• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.98-99
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• 2012

Deposition of thin films using magnetron sputtering plasmas is a well-developed, classical technology. However, detailed investigations using advanced diagnostics are insufficient in magnetron sputtering, in comparison with plasma-aided dry etching and plasma-enhanced chemical vapor deposition. In this talk, we will show examples of diagnostic works on magnetron sputtering employing metal targets. Diagnostic methods which have fine spatial resolutions are suitable for magnetron sputtering plasmas since they have significant spatial distributions. We are using two-dimensional laser-induced fluorescence spectroscopy, in which the plasma space is illuminated by a tunable laser beam with a planer shape. A charge-coupled device camera with a gated image intensifier is used for taking the picture of the image of laser-induced fluorescence formed on the planer laser beam. The picture of laser-induced fluorescence directly represents the two-dimensional distribution of the atom density probed by the tunable laser beam, when an intense laser with a relatively wide line-width is used. When a weak laser beam with a relatively narrow linewidth is used, the laser-induced fluorescence represents the density distribution of atoms which feel the laser wavelength to be resonant via the Doppler shift corresponding to their velocities. In this case, we can obtain the velocity distribution function of atoms by scanning the wavelength of the laser beam around the line center.

• 한국레이저가공학회지
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• 제18권4호
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• pp.17-22
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• 2015

In this paper, ablation rate of $Al_2O_3$ ceramics by femtosecond laser fluence is derived with experimental method. The automatic three axis linear stage makes laser optics to move with high spatial resolution. With 10 times objective lens, minimal pattern width of $Al_2O_3$ is measured in the focal plane. Ablated surface area is shown as linear tendency increasing number of machining times with various laser power conditions. Machining times is most sensitive condition to control $Al_2O_3$ pattern width. Also, the linear increment of pattern width with laser power change is investigated. In high machining speed, the ablation volume rate is more linear with fluence because pulse overlap is minimized in this condition. Thermal effect to surrounding medium can be minimized and clean laser process without melting zone is possible in high machining speed. Ablation volume rate decelerates as increasing machining times and multiple machining times should be considered to achieve proper ablation width and depth.

• 한국레이저가공학회지
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• 제12권1호
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• pp.19-24
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• 2009

Because of its fast and precise welding performance, laser welding is becoming a new excellent welding method. However, the precise focusing and robust seam tracking are required to apply laser welding to the practical fields. In order to laser weld a type of T joint like a circular pipe on a square pipe, which could be met in the three dimensional structure such as an aluminum space frame, a visual sensor system was developed for automation of focusing and seam tracking. The developed sensor system consists of a digital CCD camera, a structured laser, and a vision processor. It is moved and positioned by a 2-axis motorized stage, which is attached to a 6 axis robot manipulator with a laser welding head. After stripe-type structured laser illuminates a target surface, images are captured through the digital CCD camera. From the image, seam error and defocusing error are calculated using image processing algorithms which includes efficient techniques handling continuously changed image patterns. These errors are corrected by the stage off-line during welding or teaching. Laser welding of a circular pipe on a square pipe was successful with the vision tracking system by reducing the path positioning and de focusing errors due to the robot teaching or a geometrical variation of specimens and jig holding.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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• pp.128-132
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• 2006

Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355nm and 80MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow rate, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repetition rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20{\mu}m$ and $10{\mu}m$ at more than 500mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed of laser material process.

• 반도체디스플레이기술학회지
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• 제5권3호
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• pp.5-10
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• 2006

This paper investigates cutting qualities after laser dicing and predicts the problems that can be generated by laser dicing. And through 3 point bending test, die strength is measured and the die strength after laser dicing is compared with the die strength after mechanical sawing. Laser dicing is chiefly considered as an alternative to overcome the defects of mechanical sawing such as chipping on the surface and crack on the back side. Laser micromachining is based on the thermal ablation and evaporation mechanism. As a result of laser dicing experiments, debris on the surface of wafer is observed. To eliminate the debris and protect the surface, an experiment is done using a water soluble coating material and ultrasonic. The consequence is that most of debris is removed. But there are some residues around the cutting line. Unlike mechanical sawing, chipping on the surface and crack on the back side is not observed. The cross section of cutting line by laser dicing is rough as compared with that by mechanical sawing. But micro crack can not be seen. Micro crack reduces die strength. To measure this, 3 point bending test is done. The die strength after laser dicing decreases to a half of the die strength after mechanical sawing. This means that die cracking during package assembly can occur.

