• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.334.1-334.1
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• 2016

다른 재료에 비해 에너지 변환 효율의 관점에서 높은 경쟁력을 가진 결정질 실리콘은 지난 수십 년 동안 그 특성이 태양전지 분야에 널리 이용되어 왔다. 하지만 결정질 실리콘 웨이퍼는 일반적으로 제조 단계에서 많은 양의 에너지를 소비하고 절단 단계에서 절단 손실(Kerf-loss)이 발생된다. Epoxy Resin을 이용한 Kerf-less Wafering은 초박형 실리콘 웨이퍼 제조 기술 중 하나로, 비교적 간단한 장비와 공정을 통하여 절단 손실 없이 $50{\mu}m$이하의 초박형 실리콘 웨이퍼를 얻을 수 있는 기술이다. 실리콘과 Epoxy Resin 간의 열팽창 계수 차이를 이용하여 초박형 실리콘을 박리 시키는 기술로, 실리콘 기판 위에 Epoxy Resin으로 stress inducing layer를 올려 공정을 진행한다. stress inducing layer를 경화시키는 열처리가 끝나고 급냉되는 과정에서 stress inducing layer에 의해 실리콘 기판에 큰 응력이 가해지게 되고 실리콘 기판에 crack이 발생된다. 공정이 계속 됨에 따라 발생된 crack은 실리콘 표면과 평행한 방향으로 전파 되고 초박형 실리콘 layer가 실리콘 기판에서 박리 된다. 본 실험에서 중요한 공정 변수로는 stress inducing layer의 구성성분 및 두께, 열처리 온도 및 시간, cooling rate 등이 있다. 이러한 공정 변수들을 조절 하여 Epoxy Resin을 이용하여 $100{\mu}m$ 이하의 박리된 wafer를 얻을 수 있었다. 박리된 wafer의 단면과 두께를 Scanning Electron Microscopy(SEM)을 통해 관찰 하였고, 이를 통해 초박형 실리콘 박리 공정에 대한 연구를 진행하였다.

• Journal of the Korean Wood Science and Technology
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• 제39권2호
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• pp.125-131
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• 2011

The characteristics of radio-frequency/vacuum drying Japanese larch boxed heart round logs with 150 mm and 210 mm in diameter and 2,500 mm in length, subjected to compressive loading, after the pretreatment of kerf were investigated. The results of this study were as the follows: The drying time of about 120 hours~130 hours was needed from green to about 15 percent of moisture content. The gradient of final moisture content for all specimens was very gentle in both longitudinal and transverse directions owing to dielectric heating. The surface checks seriously occurred although the occurrence extent of surface check for the kerfed specimens was slight compared with that for the control specimens because drying stress was relieved by kerf. The occurrence of surface checks for the L-specimen was more serious than that for the S-specimen.

• 한국CDE학회논문집
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• 제12권3호
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• pp.153-162
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• 2007

In this paper, we propose a knowledge-based method for generating CNC torch path for laser cutting of the outlines of planar shapes. The proposed method consists of two main phases: laser cutting knowledge construction and CNC torch path generation using the knowledge. In the first phase, cutting experiments are conducted on various operating parameters, and then empirical data are stored and analyzed to make up the knowledge of laser cutting. With this knowledge, we can inquire what a kerf width is for specific operating parameters. In the second phase, using the knowledge of laser cutting, CNC torch path is generated for cutting the outlines of the given planar shapes. This phase is basically based on the offset generation of each outline by a sequence of arc splines, where the offset distance is the same as the half of the kerf width determined from the constructed knowledge. The proposed method based on laser cutting knowledge makes full use of arc interpolators in CNC torch path generation. The method can efficiently reduce the number of path segments while keeping the torch path within the desired accuracy.

• Nuclear Engineering and Technology
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• 제49권4호
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• pp.865-872
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• 2017

For more than 10 years, the laser process has been studied for dismantling work; however, relatively few research works have addressed the effect of high-power fiber laser cutting for thick sections. Since in the nuclear sector, a significant quantity of thick material is required to be cut, this study aims to improve the reliability of laser cutting for such work and indicates guidelines to optimize the cutting procedure, in particular, nozzle combinations (standoff distance and focus position), to minimize waste material. The results obtained show the performance levels that can be reached with 10 kW fiber lasers, using which it is possible to obtain narrower kerfs than those found in published results obtained with other lasers. Nonetheless, fiber lasers appear to show the same effects as those of $CO_2$ and ND:YAG lasers. Thus, the main factor that affects the kerf width is the focal position, which means that minimum laser spot diameters are advised for smaller kerf widths.

