• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.252-253
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• 2009

In this study, the deformation and etch characteristics of ArF and EUV photoresists were compared in a dual frequency superimposed capacitively coupled plasma (DFS-CCP) etcher systems using $CF_{4}/O_{2}/Ar$ and $CF_{4}/CHF_{3}/O_{2}/Ar$ mixture gas chemistry which are typically used for BARC open and $Si_{3}N_{4}$ teching chemistry, respectively. Etch rate of the resists tend to increase with low-frequency source power ($P_{LF}$) and high-frequency source ($f_{HF}$). The etch rate of ArF resist was hgither than that of EUV resist.

• Proceedings of the Korean Society for Emotion and Sensibility Conference
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• 1998.11a
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• pp.94-98
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• 1998

최근 온열 환경에서 인간의 쾌적감에 대한 관심이 커지고 있다. 온열쾌적감에 영향을 주는 요인들로는 온도, 습도, 기류 둥의 물리적 요인과 성별이나 체질 둥의 개인적인 요인들 뿐만 아니라 온열환경에서 느끼는 인간의 감성적인 측면도 요인으로 작용하게 된다. 본 연구에서는 여러가지 온열 환경 중에서 기류환경에 따른 인간의 온열 쾌적감을 평가하기 위해 생체반응의 변화 및 감성의 변화에 따른 생리신호를 분석을 통해 살펴보았다. 기류환경은 기존에 사용되고 있는 풍향변화기류 및 풍량변화기류와 새롭게 개발되어진 감성기류의 3가지 기류 조건을 제시하였고, 이에 따른 인체의 자율신경계의 반응과 감성 상태를 관찰하기 위해 심전도(ECG)와 뇌파(EEC)를 측정하여 HRV(Heart Rate Variability) 분석과 EEG 주파수 스펙트럼 분석을 시행하였다. 생리신호 분석결과 심전도의 HRV 분석에서는 감성기류가 풍향변화 기류와 풍속변화기류에 비해 HF/LF 비가 높게 나타났고, 뇌파의 주파수 스펙트럼 분석에서도 $\beta$파에 대한 뇌파의 상대 전력비가 감성기류에서 높게 나타나 감성기류가 제시된 다른 기류인 풍향변화기류나 풍속변화기류에 비해 쾌적한 온열환경 제시를 위한 기류조건이라고 평가되었다. 결론적으로 심전도의 HRV분석과 뇌파의 주파수 분석이 .제시된 기류환경의 온열쾌적감 평가에서 서로 유의한 결과를 나타냄으로써, 이들 생리신호의 분석이 온열환경에 따른 인간의 감성 변화를 객관적으로 나타내고 온열 쾌적감을 평가하는데 있어 유용한 정보가 될 수 있음을 제시하였다.

• Proceedings of the KSRS Conference
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• 2007.10a
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• pp.504-507
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• 2007

The KOMPSAT-2 satellite is a push-broom system with MSC (Multi Spectral Camera) which contains a panchromatic band and four multi-spectral bands covering the spectral range from 450nm to 900nm. The PAN band is composed of six CCD array with 2528 pixels. And the MS band has one CCD array with 3792 pixels. Raw imagery generated from a push-broom sensor contains vertical streaks caused by variability in detector response, variability in lens falloff, pixel area, output amplifiers and especially electrical gain and offset. Relative radiometric calibration is necessary to account for the detector-to-detector non-uniformity in this raw imagery. Non-uniformity correction (NUC) is that the process of performing on-board relative correction of gain and offset for each pixel to improve data compressibility and to reduce banding and streaking from aggregation or re-sampling in the imagery. A relative gain and offset are calculated for each detector using scenes from uniform target area such as a large desert, forest, sea. In the NUC of KOMPSAT-2, The NUC table for each pixel are divided as HF NUC (high frequency NUC) and LF NUC (low frequency NUC) to apply to few restricted facts in the operating system ofKOMPSAT-2. This work presents the algorithm and process of NUC table generation and shows the imagery to compare with and without calibration.

