• 한국레이저가공학회지
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• 제6권3호
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• pp.11-17
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• 2003

Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400 $\mu\textrm{m}$ thick and 13 mm long silicon cantilever. The vibration amplitude of the cantilever induced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever with a theoretical model, the recoil momentum is estimated. For laser irradiance in the order of 10$\^$11/ W/$\textrm{cm}^2$, the recoil pressure reached a value over 40${\times}$10$\^$9/ Pa.

• 한국레이저가공학회지
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• 제16권2호
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• pp.1-6
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• 2013

Picosecond lasers are a very effective tool for micromachining metals, especially when high accuracy, high surface roughness and no heat affected zone are required. However, low productivity has been a limit to broadening the spectrum of their industrial applications. Recently it was reported that in the micromachining of copper with a 1064nm picosecond laser, there exist the optimal pulse energy and repetition rate to achieve the maximum volume ablation rate. In this paper, we used a 515nm picosecond laser, which is more efficient for micromachining copper in terms of laser energy absorption, to obtain its optimal pulse energy and repetition rate. Theoretical analysis based on the experimental data on copper ablation showed that using a 515nm picosecond laser instead of a 1064nm picosecond laser is more favorable in that the calculated threshold fluence is 75% lower and optical penetration depth is 50% deeper.

• 한국전기전자재료학회논문지
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• 제18권5호
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• pp.478-483
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• 2005

In this paper, we synthesized 10 to 20 nm diameter NiFe nanoparticles and nanoparticle films utilizing supersonic jet deposition of nanoparticle aerosols generated by laser ablation of $30\;to\;45{\mu}m$ diameter permalloy $(Ni_{81}Fe_{19} \;at\;{\%})$ microparticles. The component and composition of the nanoparticles were characterized by an energy dispersive X-ray spectroscopy. The morphology of the nanoparticles and nanoparticle films was analyzed by a high-resolution transmission electron microscopy and a scanning electron microscopy, respectively. The experimental results showed that the nanoparticles and nanoparticle films have remarkable properties with an excellent preservation of the composition of feedstock permalloy microparticles. The purpose of the present work is to present details on the composition and nanostructural characterizations for NiFe nanoparticles and nanoparticle films prepared by laser ablation of microparticles (LAM).

• 방사성폐기물학회지
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• 제3권1호
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• pp.17-21
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• 2005

방사선차폐 laser ablation 시스템을 레이저, 미세영역의 영상 확인을 위한 이미지 시스템, XYZ 이동장치와 조절기, ablation chamber, manipulator 및 여러 가지 광학부품들로 구성하였다. Ablation용 레이저는 UOB 및 tircaloy 시편으로부터 효율적으로 시료를 채취할 수 있도록 266 nm(6 mJ)까지 파장 변환이 가능한 Nd:YAG 레이저를 선정하였으며, 이미지 시스템은 직경 50 $\mu$m 크기의 crater를 판별할 수 있는 200 배율 이상의 규격을 갖춘 CCD 카메라로 선정하였다. 시편 미세이동장치는 XYZ방향으로 시편이동이 가능하고 최대 이동거리가 50 mm까지 , 그리고 최소 1$\mu$m 씩 정확하게 움직일 수 있는 장치로 선정하였다. 구성된 각 단위기기들에 대하여 광학 정렬을 수행한 후, 시료채취 부위를 50 $\mu$m씩 정확하게 이동하면서 레이저로 조사시킨 시료 표면을 CCD 카메라를 통하여 관찰한 결과, 표면에 생성된 crater는 원형임을 확인함으로써 단위기기별 성능을 확인할 수 있었다.

• 한국레이저가공학회지
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• 제6권2호
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• pp.35-41
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• 2003

In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.

• 한국정밀공학회지
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• 제29권2호
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• pp.161-169
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• 2012

Recently, a study for the functional surface production of super hydrophobic of natural and biomimetic artificial has attracted much attention. To make process methods of super hydrophobic surface has a variety of ways such as lithography, etching, and laser ablation. However, we were used ultra-shot pulse laser ablation process which has the virtue of more environmental friendliness and simple process. In this paper, we were fabricated a multiplicity of super hydrophobic patterns on mold surface(NAK80) using by optimizing the laser processing conditions and it was transferred on PDMS. Also, we measured contact angle super hydrophobic patterns on PDMS. The result showed there is no patterns on PDMS were measured 94 degrees, by contrast, optimized super hydrophobic patterns on PDMS was 157 degrees. Therefore we fabricated super hydrophobic surface on mold. Based on these experimental results, it is possible to mass production using ultra shot pulse laser ablation of super hydrophobic pattern and to be applied for a variety of industries.

• 한국레이저가공학회지
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• 제12권1호
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• pp.7-13
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• 2009

Engineering ceramics as sapphire are widely used in industry owing to their superior mechanical and corrosion properties. However, micromachining of sapphire is a considerable challenge due to its transparency. Recently, direct ablation of sapphire has been demonstrated with a visible laser pulse at sufficiently high laser intensity. In this work, the theoretical model for pulsed laser ablation of sapphire is suggested and numerical analysis is carried out using the model. Sapphire ablation begins with plasma generation by the laser interaction with surface defects, impurities and contaminations in the initial stage of machining. Subsequent absorption of the visible laser beam can be explained by three mechanisms: metalization of sapphire surface due to the EUV radiation from the hot plasma, increments of surface roughness and temperature-dependent absorption coefficient. Comparison of the computation results with experimental observation indicates that the proposed model of sapphire is reasonable.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 1993년도 추계연구발표회 논문개요집
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• pp.58-59
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• 1993

• 한국자기학회:학술대회 개요집
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• 한국자기학회 1994년도 추계연구발표회 논문개요집
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• pp.56-57
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• 1994

• 한국자기학회:학술대회 개요집
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• 한국자기학회 1996년도 추계연구발표회 논문개요집
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• pp.90-91
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• 1996