• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.7-10
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• 2007

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

• 제어로봇시스템학회논문지
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• 제15권11호
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• pp.1122-1129
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• 2009

Recently taping robot with smart recognition function have been studied in the coil manufacturing field. Due to the difficulty of 3D surface processing from the complicated working environment, it is not easy to accomplish smart tape attachment motion with non-contact sensor. To solve these problems the applicable surface recognition algorithm and a flexible sensing device has been recommended. In this research, the fusion method between 1D displacement and 3D laser scanner is applied for robust tape attachment about cold rolled coil. With these sensors we develop a two-step exploration and the smart algorithm for the awareness of non-aligned coil's information. In the proposed robot system for tape attachment, the problem is reduced to coil's radius searching with laser displacement sensor at first, and then position and orientation detection with 3D laser scanner. To get the movement at the robot's base frame, the hand-eye compensation between robot's end effector and sensing device should be also carried out respectively. In this paper, we examine the auto-coordinate transformation method in the calibration step for the real environment usage. From the experimental results, it was shown that the taping motion of robot had a robust under the non-aligned cold rolled coil.

• 한국정밀공학회지
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• 제20권12호
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• pp.64-72
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• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 D
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• pp.1783-1784
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• 2006

A laser interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano resolution and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The laser interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. The output of the laser interferometer is assumed to be the sum of a real displacement and a Markov process noise. The purpose of this paper is to develop Kalman filter algorithms to reduce the laser interferometer measurement errors by exploiting the information of displacements in position-servo systems.

• 한국전산구조공학회논문집
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• 제29권6호
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• pp.513-519
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• 2016

본 논문에서는 기존 파고 측정 센서의 한계를 극복하기 위하여 레이저 장비 중 LDV를 이용하여 동조액체기둥감쇠기 안의 액체의 파고를 측정하는 방법을 제안하고 검증하였다. 비접촉 센서의 장점과 LDV가 속도와 변위를 측정하는 원리를 기술하였고 대상 물체가 액체인 경우에 요구되는 사항들에 대하여 실험적으로 파악하였다. 투명한 액체는 레이저 광선을 대부분 투과시켜 LDV에 되돌아오는 광량이 부족해 측정이 불가능함을 확인하였고 이를 증가시키기 위해 염료를 혼합하였다. 이때, 염료의 색에 따라 광량에 차이가 발생함을 확인하여 LDV에 사용된 레이저 광선의 파장과 연관된 결과를 도출하였다. 염료를 혼합한 후 광량이 충분한 경우에도 발생하는 데이터의 오차를 제거하기 위해 염료의 농도를 변화시키며 그에 따른 데이터의 정확도를 파악하였다. 결과적으로 모든 가시광선의 빛을 반사시키는 흰색의 염료를 충분한 농도로 혼합하였을 때 LDV를 이용한 TLCD의 파고 측정의 실험적인 결과가 용량식 파고계와 일치함을 확인하였다.

• 한국정밀공학회지
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• 제17권9호
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• pp.62-69
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• 2000

Uneven clearances in the left and right sides of a press die cause deformation of the punch in precision shearing process. This deformation results from the compression stress and bending moment from shearing force in vertical direction and from the side force in horizontal direction acting to the punch, In this study the behavior of punch deformation is investigated in order to clarify the deformation state of the punch by using strain gauge deformation to shearing force side force bending moment radius of curvature and shear plane of the punch. Also we presented the calculation method of deformation size for the punch.

• 한국전산구조공학회논문집
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• 제31권5호
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• pp.227-234
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• 2018

슬로싱과 같은 액체의 동적 거동을 측정하고 제어하는 연구가 다양한 공학분야에서 활발히 진행중이다. 건축공학분야에서도 건축물의 풍진동을 저감시키는 동조액체감쇠기의 연구에 액제 진동이 측정되고 있다. 본 논문에서는 기존 파고 측정 센서의 한계를 극복하기 위하여 레이저 장비 중 LDV와 스캐닝 장비 중 갈바노미터스캐너를 이용하여 동조액체감쇠기 내의 액체 진동을 측정하는 방법을 제안하고 검증하였다. LDV가 속도와 변위를 측정하는 원리를 기술하였고 갈바노미터스캐너의 구동 원리에 따라 LDV의 단일 포인트로 다점측정이 가능한 시스템을 구성하였다. 동조 액체감쇠기의 4점 액체 진동을 측정하여 각 점의 시간 영역 데이터를 기존에 사용하던 비디오 센싱 데이터와 비교하였고 파형 분석을 통해 진행파와 정상파를 구별할 수 있음을 확인하였다. 또한 측정 딜레이가 있는 데이터를 상호 상관을 취하여 특이값 분해를 하고 이론 및 비디오 센싱 결과와 일치하는 고유진동수와 모드형상을 도출하였다.