• Title/Summary/Keyword: KrF

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Output Characteristics of KrF Excimer Laser Pumped $H_2/D_2$ Raman Laser (KrF 엑시머 레이저 펌핑 $H_2/D_2$ 라만레이저의 출력 특성)

  • 이용우
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2003.10a
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    • pp.423-427
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    • 2003
  • In this paper, we have investigated the output characteristics of the Stokes Raman laser in hydrogen, deuterium, and their mixed gases as a function of the incident pump energy and gas pressure using KrF excimer laser as pumping source for generating the differential absorption lidar (DIAL) wavelengths suitable in measuring the ozone concentration of the troposphere. The optimization results of compact excimer-Raman laser transmitter in DIAL system for the tropospheric ozone sounding at the 292 nm/319 m and 292 nm/313 nm wavelength pairs are presented. for the ozone sounding in the 4-12 km range, it has been demonstrated that the design of transmitter for DIAL lidar may be significantly simplified by the use of 292 nm/319 nm wavelength pair. The investigations of Raman scattering in the mixture of hydrogen and deuterium gases have shown that such mixture may be efficiently used for developing the multi- wavelength light sources for DIAL systems.

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The ablation of ITO thin films by KrF Eximer laser and its characteristics (KrF 엑시머 레이저에 의한 ITO 박막의 어블레이션과 표면특성관찰)

  • Lee, Kyoung-Cheol;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.511-514
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    • 2000
  • This work aimed to develop ITO (Indium Tin Oxide) thin films ablation with a KrF Eximer laser required for the application in flat panel display, especially patterning into small geometry on a large substrate area. The threshold fluence for ablating ITO on glass substrate is about 0.1 J/cm$^2$. And its value is much smaller than using third harmonic Nd:YAG laser. Through the optical microscope measurement the surface color of the damaged ITO is changed into dark brown and irradiated spot is completely isolated form the undamaged surroundings by laser light. The XPS analysis showed that the relative surface concentration of Sn and In were essentially unchanged (In :Sn=5:1) after irradiating Eximer laser. Using aluminium mask made by second harmonic Nd:YAG laser the ITO patterning is carried out.

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THE KRONECKER FUNCTION RING OF THE RING D[X]N*

  • Chang, Gyu-Whan
    • Bulletin of the Korean Mathematical Society
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    • v.47 no.5
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    • pp.907-913
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    • 2010
  • Let D be an integrally closed domain with quotient field K, * be a star operation on D, X, Y be indeterminates over D, $N_*\;=\;\{f\;{\in}\;D[X]|\;(c_D(f))^*\;=\;D\}$ and $R\;=\;D[X]_{N_*}$. Let b be the b-operation on R, and let $*_c$ be the star operation on D defined by $I^{*_c}\;=\;(ID[X]_{N_*})^b\;{\cap}\;K$. Finally, let Kr(R, b) (resp., Kr(D, $*_c$)) be the Kronecker function ring of R (resp., D) with respect to Y (resp., X, Y). In this paper, we show that Kr(R, b) $\subseteq$ Kr(D, $*_c$) and Kr(R, b) is a kfr with respect to K(Y) and X in the notion of [2]. We also prove that Kr(R, b) = Kr(D, $*_c$) if and only if D is a $P{\ast}MD$. As a corollary, we have that if D is not a $P{\ast}MD$, then Kr(R, b) is an example of a kfr with respect to K(Y) and X but not a Kronecker function ring with respect to K(Y) and X.

KRONECKER FUNCTION RINGS AND PRÜFER-LIKE DOMAINS

  • Chang, Gyu Whan
    • Korean Journal of Mathematics
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    • v.20 no.4
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    • pp.371-379
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    • 2012
  • Let D be an integral domain, $\bar{D}$ be the integral closure of D, * be a star operation of finite character on D, $*_w$ be the so-called $*_w$-operation on D induced by *, X be an indeterminate over D, $N_*=\{f{\in}D[X]{\mid}c(f)^*=D\}$, and $Kr(D,*)=\{0\}{\cup}\{\frac{f}{g}{\mid}0{\neq}f,\;g{\in}D[X]$ and there is an $0{\neq}h{\in}D[X]$ such that $(c(f)c(h))^*{\subseteq}(c(g)c(h))^*$}. In this paper, we show that D is a *-quasi-Pr$\ddot{u}$fer domain if and only if $\bar{D}[X]_{N_*}=Kr(D,*_w)$. As a corollary, we recover Fontana-Jara-Santos's result that D is a Pr$\ddot{u}$fer *-multiplication domain if and only if $D[X]_{N_*} = Kr(D,*_w)$.

엑시머 레이저 스탭퍼 개발

  • 정해빈;이각현;김도훈;이종현;유형종
    • Proceedings of the Optical Society of Korea Conference
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    • 1995.06a
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    • pp.68-74
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    • 1995
  • 한국전자통신연구소에서 개발된 바 있는 KrF 엑시머 레이저 스탭퍼의 개발 과정과 그 결과를 보이고, 동시에 현재 개발중인 ArF 엑시머 레이저 스텝퍼의 진행상황을 보고한다. 본 논문에서는 스탭퍼의 주요 구성요소인 조명계, 투영광학계, 웨이퍼 자동초점 및 자동정렬 시스템을 중심으로 설명하여, KrF와 ArF 에시머 레이저 스탭퍼간의 차이점과 그 특성들을 상호 비교한다.

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Semi-Microseoond Long pulse KrF 레이저 시스템 개발

  • 박홍진
    • Proceedings of the Optical Society of Korea Conference
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    • 1990.02a
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    • pp.13-16
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    • 1990
  • 코로나 예비전리를 이용한 KrF 레이저의 장펄스화를 위해 동축형 4단 펄스정형회로 (PFN)를 구성해서 용량이행형의 회로에 인덕턴스가 부가된 방식의 전류, 전압을 비교하여 PFN을 동축형으로 제작함으로 인한 Stray Capacitance (Cs)의 존재로 인해 좋은 효율의 장펄스화를 이루어짐을 밝혔다. 구성된 PFN을 절연유에 넣어 충전전압 15kV, N2 55Torr에서 330ns 펄스폭의 전류파형을 측정했다.

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