• Journal of The Korean Society of Integrative Medicine
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• v.4 no.4
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• pp.77-82
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• 2016

Purpose: The purpose of this study was to investigate the therapeutic effect of non-invasive vagus nerve stimulation by transcutaneous electrical nerve stimulation application on the autonomic nervous system of human body. Methods: Participants were seventeen healthy adults. Standard deviation of all normal N-N intervals(SDNN), root mean square of successive differences(RMSSD), low frequency(LF), high frequency(HF) were compared in pre and post Mean values after intervention. Data were analyzed in Wilcoxon's signed-ranks test. Results: The results of this study is that sistolic blood pressure and pulse rate decreased mean value after non-invasive vagus nerve stimulation by transcutaneous electrical nerve stimulation. High frequency, low frequency, SDNN, RMSSD increased mean value in heart rate variability after intervention. But that is not significant except for SDNN. Conclusion: Non-invasive vagus stimulation by transcutaneous electrical nerve stimulation effect on parasympathetic nerve stimulation, and then it might be effective method for autonomic nerve balance control.

• Journal of Physiology & Pathology in Korean Medicine
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• v.20 no.3
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• pp.544-547
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• 2006

The purpose of this study was to examine the effects of Doin Gigong Exercise program on HRV in elderly women. This study was one group in a pre-test / post-test desgian with repeated measures. The experimental group of 27 patients were selected through sampling from H-public health center in the P-city. The subjects received Doin Gigong Exercise twice a week for 50 minutes for 12 weeks. All of the subjects were examined on the congnition assessment tool. Prior and post surveys were measured before and after the experiment. Among the stress assessment, RRV tachogram's 'mean RR' was very significantly increased after Qigong Exercise(p<0.01), and the 'mean HRV' was significantly decreased after Qigong Exercise(p<0.05). But the SDNN was not significantly increased after Qigong Exercise. And TP(RRV power's total power) was significantly increased after Qigong Exercise(p<0.01). VLF and HF was significantly increased, and LF was significantly decreased after Qigong Exercise(p<0.05). In the RRV's Phase Plot, RMSSD and SDSD were significantly increased after Qigong Exercise(0.05). As mentioned above; the oriental medicine Qigong Exercise program was identified the effects of the heart rate and anti-stress.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• Proceedings of the Korean Society for Emotion and Sensibility Conference
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• 1999.03a
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• pp.163-167
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• 1999

사회와 생활수준의 발달로 인간은 자연환경하에서 생활보다 인공적 환경하에서의 생활이 증가하게 되었다. 따라서 인간은 쾌적한 생활공간을 요구하게 되었고 이를 위한 온열환경에 대한 연구가 진행되어져 왔다. 이러한 생활공간에서의 쾌적한 온열환경에 영향을 주는 물리적 요인으로는 온도와 습도 그리고 기류 등이 있다. 또한 온열환경에 대한 인간의 감성적 측면도 쾌적한 온열환경을 결정하는데 중요한 역할을 한다. 본 연구에서는 겨울철 대류난방시 인간에게 가장 쾌적한 환경을 제시할 수 있는 기류 속도의 범위를 찾고, 이를 평가하는데 객관적인 지표를 설정하기 위해 온도에 따른 기류조건을 제시하고, HRV 분석을 통하여 인체의 자율신경계의 변화를 관찰하였다. 실험결과 18$^{\circ}C$, 21$^{\circ}C$, 24$^{\circ}C$ 각각의 온도에서 draft를 초래하지 않는 0.15m/sec의 기류속도일 때 가장 높은 MF/(LF+HF) 값을 보여 쾌적한 기류조건으로 나타났고 이는 쾌불쾌감신고(CSV)와 동일한 결과를 나타내었다. 이러한 심전도 신호를 통한 HRV 분석은 기류조건에 따른 온열쾌적성의 평가에도 객관적이고 신뢰성 있는 지표로 제시될 수 있을 것이다. 또한 다른 환경하에서의 감성평가 척도로도 이용될 수 있을 것이라고 생각되어진다.

