• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.7
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• pp.1680-1686
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• 2010

Optical fiber Bragg grating to have the lowest transmitivity at 1549.9nm wavelength was fabricated using a Gaussian distributed KrF Eximer laser of 248nm lasing wavelength and a phase mask of 1.072um period. The proper alignment of an optic setup to fabricate fiber gratings was investigated and the reproductivity of the grating fabrication was examined using the obtained optimum fabrication condition in this experiment.

• Journal of Advanced Marine Engineering and Technology
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• v.20 no.5
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• pp.93-102
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• 1996

Laser-induced plume and laser-target interaction during pulsed laser deposition are demonstrated for a lead zirconate titanate (PZT). A KrF excimer laser (wavelength 248nm) was used and the laser was pulsed at 20Hz, with nominal pulse width of 20ns. The laser fluence was~$16J/cm^2,$ with 100mJ per pulse. The laser-induced plasma plume for nanosecond laser irradiation on PZT target has been investigated by optical emission spectra using an optical multichannel analyzer(OMA) and by direct observation of the plume using an ICCD high speed photography. OMA analysis showed two distinct ionic species with different expansion velocities of fast or slow according to their ionization states. The ion velocity of the front surface of the developing plume was about $10^7$cm/sec and corresponding kinetic energy was about 100eV. ICCD photograph showed another kind of even slower moving particles ejected from the target. These particles considered expelled molten parts of the target. SEM morphologies of the laser irradiated targets showed drastic melting and material removal by the laser pulse, and also showed the evidence of the molten particle ejection. The physics of the plasma(plume) formation and particle ejection has been discussed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2001.05a
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• pp.349-352
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• 2001

In this paper, novel device structure in order to realize ultra fast and ultra small silicon devices are investigated using ultra-high vacuum chemical vapor deposition(UHVCVD) and Excimer Laser Annealing (ELA) for ultra pn junction formation. Based on these fundamental technologies for the deep sub-micron device, high speed and low power devices can be fabricated. These junction formation technologies based on damage-free process for replacing of low energy ion implantation involve solid phase diffusion and vapor phase diffusion. As a result, ultra shallow junction depths by ELA are analyzed to 10~20 nm for arsenic dosage (2$\times$10$^{14}$ $\textrm{cm}^2$), excimer laser source(λ=248nm) is KrF, and sheet resistances are measured to 1k$\Omega$/$\square$ at junction depth of 15nm.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.8
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• pp.1791-1796
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• 2011

An optical fiber short period grating of 0.7 nm as a 3 dB wavelength linewidth was fabricated using a Gaussian distributed KrF Eximer laser and a phase mask. This grating has temperature dependancy of 0.01 nm/$^{\circ}C$ over the range of -10 $^{\circ}C$ ~ 70 $^{\circ}C$and no difference between temperature directions. An optical fiber long period grating of 14.22 nm as a 3 dB linewidth was also fabricated using a amplitude mask and has dependancy of 0.01 nm/$^{\circ}C$ over the same range.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.12
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• pp.1582-1582
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• 2000

Rayleigh scattering and laser induced predissociative fluorescence are employed for capturing two-dimensional images of temperature and species concentration in a laminar nonpremixed flame of a diluted hydrogen jet. Rayleigh scattering cross-sections are experimentally obtained at 248nm. Dispersed LIPF spectra of OH and O₂ are also measured in a flame in order to confirm the excitation of single vibronic state of OH and O₂are excited on the P₁(8) line of the A ²∑+ (v＇=3) - X ²∏(v˝=0) band and R(17) line of the Schumann-Runge band B ³∑u- (v＇=0) - X ³∑g-∏(v˝=6), respectively. Fluorescence spectra of OH and Hot O₂ are captured and two-dimensional images of the hydrogen flame field are successfully visualized.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.10
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• pp.1311-1317
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• 2001

