• Korean Journal of Environmental Agriculture
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• v.10 no.2
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• pp.128-132
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• 1991

This study was carried out to find a method to remove cadmium from soil and/or attenuate in Cd saturated Soil The chemical form of Cd was influenced by the physico-chemical properties of soil and the adsorption of Cd by soil conformed to the Langmuir isotherm. The order of Cd contents in chemical fractions extracted by several reagents was EDTA > NaOH > $HNO_3$. Flooding, liming and the addition of chelating agents and clay minerals to the contaminated soil seems to desirable in alleviating the harmful effects of Cd on plant growth by reducing Cd content in the $KNO_3$ fraction.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.463-463
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• 2012

ITRS (international technology roadmap for semiconductors)에 따르면 MOS(metal-oxide-semiconductor)의 CD (critical dimension)가 45 nm node이하로 줄어들면서 poly-Si/$SiO_2$를 대체할 수 있는 poly-Si/metal gate/high-k dielectric이 대두된다고 보고하고 있다. 일반적으로 high-k dielectric를 식각시 anisotropic 한 식각 형상을 형성시키기 위해서 plasma를 이용한 RIE (reactive ion etching)를 사용하고 있지만 PIDs (plasma induced damages)의 하나인 PIED (plasma induced edge damage)의 발생이 문제가 되고 있다. PIED의 원인으로 plasma의 direct interaction을 발생시켜 gate oxide의 edge에 trap을 형성시키므로 그 결과 소자 특성 저하가 보고되고 있다. 그러므로 본 연구에서는 이에 차세대 MOS의 high-k dielectric의 식각공정에 HDP (high density plasma)의 ICP (inductively coupled plasma) source를 이용한 원자층 식각 장비를 사용하여 PIED를 줄일 수 있는 새로운 식각 공정에 대한 연구를 하였다. One-monolayer 식각을 위한 1 cycle의 원자층 식각은 총 4 steps으로 구성 되어 있다. 첫 번째 step은 Langmuir isotherm에 의하여 표면에 highly reactant atoms이나 molecules을 chemically adsorption을 시킨다. 두 번째 step은 purge 시킨다. 세 번째 step은 ion source를 이용하여 발생시킨 Ar low energetic beam으로 표면에 chemically adsorbed compounds를 desorption 시킨다. 네 번째 step은 purge 시킨다. 결과적으로 self limited 한 식각이 이루어짐을 볼 수 있었다. 실제 공정을 MOS의 high-k dielectric에 적용시켜 metal gate/high-k dielectric CMOSFETs의 NCSU (North Carolina State University) CVC model로 구한 EOT (equivalent oxide thickness)는 변화가 없으면서 mos parameter인 Ion/Ioff ratio의 증가를 볼 수 있었다. 그 원인으로 XPS (X-ray photoelectron spectroscopy)로 gate oxide의 atomic percentage의 분석 결과 식각 중 발생하는 gate oxide의 edge에 trap의 감소로 기인함을 확인할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.402-402
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• 2012

최근 반도체 공정 중 fluorocarbon (CxHyFz) 가스와 함께 플라즈마 밀도가 큰 유도결합형 플라즈마을 사용한 식각장비가 많이 사용되고 있다. 특히 저 유전상수 값을 가지는 박막을 밀도가 큰 플라즈마와 함께 fluorocarbon 가스를 이용하여 식각을 하게 되면 매우 복잡한 현상이 생긴다. 따라서 식각률에 대한 모델을 세우고 적용하는 일이 매우 어렵다. 본 연구에서는 CF4가스를 Ar가스와 함께 혼합하고 기판 플라즈마와 유도결합형 플라즈마를 동시에 가진 식각장비를 사용하여, 저 유전상수 값을 갖는 박막을 식각하였다. 또한, 간단한 식각모델인 Langmuir adsorption model를 이용하여 식각률(Etch rate)에 대한 합리적인 이해를 얻기 위해, 기판과 유도결합형 플라즈마의 파워에 따른 식각률을 계산하고, 식각모델에서 사용되는 매개변수인 이온플럭스(Ion Flux)와 식각수율(Etch yield)을 연구하였다. 기판의 플라즈마 파워가 20에서 100 W 증가하면서 식각률이 269에서 478 nm/min로 증가하였으며, 식각수율이 0.4에서 0.59로 증가하는 것을 관찰하였다. 반면에 기판의 플라즈마 파워 증가에 따라 이온 플럭스는 3.8에서 $4.7mA/cm^2$로 변화가 크지 않았다. 또한, 유도결합형 플라즈마의 파워가 100에서 500 W 증가하면서, 식각률이 117에서 563 nm/min로 증가하였으며, 이온플럭스가 1.5에서 $6.8mA/cm^2$으로 변화하였다. 그러나, 식각수율은 0.46에서 0.48로 거의 변화하지 않았다. 그러므로 저 유전상수 값을 가지는 박막 식각의 경우, 기판의 플라즈마는 식각수율을 증가시키며 유도결합형 플라즈마는 이온 플럭스를 증가시켜 박막 식각에 기여하는 것으로 사료된다.