• Fibers and Polymers
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• v.6 no.1
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• pp.89-94
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• 2005

The purpose of this study is to offer acoustical database of warp knitted fabrics by investigating frictional sound properties and physiological responses according to structural parameters such as construction, lap form, and direction of mutual guide bar movement. Fabric sounds of seven warp knitted fabrics are recorded, and Zwicker's psychoacoustic param­eters - loudness(Z), sharpness(Z), roughness(Z), and fluctuation strength(Z) - are calculated. Also, physiological responses evoked by frictional sounds of warp knitted fabrics are measured such as electroencephalogram (EEG), the ratio of high fre­quency to low frequency (HF/LF), respiration rate (RESP), skin conductance level (SCL), and photoplethysmograph (PPG). In case of constructions, frictional sound of sharkskin having higher loudness(Z) and fluctuation strength(Z) increases RESP. By lap form, open lap has louder and larger fluctuating sound than closed lap, but there aren't significant difference of physi­ological responses between open lap and closed lap. In direction of mutual guide bar movement, parallel direction evokes bigger changes of beta wave than counter direction because of its loud, rough, and fluctuating sound. Fluctuation strength(Z) and roughness(Z) are defined as important factors for predicting physiological responses in construction and mutual guide bar movement, respectively.

• Electronics and Telecommunications Trends
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• v.22 no.3 s.105
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• pp.29-37
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• 2007

RFID 기술은 반도체 기술의 발전과 인터넷의 등장으로 인하여 지난 10여 년 동안 꾸준한 발전을 해왔으며 유통, 물류, 의료, 교육 등 다양한 분야에 적용되고 있다. 이는 향후 수 년 내에 거의 모든 물품에 태그를 부착하게 됨에 따라 유비쿼터스 환경 구축에 큰 기여를 할 것으로 기대된다. 이러한 RFID 기술은 저주파(LF), 고주파(HF), 초고주파(UHF) 및 마이크로파(M/W) 대역의 무선전파를 사용하며 각 대역의 전파 특성에 따라 동물추적, 교통카드, 물품관리, 전자화폐 등 다양한 분야에 선택적으로 적용되고 있으며, 단말기의 형태에 따라 고정형, 휴대형, 모바일 RFID 기술로 분류되고 최근에는 택시안심귀가서비스 등 휴대폰에 RFID 리더 기능이 결합된 모바일 RFID 서비스도 시범서비스를 선보이면서 우리 생활에 파고들고 있다. 또한 항만물류 관리 등과 같이 긴 인식거리가 필요한 능동형 RFID 기술을 포함하여 많은 연구와 실증실험, 시범서비스나 본사업이 이루어지고 있으며 최근에는 파렛, 케이스 단위가 아닌 물품 단위에 태그 부착을 위한 ILT 기술도 속속 선보이고 있다. 본 고에서는 시장전망이 가장 밝은 것으로 알려진 UHF 대역을 중점으로 RFID 기술을 살펴보고 이중에서도 모바일 RFID 기술을 포함한 수동형 RFID 기술, 능동형 RFID 기술 및 이와 관련한 표준화 동향을 알아본다.이를 활용한 응용 시스템에 대하여 간략히 살펴볼 것이다.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.6
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• pp.811-817
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• 2013

In this study we present a system for pulse-rate period detection and human sensibility evaluation based on the wireless medical telemetry service (WMTS) used for transmission of data from medical telemetry devices to various medical facilities and services. We develop a medical-purpose specific WMTS communication module to transmit biometric signals. From the pulse rate variability(PRV) signal, we attempt to classify positive and negative emotional states based on analysis of the ratio of LF/HF in the frequency domain. We measure the data reception rate according to distance in order to test the performance of the WMTS module and analyze the effects on human sensibility evaluation.