• 한국정밀공학회지
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• 제31권3호
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• pp.215-222
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• 2014

This paper presents an experimental study of a vibration-assisted dry micro-wire electrical discharge machining (${\mu}$-WEDM) utilized in high precision and micro-manufacturing area. The assisted vibration was applied to the workpiece using a piezoelectric actuator, and high pressure air was injected directly into the machining gap through a nozzle. Investigation experiments were performed to estimate the importance of input parameters and it was observed from experiment results that the width (kerf) of the cutting slot and the machining time were significantly affected by the air injection pressure and input energy. Moreover, it was also observed that there exists an optimal relationship between the machining time and input parameters including the air pressure and vibration frequency and amplitude. Central composite design based experiments were also carried out, and empirical models of the machining time and cutting slot kerf have been developed using the response surface methodology to analyze and optimize the process.

• 한국음향학회지
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• 제21권1호
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• pp.56-61
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• 2002

초음파 진단용으로 널리 사용되는 1차원 배열 압전형 초음파 변환기는 변환기내의 인접한 소자들간의 간섭에 의해 그 특성에 많은 영향을 받는다. 따라서 본 연구에서는 유한 요소 해석법을 이용하여 압전형 1차원 배열 의료용 초음파 변환기에서 커프의 충진재와 형상의 변화에 의한 음향간섭 레벨의 경향을 분석하였다. 분석결과는 향후 진단용 초음파 변환기의 최적 설계를 위해 중요한 자료가 될 것이며, 더 나아가 치료용, 비파괴 검사용, 그리고 수중 초음파 변환기에도 적용이 가능할 것이다.

• International Journal of Precision Engineering and Manufacturing
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• 제8권4호
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• pp.10-15
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• 2007

Taguchi methods have been used for a long time to improve the product quality and process performance of a manufacturing system, Few researchers have applied this methodology in laser beam cutting (LBC) of sheet metals and found the considerable improvement in cut qualities. In all experimental investigations of LBC so far, the objective was to optimize the single quality characteristic at a time. In this paper the simultaneous optimization of multiple quality characteristics such as Kerf width and material removal rate (MRR) during pulsed Nd:YAG LBC of thin sheet of magnetic material (high Silicon-steel) has been presented using Taguchi's quality loss function. The results show the considerable improvement in multiple S/N ratio as compared to initial cutting condition. Also, the comparison of results from single and multi-objective optimization have been presented and it was found that the loss in quality is always possible shifting from single quality to multiple quality optimization.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.989-992
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• 1997

The objective of this study is to develop stencil cutting process and determine optimal conditions which make good-quality stencil by using a Nd:YAG laser. The effects of process parameters such as laser power, type of mask, gas pressure, cutting speed and pulse width on the cut edge quality were investigated. In order to analyze the cut surface characteristics(roughness, kerf width, dross) optical microscopy, SEM photography and roughness test were used. A a results, the optimal conditions of process parameters were determined, and the practical feasibility of the proposed system is also examined by using a commercial gerber file for PCB stencil manufacturing.

• 한국정밀공학회지
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• 제13권1호
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• pp.29-37
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• 1996

In this study, PC controlled CNC automatic cutting system is developed. Technological introduction of the control process and the computer programming has made possible not only the automatic control for cutting processing unit but also the easy-to-use graphic software that enables the cutting process. This program involves shape part drawing and amendment, pattern reading and saving, reading Autocad file, nesting process, kerf compensation, automatic cutting path generation, NC file conversion and motor control. Software is devided into 3 modules for easy work. First step enables drawing, amendment and pattern making, followed by automatic nesting and cutting path generation with kerf compensation. In the final step, drawing data is transmitted for the resulting automatic cutting processes. This software would be applicated in gas cutting and textile cutting so that it improves the productivity of cutting process.

• 한국레이저가공학회지
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• 제4권2호
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• pp.47-57
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• 2001

This study deals with the laser cutting of stencil for the PCB. The most important aim of this study is to determine optimal conditions which make good-qualify stencil in Nd:YAG laser cutting. We made an experiment according to various variables (power. type of mask. gas pressure, cutting speed, and pulse width) and analyzed the cutting characteristics (surface roughness, kerf width. dross) . Each variable has optimal value for good-qualify cut edge under fixed condition. And neural network after learning experimental data with a million time iteration could predict surface roughness of cut edge under arbitrary condition approximately.