• KSBB Journal
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• v.20 no.3
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• pp.244-249
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• 2005

Chiral separation of racemic ibuprofen was achieved on a Kromasil KR100-5CHI-TBB column. Some chromatographic parameters (resolution, number of theoretical plates, HETP, capacity factor) are calculated under different separation conditions such as change of mobile phase compositions (hexane / t-BME : 85 / 15, 75 / 15, 65 / 35, 55 /45) as well as acetic acid concentrations for adjusting pH (0.1 to 1 $v/v\%$). Flow rate versus number of theoretical plates and HETP were compared to evaluate column efficiency. To determine the adsorption isotherms, PIM (Pulsed Input Method) was carried out. At concentrations of racemic ibuprofen between 0.1 and 0.3 mg/ml, S- and R-ibuprofen have the same retention time of 4.48 and 5.81 min. Ibuprofen isotherms show a linear form under concentrations of 0.3 mg/ml with eluent (hexane / t-BME = 55 / 45).

• Applied Chemistry for Engineering
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• v.34 no.2
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• pp.199-205
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• 2023

Arsenic is a highly toxic element, and its contamination is widespread around the world. The natural materials with high selectivity and efficiency toward pollutants are important in wastewater treatment technology. In this study, the mesoporous synthetic hectorite was synthesized by facile hydrothermal crystallization of gels comprising silica, magnesium hydroxide, and lithium fluoride. Additionally, the naturally available clay was modified using zirconium at room temperature. Both synthetic and modified natural clays were employed in the removal of arsenate from aquatic environments. The materials were fully characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), and Fourier transform-infrared (FT-IR) analyses. The synthesized materials were used to remove arsenic (V) under varied physicochemical conditions. Both materials, i.e., Zr-bentonite and Zr-hectorite, showed high percentage removal of arsenic (V) at lower pH, and the efficiency decreased in an alkaline medium. The equilibrium-state sorption data agrees well with the Langmuir and Freundlich adsorption isotherms, and the maximum sorption capacity is found to be 4.608 and 2.207 mg/g for Zr-bentonite and Zr-hectorite, respectively. The kinetic data fits well with the pseudo-second order kinetic model. Furthermore, the effect of the background electrolytes study indicated that arsenic (V) is specifically sorbed at the surface of these two nanocomposites. This study demonstrated that zirconium intercalated synthetic hectorite as well as zirconium modified natural clays are effective and efficient materials for the selective removal of arsenic (V) from aqueous medium.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 1998.10a
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• pp.2-4
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• 1998

