Browse > Article
http://dx.doi.org/10.3795/KSME-B.2011.35.11.1147

Developing an Instrument Ensuring Reliable Contact Conditions for Contact-Type Area-varying Capacitive Displacement Sensors  

Kim, Sung-Joo (Dept. of Mechanical Engineering, POSTECH)
Lee, Won-Goo (Dept. of Mechanical Engineering, POSTECH)
Moon, Won-Kyu (Dept. of Mechanical Engineering, POSTECH)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.35, no.11, 2011 , pp. 1147-1156 More about this Journal
Abstract
A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein, in order to design an instrument for ensuring reliable contact conditions, the contact condition is analyzed by characterizing the signal distortion, observing the pressure distribution between the contacting surfaces, and measuring the motional errors of the sensor using a laser Doppler vibrometer (LDV). The manufactured instrument enables a CLECDiS to be used in an ultraprecise positioning system with improved reliability.
Keywords
Area-Varying Type; Capacitive Sensor; Ultra-Precision Positioning System; CLECDiS;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 Kim, S. W. and Ghim, Y. S., 2005, "Measurement and Test System for Large-scale Object," J. of KSPE, Vol. 22, No. 5, pp. 21-27.   과학기술학회마을
2 Park, C. H. and Hwang, K. H., 2003, "The National Technology Roadmap of Ultra Precision Machining System," J. of KSPE, Vol. 20, No. 12, pp. 11-18.   과학기술학회마을
3 Kim, D., Lee, D. Y. and Gweon, D. G., 2007, "A New Nano-Accuracy AFM System for Minimizing Abbe Errors and the Evaluation of its Measuring Uncertainty," Ultramicroscopy, Vol. 107, pp. 322-328.   DOI   ScienceOn
4 Elfizy, A. T., Bone, G. M. and Elbestawi, M. A., 2005, "Design and Control of a Dual-Stage Feed Drive," International Journal of Machine Tools & Manufacture, Vol.45, pp.153-165.   DOI   ScienceOn
5 Kim, M. and Moon, W., 2006, "A New Linear Encoder-Like Capacitive Displacement Sensor," Measurement, Vol. 39, pp. 481-489.   DOI   ScienceOn
6 Chassagne, L., Wakim, M., Xu, S., Topcu, S., Ruaus, P. and Juncar, P., 2007, "A 2D Nano-Positioning System with Sub-Nanometric Repeatability over the Millimeter Displacement Range," Meas. Sci. Technol., Vol. 18, pp. 3267-3272.   DOI   ScienceOn
7 Zhu, F. and Spronck, J. W., 1991, "A Simple Capacitive Displacement Sensor," Sensors and Actuators A, Vol. 103-131, pp. 135-141
8 Baxter, L. K., 1997, Capacitive Sensors: Design and Application, Piscataway, IEEE Press
9 Lee, K. R. and Eun, K. Y., 1993, "Diamond-Like Carbon Film," Bull. of the Koream Inst. of Met. & Mater., Vol. 6, No. 4, pp. 345-361
10 Liu, Y., Gubisch, M., Haensel, T., Spiess, L. and Schaefer, J. A., 2006, "Evaluation of the Friction of WC/DLC Solid Lubricating Films in Vaccum," Tribology International, Vol. 39, No. 12, pp. 1584-1590   DOI   ScienceOn
11 Kang, D., Kim, M. and Moon, W., 2007, "An 0.4nm Resolution Encoder-like Capacitive Displacement Sensor," KSME Conference, pp. 1450-1454.   과학기술학회마을