• Current Optics and Photonics
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• 제2권4호
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• pp.356-360
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• 2018

We demonstrate continuous-wave operation of an all-fiber thulium-holmium codoped laser operating at a wavelength of 1706.3 nm. To realize laser operation in the short-wavelength region of the emission-band edge of thulium in silica fiber, we employ fiber Bragg gratings having resonant reflection at a wavelength around 1700 nm as a wavelength-selective mirror in an all-fiber cavity scheme. We first examine the performance of the laser by adjusting the central wavelength of the in-band pump source. Although a pump source possessing a longer wavelength is observed to provide reduced laser threshold power and increased slope efficiency, because of the characteristics of spectral response in the gain fiber, we find that the optimal pump wavelength is 1565 nm to obtain maximum laser output power for a given system. We further explore the properties of the laser by varying the fiber gain length from 1 m to 1.4 m, for the purpose of power scaling. It is revealed that the laser shows optimal performance in terms of output power and slope efficiency at a gain length of 1.3 m, where we obtain a maximum output power of 249 mW for an applied pump power of 2.1 W. A maximum slope efficiency is also estimated to be 23% under these conditions.

• Journal of Welding and Joining
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• 제35권2호
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• pp.13-22
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• 2017

In laser full penetration welding process, full penetration hole(FPH) is formed as a result of force balance between the vapor pressure and the surface tension of the surrounding molten metal. In this work, a three-dimensional numerical model based on a conserved-mass level-set method is developed to simulate the transport phenomena during laser full penetration welding process, including full penetration keyhole dynamics. Ray trancing model is applied to simulate multi-reflection phenomena in the keyhole wall. The ghost fluid method and continuum method are used to deal with liquid/vapor interface and solid/liquid interface. The effects of processing parameters including laser power and scanning speed on the resultant full penetration hole diameter, laser energy distribution and energy absorption efficiency are studied. The model is validated against experimental results. The diameter of full penetration hole calculated by the simulation model agrees well with the coaxial images captured during laser welding of thin stainless steel plates. Numerical simulation results show that increase of laser power and decrease of welding speed can enlarge the full penetration hole, which decreases laser energy efficiency.

• 대한의용생체공학회:의공학회지
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• 제32권3호
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• pp.270-277
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• 2011

Laser cartilage reshaping(LCR) is a promising method for reshaping cartilage by using laser irradiation to maintain permanently modifies its shape. However this method has not been fully understood due to the limited scientific researches. The purpose of this study is to analyze optical and thermal characteristics of cartilage during laser irradiation. After analyzing Monte Carlo simulation for the comparison of laser fluence distributions with different laser wavelengths the characterization of the spectral changes during Nd:YAG laser(${\lambda}$ = 1444 nm) irradiation was investigated in the ranges of 900-1700 nm with double integrating spheres. The surface temperature distribution changes during laser irradiation were investigated with an infrared camera. The quantitative measurements of optical and thermal characteristics in cartilage after laser irradiation were correlated with the transition of water flux(from bound to free water) and this study may be useful for better understanding of biophysical transformation phenomena in cartilage after laser heating.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.1015-1016
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• 2006

The important parameters deciding the fluctuation of Accumulation style surgical operation of ventriculus laser beam are smoothing capacitor, frequency and he characteristics of laser resonator. In this thesis, we control the fluctuation of medical $CO_2C$ laser in realtime by changing Duty-Ratio of IGBT and switching frequency with fixed the smoothing capacitor to improve the fluctuation of laser beam. We detect the light on laser resonator using a CdS photo sensor to improve ripple factor of laser beam and feedback fluctuated signals refined by a band pass filter into the control circuit to stabilize fluctuation actively. There is much to be desired in the realtime controlling technique of the light on Accumulation style surgical operation of ventriculus laser discharge tube in electrical signal. We propose switching control technique with microprocessor and photo sensing technique by controlling switch devices optimum operation and feedback signals detected by a photo sensor into the laser power supply in order to improve ripple factor of the $CO_2$ laser beam.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2017년도 제48회 춘계학술대회논문집
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• pp.872-876
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• 2017

금속 소재부품의 제조 형태가 복잡해지고 소비자의 요구가 다양함에 따라 금속 3D 프린팅 연구가 활발히 진행되고 있다. 본 연구에서는 우주 발사체의 엔진 연소 노즐 부품에 적용 가능한 스테인레스 316L계 금속을 3D 프린팅 방식으로 제조하고 이에 대한 기계적, 화학적 특성 상관 연구를 진행하였다. 금속 3D 프린팅 기술은 레이저원을 이용하여 분말을 급속 용융과 응고를 반복됨에 따라 기존의 주조 응고와는 다른 미세 조직 형태를 나타내고, 이에 따라 기계적 물성이 변화함을 관찰하였다. 특히 개재물의 존재에 따라 기계적 특성이 변화하고 공정 조건의 변화에 따라 기공의 형태 및 위치등이 변화하는 것을 확인하였다.