Proliferation of Nocardia amarae cells in activated sludge has often been associated with the generation of nuisance foams. Despite intense research activities in recent years to examine the causes and control of Nocardia foaming in activated sludge, the foaming continued to persist throughout the activated sludge treatment plants in United States. In addition to causing various operational problems to treatment processes, the presence of Nocardia may have secondary effects on the fate of heavy metals that are not well known. For example, for treatment plants facing more stringent metal removal requirements, potential metal removal by Nocardia cells in foaming activated sludge would be a welcome secondary effect. In contrast, with new viosolid disposal regulations in place (Code o( Federal Regulation No. 503), higher concentration of metals in biosolids from foaming activated sludge could create management problems. The goal of this research was to investigate the metal sorption property of Nocardia amarae cells grown in batch reactors and in chemostat reactors. Specific surface area and metal sorption characteristics of N. amarae cells harvested at various growth stages were compared. Three metals examined in this study were copper, cadmium and nickel. Nocardia amarae strain (SRWTP isolate) used in this study was obtained from the University of California at Berkeley. The pure culture was grown in 4L batch reactor containing mineral salt medium with sodium acetate as the sole carbon source. In order to quantify the sorption of heavy metal ions to N amarae cell surfaces, cells from the batch reactor were harvested, washed, and suspended in 30mL centrifuge tubes. Metal sorption studies were conducted at pH 7.0 and ionlc strength of 10-2M. The sorption Isotherm showed that the cells harvested from the stationary and endogenous growth phase exhibited significantly higher metal sorption capacity than the cells from the exponential phase. The sequence of preferential uptake of metals by N. amarae cells was Cu>Cd>Ni. The specific surFace area of Nocardia cells was determined by a dye adsorption method. N.amarae cells growing at ewponential phase had significantly less specific surface area than that of stationary phase, indicating that the lower metal sorption capacity of Nocardia cells growing at exponential phase may be due to the lower specific surface area. The growth conditions of Nocardia cells in continuous culture affect their cell surface properties, thereby governing the adsorption capacity of heavy metal. The comparison of dye sorption isotherms for Nocardia cells growing at various growth rates revealed that the cell surface area increased with increasing sludge age, indicating that the cell surface area is highly dependent on the steady-state growth rate. The highest specific surface area of 199m21g was obtained from N.amarae cell harvested at 0.33 day-1 of growth rate. This result suggests that growth condition not only alters the structure of Nocardia cell wall but also affects the surface area, thus yielding more binding sites of metal removal. After reaching the steady-state condition at dilution rate, metal adsorption isotherms were used to determine the equilibrium distributions of metals between aqueous and Nocardia cell surfaces. The metal sorption capacity of Nocardia biomass harvested from 0.33 day-1 of growth rate was significantly higher than that of cells harvested from 0.5- and 1-day-1 operation, indicatng that N.amarae cells with a lower growth rate have higher sorpion capacity. This result was in close agreement with the trend observed from the batch study. To evaluate the effect of Nocardia cells on the metal binding capacity of activated sludge, specific surface area and metal sorption capacity of the mixture of Nocardia pure cultures and activated sludge biomass were determined by a series of batch experiments. The higher levels of Nocardia cells in the Nocardia-activated sludge samples resulted in the higher specific surface area, explaining the higher metal sorption sites by the mixed luquor samples containing greater amounts on Nocardia cells. The effect of Nocardia cells on the metal sorption capacity of activated sludge was evaluated by spiking an activated sludge sample with various amounts of pre culture Nocardia cells. The results of the Langmuir isotherm model fitted to the metal sorption by various mixtures of Nocardia and activated sludge indicated that the mixture containing higher Nocardia levels had higher metal adsorption capacity than the mixture containing lower Nocardia levels. At Nocardia levels above 100mg/g VSS, the metal sorption capacity of activate sludge increased proportionally with the amount of Noeardia cells present in the mixed liquor, indicating that the presence of Nocardia may increase the viosorption capacity of activated sludge.

• Membrane Journal
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• v.6 no.3
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• pp.157-165
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• 1996

Polysulfone(PS) membranes were prepared from homogeneous PS solutions by the phase inversion technique. When propionic acid(PA) was added into a casting solution of n-methylpyrrolidone(NMP) and PS, precipitation rate of the solution film was accelerated. This kind of acceleration was consistent, even though a precipitating nonsolvent was changed from water to isopropanol. These phenomena were caused by decrease of nonsolvent tolerance in the casting solution due to addition of PA. PS powder was prepared by precipitation of a 3wt% solution in dimethylformamide(DMF) using ethanol as nonsolvent. Gas adsorption analysis of the powder showed that the capillary condensation sites were found in the powder structure. Membranes prepared from PS solution(15wt%) in NMP had the following characteristics of gas adsorption and water permeation. In gas adsorption analysis, the membrane precipitated using isopropanol showed low uptake of nitrogen gas and the capillary condensation sites were not found. On the contrary, a significant amount of the capillary condensation sites was found in the membrane coagulated by water, which was related to increase of nitrogen uptake. tn the membrane prepared froin the solution including PA, an increase of the Henry's law sites and the Langmuir sites was not found clearly. However, the capillary condensation sites were significantly increased, and the water transport also increased.

