• Title/Summary/Keyword: KrF excimer laser

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Radiation Effects on Fiber Bragg Grating Sensors by Irradiation Conditions of UV Laser (UV 레이저 노출조건에 따른 FBG 센서의 방사선 영향)

  • Kim, Jong-Yeol;Lee, Nam-Ho;Jung, Hyun-Kyu
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.12
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    • pp.2310-2316
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    • 2016
  • We studied the effect of $Co^{60}$ gamma-radiation on the fiber Bragg gratings (FBGs) by irradiation time of UV Krypton fluoride (KrF) excimer laser among grating processing parameters. The FBGs were fabricated in a different UV laser irradiation time at 30, 60, 90, and 120 seconds using the same commercial Ge-doped silica core fiber (SMF-28e). It was exposed to gamma-radiation up to a high dose of 34.3 kGy at the dose rate of 106 Gy/min, and then it was analyzed radiation effects by measuring the radiation-induced change in the temperature sensitivity coefficient and Bragg wavelength shift. According to the experimental results, We confirmed that the UV laser irradiation period for grating inscription has a highly effect on the radiation sensitivity of the FBGs. The radiation-induced Bragg wavelength shift by the change of laser irradiation conditions showed a difference more than about 50 %.

Planar measurements of OH and $O_{2}$ number density in premixed $C_{3}$H$_{8}$O$_{2}$ flame using laser induced pre-dissociative fluorescence (레이저 유도 선해리 형광법(LIPE)을 이용한 화염내 OH 및 $O_{2}$ 분자의 2차원 농도 분포 측정)

  • Jin, Seong-Ho;Nam, Gi-Jung;Kim, Hoi-San;Chang, Nae-Kak;Park, Seung-Han;Kim, Ung;Park, Kyoung-Suk;Shim, Kyoung-Hoon;Kim, Gyung-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.12
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    • pp.4044-4052
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    • 1996
  • Planar images of OH and $O_{2}$ with tunable KrF excimer laser which has a) 0.5 $cm^{-1}$ / linewidth, b) 0.5 nm tuning range, c) 150 mJ pulse energy, and d) 20 ns pulse width are obtained to determine spatial distributions of OH and $O_{2}$ in premixed $C_{3}$H$_{8}$ /O$_{2}$ flame. The technique is based on planar laser induced pre-dissociative fluorescence(PLIPF) in which collisional quenching is almost avoided because of the fast pre-dissociation. Dispersed LIPF spectra of OH and $O_{2}$ are also measured in a flame in order to confirm the excitation of single vibronic state of OH and $O_{2}$, OH and $O_{2}$ are excited on the P$_{2}$(8) line of the $A^{2}$.SIGMA.$^{+}$(v'= 3)-X$^{2}$.PI.(v'||'||'&'||'||'quot;= 0) band and R(17) line of the Schumann-Runge band B$^{3}$.SIGMA.$_{u}$ $^{[-10]}$ (v'= 0)- X$^{3}$.SIGMA.$_{g}$ $^{[-10]}$ (v'||'||'&'||'||'quot;= 6), respectively. Dispersed OH and $O_{2}$ spectra show an excellent agreement with simulated spectrum and previous works done by other group respectively. It is confirmed that OH widely distributed around flame front area than $O_{2}$.

Planar Imaging of Temperature and Concentration of a Laminar Nonpremixed $H_2$/$N_2$flame Using a Tunable KrF Excimer Laser (파장 가변형 KrF 에시머 레이저를 이용한 층류 비예혼합 수소 화염에서의 2차원적 온도 및 농도 계측)

  • Kim, Gun-Hong;Jin, Seong-Ho;Kim, Yong-Mo;Park, Gyeong-Seok;Kim, Se-Won;Kim, Gyeong-Su
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.24 no.12
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    • pp.1580-1587
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    • 2000
  • Rayleigh scattering and laser induced predissociative fluorescence are employed for capturing two-dimensional images of temperature and species concentration in a laminar nonpremixed flame of a diluted hydrogen jet. Rayleigh scattering cross-sections are experimentally obtained ar 248nm. Dispersed LIPF spectra of OH and O$_2$ are also measured in a flame in order to confirm the excitation of single vibronic state of OH and O$_2$ .OH and O$_2$ are excited on the P$_1$(8) line of the A $^2\Sigma ^+(v^`=3) - X^2\pi (V^"=0)$ band and R(17) line of the Schumann-Runge band B $^3\Sigma _u^-(v^`=0) - X ^3\Sigma _g^-(v^"=6)$, respectively. Fluorescence spectra of OH and Hot O$_2$ are captured and two-dimensional images of the hydrogen flame field are successfully visualized.

LASER ABLATION OF Bi-SUBSTITUTED GADOLINIUM IRON GARNET FILMS WITH LARGE FARADAY ROTATION

  • Watanabe, N.;Tsushima, K.
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.720-725
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    • 1995
  • Bi-substituted gadolinium iron garnet films were deposited on GGG(111) and NGG (111) substrates by irradiating KrF excimer laser onto targets having compositions of $Bi_{x}Gd_{3-x}Fe_{5}O_{12}$ ($2.0{\leq}x{\leq}3.0$) under substrate temperature of $580~620^{\circ}C$. Analysis on structure, composition and angle of Faraday rotation, ${\theta}_{F}$, were carried out. The composition, the structure and the magneto-optical properties of the obtained films were found to be strongly dependent both on the compositions of the targets and on the pressure of oxygen. Before annealing in air, all films showed ${\theta}_{F}{\geq}0$ at ${\lambda}=6328{\AA}$, while several films showed ${\theta}_{F}{\leq}0$ after the annealing. The highest value of Bi-substitution up to x = 1.76 with uniform composition was obtained.