To investigate only the effects of the stratified mixture distribution on initial flame propagation and combustion characteristics, the instantaneous equivalence ratio in the spark plug gap and combustion pressure were measured simultaneously In a constant volume chamber, To induce the stratified propane-air mixture distribution near the spark plug, counter-flow typed mixture injection system was used under the constant mean equivalence ratio $\Phi$$\_$mean/= 1.0 The instantaneous equivalence ratio was measured by a single-shot Raman scattering with narrow-band KrF excimer laser. The measuring error was within the limit of $\pm$ 3.5% provided that the proposed method was applied to the measured Raman signals. Judging from mass fraction burned derived from the measured pressure, the optimum combustion characteristics were shown under the condition that the local equivalence ratio in the spark plug was near 1.28$\pm$0.04, and these characteristics were more remarkable at the initial stage of combustion.

• Journal of the Korean Vacuum Society
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• v.17 no.5
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• pp.455-460
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• 2008

In recent years, there has been highly interestedin pulsed laser deposition (PLD) method for fabrication of the organic thin films, as an alternative to conventional fabrication method such as vacuum evaporation and spin coating techniques. In this study, organic thin films of $Alq_3$ (aluminato-tris-8-hydroxyquinolate) and TPD for organic light emitting diodes (OLED) were deposited by PLD using KrF excimer ($\lambda$=278 nm) laser in nitrogen atmosphere. Deposited films were evaluated by photoluminescence(PL), Fourier-transform Infrared Spectroscopy (FT-IR) to study the effect of the laser and $N_2$ atmosphere parameters on the structural and optical properties.

• Transactions of the Korean Society of Automotive Engineers
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• v.2 no.4
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• pp.91-99
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• 1994

Tunable KrF Excimer Laser is used here for measuring OH and $O_2$ density distribustion in an open $H_2$/air premixed flame and in a combustion bomb. Laser Rayleigh Scattering(LRS) and Planar Laser Induced Predissociative Fluorescence(PLIPF) methods are used to obtain two-dimensional images of total and specific densities. Laser Excitation wavelengths are calibrated via flame images and combustion bomb images show good qualitative a greement with theoretical calculation. Furthermore images in a combustion bomb can be developed to study real Spark-Ignition engine combustions. Our experimental images show that there are no more collisional quenching problem at high pressure environment(including atmospheric pressure) using predissociative fluorescence technique. Further development to obtain two-dimensional temperature dustribution is ready to use eventhough it is not reported in this paper.

• Korean Journal of Optics and Photonics
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• v.4 no.4
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• pp.373-380
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• 1993

A five mirror system with a reduction magnification(M=+1/5) is designed for DUV optical lithography. Initially, numerical solutions of all zero 3rd order aberrations and zero 5th order spherical aberration are obtained for the spherical mirror system. Next, by the optimization method, the aspherization is carried out to the two spherical mirrors to obtain a system that has as less residual aberrations, higher NA and improved MTF as possible. We have finally obtained the system of which NA is 0.45 and the resolution is about 500 cycles/mm at the 50% MTF value criterion and the depth of focus of $1.0{\mu}m$ for the nearly incoherent illumination$({\sigma}=1.0)$ and the wavelength of 0.248 m(KrF excimer laser line).

• Korean Journal of Optics and Photonics
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• v.4 no.3
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• pp.252-259
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• 1993

A holosymmetric four-mirror system with unit magnification is designed for use in the micro-lithography using a deep ultraviolet wavelength of $0.248 {\mu}m$(KrF excimer laser line). In the holosymmetric system all orders of coma and distortion are zero. By applying this principle to the 4-spherical mirror system, we have obtained only one exact solution for the unit magnification holosymmetric four-spherical mirror system with all zero third order aberrations. For correction of the residual higher order aberrations of the system, aspherization is introduced keeping the holosymmetric properties. We have obtained near diffraction-limited performance for the wavelength of 0.248 pm within N.A. of 0.33 and image field diameter of 7.6 mm.