• Korean Journal of Soil Science and Fertilizer
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• v.23 no.1
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• pp.8-14
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• 1990

Retardation and hydrodynamic dispersion coefficient necessary for model of water and solute movement in a soil were determined for horizontal soil column with different initial soil water conditions. The soil columns were compacted with sandy loam soil. The bulk density was $1,350+50kg/m^3$, and initial water contents were 0.05, 0.08 and 0.14. Advancement of 0.05% $CaSO_4$ solution was used as the standard and advancements of 0.5% KCl, $CaCl_2$ and $KH_2PO_4$ were compared. Retardation of non-reactive $Cl^-$ was related with the initial soil water content, ${\theta}n$, as ${\theta}/({\theta}-{\theta}n)$, and anion exclusion was ignored. Retardations of active $K^+$, $Ca^{{+}{+}}$ and $H_2PO_4{^-}$ were related as 1/(R+1) $^*{\theta}/({\theta}-{\theta}n)$, in which R was retardation coefficient. Measured R was 0.64 for $K^+$, 0.80 for $Ca^{{+}{+}}$ and 2.6 for $H_2PO_4{^-}$, respectively. Calculated R using Langmuir adsorption isotherm showed fair degree of applicability. Soil water diffusivity, $D({\theta}),m^2/sec$, calculated for different initial water content showed unique function as $$log(D({\theta}))=13.448{\theta}-9.288$$ Hydrodynamic dispersion coefficient of $Cl^-$ above soil water content 0.36 was similar to soil water diffusivity and decreased to near self diffusion coefficient at soil water content near 0.2. Those of $K^+$, $Ca^{{+}{+}}$ $H_2PO_4{^-}$ at soil water content of 0.38 were $5.5{\times}10^{-6}$, $2.4{\times}10^{-6}$ and $7.1{\times}10^{-7}m^2/sec$ and decreased rapidly with decreasing soil water content lower than 0.36.

• Journal of the Korean GEO-environmental Society
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• v.17 no.11
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• pp.5-14
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• 2016

The main objective of this study was to evaluate the removal properties of Cu from existing exfoliated vermiculite (EV) coated with a mixed solution of sulfuric acid and glycerol on the $580^{\circ}C$ in heating, which uses coated with glycerol of copper ions can be removed more effectively. Serial batch kinetic tests and batch sorption tests were conducted to determine the removal characteristics for Cu in aqueous solution. The result of batch kinetic test shows that removal rate, $K_{obs}$ (1/hr), of Cu are 0.579, 0.878, 3.459, and 6.578 for MEV weight 1 g (25 g/L), 2 g (50 g/L), 3 g (75 g/L), 4 g (100 g/L), respectively. In this case the initial pH of the solution was 3.26. The removal experiment according to the concentration, $K_{obs}$ (1/hr), of Cu are 1.96, 0.878, 1.25, and 1.04 for the initial concentration of 3 mg/L, 5 mg/L, 8 mg/L, 10 mg/L, and the initial pH of the solution are 3.46, 3.26, 3.10, 2.96, respectively. Influence of initial pHs on Cu removal were tested under 1g of MEV with 5 mg/L of Cu solution. $K_{obs}$ (1/hr) were increased from 0.263 (pH 3) to 0.525 (pH 5). It leads to the conclusion that the removal rates are inversely proportional to the initial Cu concentration and are increased proportional to the initial pHs. Sorption capacity of MEV was determined by batch sorption tests. The maximum sorption capacity ($Q_{max}$) obtained from Langmuir was 0.761 mg/g, Linear and Freundlich partition coefficients were 0.494 L/g and 0.729 L/g (1/n = 0.476). These results show that the MEV could be used as an excellent adsorbent for copper contained in various types of aqueous solutions.

• Korean Journal of Soil Science and Fertilizer
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• v.25 no.2
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• pp.111-126
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• 1992

Silica sorption isotherm belonged to the C-type with weak L-type characteristics according to the classification system of adsorption isotherm. Silica sorption isothem fitted well to the Freundlich and Tempkin equation but not to the Langmuir equation. The color interference probably due to $Fe^{2+}$ during spectrometric silca determination by Molybdenum-blue method affected the sorption isotherm in reduced soils or low pH. Four parameters such as the intercept of Freundlich equation, the slope of Tempkin equation, the "Silica reactivity", and the "C-type slope", where the last two parameters were termed in the current study, were examined to assess treatment effects on silica sorption. Among them the "C-type slope" was found out to be the best parameter. The C-type isotherms showed the same high correlation coefficient as Freundlich and Tempkin equation when regressed to the sorption isothem. Plotting the C-type slope on a logarithmic scale vs. the pH showed high linearity. Using the "C-type slope" as a perameter, the pH and soil type affected the silica sorption while the effect of redox condtion was not significant. All Fe and Al extracted by the various reagents, and OM were highly correlated to silica sorption. Among them $Fe_d$ was identified as the highest influencing soil property. Since there is no equivalent reliable method to discriminate the forms of the soil Al-oxides their likely importance remains unclear.