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Micro-drilling of Fused Silica by Laser Induced Wet Etching (레이저습식각을 이용한 용융실리카의 미세구멍가공)

  • Baek, Byeong-Seon;Lee, Jong-Kil;Jeon, Byung-Hee
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1344-1348
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    • 2003
  • It is generally known to be difficult to etch a surface of a transparent material such as fused silica by conventional laser ablation in which the surface is simply irradiated with a laser beam. A lot of studies have been done to provide a method capable of efficiently etching transparent materials without defects such as cracks. One of the promising methods or the micro-machining of optically transparent materials is laser induced etching. In this study, micro-drilling of fused silica by laser induced wet etching was conducted. KrF excimer and YAG laser were used as light sources. Acetone solution pyrene and ethanol solution of rhodamine were used as etchant.

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Nanosecond Laser Sintering Process for Fabricating ITO film (ITO 박막 형성을 위한 나노초 레이저 소결 공정)

  • Park, Taesoon;Kim, Dongsik
    • Laser Solutions
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    • v.17 no.1
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    • pp.13-16
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    • 2014
  • Indium Tin Oxide (ITO) has been used widely for transparent conducting thin films. In this work, the feasibility of a laser sintering process to fabricate ITO thin films on flexible substrates is examined. Nanoparticles of ~10 nm were spin coated on a Si wafer and then sintered by a KrF excimer laser. The sintered structure was characterized by scanning electron microscopy. Polycrystalline structures were fabricated by the process without thermally damaging the substrate. The electrical resistivity of the film was reduced to ~ 1/1000 of the initial value. This work demonstrates that nanosecond laser sintering of ITO particles can be a useful tool to fabricate ITO films on various flexible substrates.

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Growth of oriented $LaF_{3}$ thin films on Si (100) substrates by the pulsed laser deposition method

  • Yokotani, Atsushi;Ito, Tomomi;Sato, Akiko;Kurosawa, Kou
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.13 no.4
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    • pp.157-164
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    • 2003
  • $LaF_{3}$ thin films have been fabricated on Si (100) substrates under the highest possible vacuum condition by pulsed laser deposition (PLD) method. The temperature of the sbustrate varied from $20^{\circ}C$ to $800^{\circ}C$. The films deposited at the higher temperature indicated the sharper peaks in the X-ray diffraction measurement. A highly oriented film was successfully obtained at a substrate temperature of $800^{\circ}C$. The surface observation by the AFM revealed that the many hexagonal structures constructed the film. The XPS analysis revealed that the lacking of F in the film deposited at $600^{\circ}C$ were much more than that in film at $^20{\circ}C$. Adding the adequate amount of $CF_{4}$ gas in the growth chamber can compensate this lacking of F.

PLC-Type WDM directional coupler and the effect of wavelength shift by UV irradiation (PLC형 WDM 방향성 결합기와 UV 조사에 의한 파장 천이 효과)

  • 한상필;박태상;최영복;강민정;김상인;박수진;정기태
    • Korean Journal of Optics and Photonics
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    • v.11 no.1
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    • pp.33-36
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    • 2000
  • KrF excimer laser, which is useful for fabrication of fiber gratings, was irradiated on the PLC-type WDM directional coupler and the transmission wavelength shift was observed as a function of UV exposure time. The effective refractive index change of rectangular silica waveguide was calculated from the wavelength shift measurement and the coupled mode theory. heory.

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웨이퍼 스텝퍼에서의 기준정렬을 위한 2차원 버니어 패턴의 성능예측

  • 이종현;장원익;최부연;장기호;김도훈;유형준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.10a
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    • pp.243-248
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    • 1993
  • New methodology for fiducial alignment is proposed to improve the alignment accuracy in wafer steppers. The positioning error is detected by PSD(Position Sensitive Detector)when 2-dimensional vernier patterns on a reticle on a reticle are projected on the fiducial marks of wafer stage. The width and period of vernier patterns are deter mined to get the highest S/N ratio for the exposure wavelength 248.4nm of KrF excimer laser. This new method has an advantage of higher accuracy and faster alignment over the conventional one.

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Four-mirror optical system for UV submicron lithography (서브미크론 리소그라피를 이한 4 반사광학계의 설계)

  • 박성찬
    • Proceedings of the Optical Society of Korea Conference
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    • 1991.06a
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    • pp.81-87
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    • 1991
  • A design of a four-mirror optical system for submicron lithography using KrF excimer laser beam(λ=248nm) is presented. By using the third order aberration theory, analytic solutions for a telecentric, flat-field, and anastigmatic four-spherical-mirror system (reduction magnification 5$\times$) are found. Aspherization is carried out to the spherical mirror surfaces in order to reduce the residual higher order aberrations and vignetting effect. Finally we obtain a reflection system useful in submicron lithographic application.

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