• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1857-1860
• /
• 2003

The ablative decomposition mechanism of PMMA(polymethyt methacrylate), PET(polyethylene terephthalate) and PC(polycarbonate) with KrF excimer laser(λ: 248nm, pulse duration: 5ns) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET, PC are a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET, PC are dominated by photochemical process.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.147.1-147.1
• /
• 2016

Hydrophobic thin films are variously applicable for encapsulation of organic devices and water repulsive glass, etc. In this work, the stability of hydrophobic characteristics of plasma polymerized tetrakis (trimethylsilyloxy) silane (ppTTMSS) thin films were investigated. The films were deposited with plasma enhanced chemical vapor deposition (PECVD) on the glass. The deposition plasma power and deposition pressure was 70 W and 600 mTorr, respectively. Thereafter, deposited films were treated by 248nm KrF excimer laser. Stability of hydrophobic properties of plasma polymerized tetrakis(trimethylsilyloxy)silane film surface was tested by excimer laser irradiation, which is thought to simulate severe outdoor conditions. Excimer laser irradiation cycles changed from 10 to 200 cycles. The chemical structure and hydrophobicity of ppTTMSS films were analyzed by using Fourier transform infrared (FTIR) spectroscopy and water contact angle (WCA) measurement, respectively. Absorption spectra peaks and WCA of excimer laser treated ppTTMSS films did not change notably. These results show that our ppTTMSS films possess stable hydrophobic properties.

• Proceedings of the KSME Conference
• /
• 2002.08a
• /
• pp.353-356
• /
• 2002

Planar laser induced fluorescence(PLIF) has been widely used to obtain two dimensional fuel distribution. Preliminary investigation was performed to measure quantitative air excess ratio distribution in an engine fueled with LPG. It is known that fluorescence signal from acetone as a fluorescent tracer is less sensitive to oxygen quenching than other dopants. Acetone was excited by KrF excimer laser (248nm) and its fluorescence image was acquired by ICCD camera with a cut-of filter to suppress Mie scattering from the laser light. For the purpose of quantifying PLIF signal, an image processing method including the correction of laser sheet beam profile was suggested. Raw images were divided by each intensity of laser energy and profile of laser sheet beam. Inhomogeneous fluorescence images scaled with the reference data, which was taken by a calibration process, were converted to air excess ratio distribution. This investigation showed instantaneous quantitative measurement of planar air excess ratio distribution for gaseous fuel.

• 한국초전도학회:학술대회논문집
• /
• v.9
• /
• pp.43-47
• /
• 1999

Instead of using KrF excimer lasers( ${\lambda}$ = 248 nm) in depositing oxide thin films, as in the most of the laboratories in Korea, we have used an ArF excimer laser( ${\lambda}$ = 197 nm) which has a shorter wavelength. By using a beam which has a shorter wavelength, we could obtain higher quality and smoother surface YBCO thin films. We fabricated YBCO thin films with the various substrate temperature conditions and analyzed the characteristics of these films. We also studied the charateristics of the films fabricated under the various conditions of the power of laser and the oxygen pressure. The characterization tools used in this work were a transport measurement setup, an XRD , and a SEM. We also fabricated STO/YBCO multilayers to use in SFQ devices fabrication. XRD patterns of the multilayers showed that the multilayer films were grown epitaxially.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2001.05a
• /
• pp.349-352
• /
• 2001

In this paper, novel device structure in order to realize ultra fast and ultra small silicon devices are investigated using ultra-high vacuum chemical vapor deposition(UHVCVD) and Excimer Laser Annealing (ELA) for ultra pn junction formation. Based on these fundamental technologies for the deep sub-micron device, high speed and low power devices can be fabricated. These junction formation technologies based on damage-free process for replacing of low energy ion implantation involve solid phase diffusion and vapor phase diffusion. As a result, ultra shallow junction depths by ELA are analyzed to 10~20 nm for arsenic dosage (2$\times$10$^{14}$ $\textrm{cm}^2$), excimer laser source(λ=248nm) is KrF, and sheet resistances are measured to 1k$\Omega$/$\square$ at junction depth of 15nm.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.25 no.10
• /
• pp.1311-1317
• /
• 2001

To investigate only the effects of the stratified mixture distribution on initial flame propagation and combustion characteristics, the instantaneous equivalence ratio in the spark plug gap and combustion pressure were measured simultaneously In a constant volume chamber, To induce the stratified propane-air mixture distribution near the spark plug, counter-flow typed mixture injection system was used under the constant mean equivalence ratio $\Phi$$\_$mean/= 1.0 The instantaneous equivalence ratio was measured by a single-shot Raman scattering with narrow-band KrF excimer laser. The measuring error was within the limit of $\pm$ 3.5% provided that the proposed method was applied to the measured Raman signals. Judging from mass fraction burned derived from the measured pressure, the optimum combustion characteristics were shown under the condition that the local equivalence ratio in the spark plug was near 1.28$\pm$0.04, and these characteristics were more remarkable at the initial stage of combustion.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 1999.11a
• /
• pp.58-63
• /
• 1999

In order to analyze the discharge-pumped KrF excimer laser, computer simulation code is developed. On the other hand, the electron velocity distribution in a discharge plasma, measured by the Thomson scattering method, showed the Maxwellian, while the code predicted non-Maxwellian. This disagreement was solved by introducing the electron-electron collision into the simulation code. We also developed a simulation code on the CO2 laser-heated plasma in high-pressure Ar gas, and estimated the formation process of Ar2 excimer. The code predicted the possibility of the Ar2 laser action at 126 nm.

• Laser Solutions
• /
• v.13 no.1
• /
• pp.1-5
• /
• 2010

ln this work, the feasibility of using a UV laser for micromachining of powder injection molded parts is examined experimentally. The results, although preliminary, indicate that microfabrication of various parts by laser micromachining of the injection molded parts and then sintering is promising. Particularly, micromachining of a mixture composed of stainless steel particles and polyrner binders was studied using a KrF excimer laser.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.11a
• /
• pp.748-751
• /
• 2000

Microlens made by laser radiation method have advantages in the easiness of their fabrication. The process is based on the projection of a chromium-on-quartz reticle on to the Polymer using a pulsed 248nm KrF excimer laser. Fabrication process is a fluence-dependent rate and density. The lens shape is defined by a rotationally symmetric sluence distribution with smooth radial variation in the image plane of the reticle. A typical lens of 50㎛ diameter was fabricated by irradiating 2000 laser pulses within 40 seconds. The experimental results show microlens fabrication by UV laser is possible and well worth studying further.

• Proceedings of the KIEE Conference
• /
• 1996.11a
• /
• pp.251-253
• /
• 1996

High temperature superconducting (HTS) target has been irradiated by excimer laser beam. The surface of HTS target has been changed and showed the formation of cones. The laser ablated HTS target surface has been systematically studied using a scanning electron microscope. A KrF excimer laser with a wavelength of 248 nm was used to ablate the HTS YBCO target. The size of laser beam focused on the target showed a rectangular shape of $9.7{\times}2\;mm^2$. The image of SEM shows the difference between the shapes of cones fanned at the boundary and at the center of the ablated area after 1,000 laser pulses.