surface profiles of dies and clay models for practical use in the field of production engineering. The system has a laser beam probe similar to a measuring probe in a contact measuring system and CCD linear sensor used to detect 300mm measurement range, displacement of measured surfaces, from an origin. There is no mechanical interference between this measuring system and a measured surface in this system. In this measuring system, it was needed 500-600ms including data processing time to measure one point. The experiments showed that the standard deviation was 800 .mu.m and the reproducibility was also 100-210 .mu. m.

• Journal of the Optical Society of Korea
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• 제19권2호
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• pp.169-174
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• 2015

Muscle vibration measurement has long been an unique scientific study, in general, and the direct reaction of animals to feel pain (algesia), either from vascular or muscle contraction, is a complex perceptual experience. Thus this paper proposes a way to measure animal algesia quantitatively, by measuring the changes in muscle vibration due to a pinprick on the surface of the skin of a Spodoptera litura larva. Using the laser optical triangulation measurement principle, along with a CMOS image sensor, linear laser, software analysis, and other tools, we quantify the subtle object point displacement, with a precision of up to $10{\mu}m$, for our chosen Spodoptera litura larva animal model, in which it is not easy to identify the tiny changes in muscle contraction dynamics with the naked eye. We inject different concentrations of formalin reagent (empty needle, 12% formalin, and 37% formalin) to obtain a variety of different muscle vibration frequencies as the experimental results. Because of the high concentrations of reagent applied, we see a high frequency shift of muscle vibration, which can be presented as pain indices, so that the algesia can be quantified.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.415-418
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• 2005

In the semiconductor and optical industry, a new transport system which can replace the conventional transport systems is required. The transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required fur reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system fur levitating object are proposed. The 3D vibration profiles of the beam are measured by Laser scanning Vibrometer fur verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured for evaluating the performance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.959-962
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• 2005

In the semiconductor and optical industry. a new transport system which can replace the conventional transport system is required. The Transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required for reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system for levitation object are proposed. The 3D vibration profiles of the beam are measured by Laser Scanning Vibrometer for verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured fore evaluating the performance.

• 한국정밀공학회지
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• 제27권1호
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• 대한기계학회논문집B
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• 제35권11호
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• pp.1147-1156
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• 2011

CLECDiS 는 면적변화형 정전용량 센서의 단점을 극복하고 나노미터 수준의 분해능으로 밀리미터 이상의 큰 변위를 측정하도록 개발된 접촉식 변위센서이다. 그러나 접촉구동 특성으로 인하여 표면평탄도와 마찰에 의해 작은 접촉상태의 변화에도 출력 신호는 크게 왜곡될 수 있어 실제 이를 활용하기 위해서는 전극간 접촉상태를 안정적으로 유지하는 것이 중요하다. 이에 본 연구에서는 전극간 접촉상태의 변화에 따른 신호의 왜곡 특성을 실제 출력 신호와 비교하여 분석하고, 접촉면 내 압력 분포와 센서의 운동 오차 측정을 통해 접촉상태의 변화를 파악하였다. 이를 통하여 센서의 운동 오차와 마찰력의 영향을 최소화하기 위한 접촉 유지 기구를 설계하고 제작하였으며 이를 이용한 구동실험을 통해 보다 안정적인 센서 출력 신호를 획득하였다.

• 한국소음진동공학회논문집
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• 제25권10호
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• pp.707-713
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• 2015

This paper proposes experimental results for control performance deterioration of a piezoelectric actuator under high temperature conditions due to external heat environment. In this work, a heat environment from 30 ℃ to 190 ℃ is established by a heat chamber which is capable of high temperature of heat environment. Inside the heat chamber, an experimental apparatus consisting of the stack type of piezoelectric actuator, laser sensor, gap sensor and temperature sensor is established. After evaluating temperature dependent blocking force, displacement and time response of a piezoelectric actuator inside the heat chamber, tracking control performances are evaluated under various temperature conditions via proportional-integral-derivative(PID) feedback controller. The desired position trajectory has a sinusoidal wave form with a fixed frequency. Control performances are experimentally evaluated at both room temperature and high temperature and presented in time domain.