• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.7-10
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• 2007

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.11
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• pp.1122-1129
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• 2009

Recently taping robot with smart recognition function have been studied in the coil manufacturing field. Due to the difficulty of 3D surface processing from the complicated working environment, it is not easy to accomplish smart tape attachment motion with non-contact sensor. To solve these problems the applicable surface recognition algorithm and a flexible sensing device has been recommended. In this research, the fusion method between 1D displacement and 3D laser scanner is applied for robust tape attachment about cold rolled coil. With these sensors we develop a two-step exploration and the smart algorithm for the awareness of non-aligned coil's information. In the proposed robot system for tape attachment, the problem is reduced to coil's radius searching with laser displacement sensor at first, and then position and orientation detection with 3D laser scanner. To get the movement at the robot's base frame, the hand-eye compensation between robot's end effector and sensing device should be also carried out respectively. In this paper, we examine the auto-coordinate transformation method in the calibration step for the real environment usage. From the experimental results, it was shown that the taping motion of robot had a robust under the non-aligned cold rolled coil.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.64-72
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• 2003

This paper presents a small loading and positioning device using VCM (voice coil motor). The developed device consists of a VCM-based linear actuating system, a capacitance displacement sensor and a cantilever deflection sensing system. The trust force of the VCM proportional to applied current moves the column supported on two pairs of parallel leaf springs. The infinitesimal displacement of moved column is detected by capacitance displacement sensor with a resolution of 0.1nm and a repeatability of 1nm. Also, a micro cantilever with known stiffness (200N/m), which is mounted on the end of the column, is used as a force sensor to detect the load applied to a specimen. After the cantilever contacts with the specimen, the deflection of cantilever and the load applied to the specimen are measured by using an optical lever system which consists of a diode laser, a mirror and a PSD (position sensitive detector). In this paper, an experimental system was constructed and its actuator and sensing parts were tested and calibrated. Also, the constructed system was applied to the indentation experiment and the load-displacement curve of aluminum was obtained. Experimental results showed that the developed device can be applied for performing nano indentation.

• Proceedings of the KIEE Conference
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• 2006.07d
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• pp.1783-1784
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• 2006

A laser interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano resolution and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The laser interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. The output of the laser interferometer is assumed to be the sum of a real displacement and a Markov process noise. The purpose of this paper is to develop Kalman filter algorithms to reduce the laser interferometer measurement errors by exploiting the information of displacements in position-servo systems.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.29 no.6
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• pp.513-519
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• 2016

In this study, dynamic vertical displacement of liquid in the tuned liquid column damper(TLCD) is measured by a laser Doppler vibrometer(LDV) to overcome limitations of existing sensors and to leverage noncontact sensing. Addressing advantages of noncontact measurements, operational principles of the LDV to measure velocity and displacement of a target object in motion is explained. The feasibility of application of the LDV to measurement of liquid motion in the TLCD is experimentally explored. A series of shake table tests with the TLCD are performed to determine requirements of application of the LDV. Based on the experimental results, it is proved that the LDV works under the condition of adding dye to the liquid by increasing the intensity of reflected laser and thus validity is verified by comparison with a conventional wave height meter.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.9
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• pp.62-69
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• 2000

Uneven clearances in the left and right sides of a press die cause deformation of the punch in precision shearing process. This deformation results from the compression stress and bending moment from shearing force in vertical direction and from the side force in horizontal direction acting to the punch, In this study the behavior of punch deformation is investigated in order to clarify the deformation state of the punch by using strain gauge deformation to shearing force side force bending moment radius of curvature and shear plane of the punch. Also we presented the calculation method of deformation size for the punch.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.5
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• pp.227-234
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• 2018

Researches regarding measurement and control of the dynamic behavior of liquid such as sloshing have been actively on undertaken in various engineering fields. Liquid vibration is being measured in the study of tuned liquid dampers(TLDs), which attenuates wind motion of buildings even in building structures. To overcome the limitations of existing wave height measurement sensors, a method of measuring liquid vibration in a TLD using a laser Doppler vibrometer(LDV) and galvanometer scanner is proposed in this paper: the principle of measuring speed and displacement is discussed; a system of multi-point measurement with a single point of LDV according to the operating principles of the galvanometer scanner is established. 4-point liquid vibration on the TLD is measured, and the time domain data of each point is compared with the conventional video sensing data. It was confirmed that the waveform is transformed into the traveling wave and the standing wave. In addition, the data with measurement delay are cross-correlated to perform singular value decomposition. The natural frequencies and mode shapes are compared using theoretical and video sensing results.