• Title/Summary/Keyword: KINETIC

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Chemical Reactions in Surfactant Solution (I). Substituent Effects of 2-Alkylbenzimidazolide ions on Dephosphorylation in CTABr Solutions (계면활성제 용액속에서의 화학반응 (제1보). 미셀용액속에서의 탈인산화 반응에 미치는 2-알킬벤즈이미다졸음이온들의 치환기효과)

  • Young-Seuk Hong;Chan-Sik Park;Jung-Bae Kim
    • Journal of the Korean Chemical Society
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    • v.29 no.5
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    • pp.522-532
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    • 1985
  • The reactions of p-nitrophenyldiphenylphosphate (p-NPDPP) with anions of benzimidazole (BI) and its 2-alkyl derivatives (R-BI) are strongly catalyzed by the micelles of cetyltrimethyl ammonium bromide (CTABr). On the other hand, the first order rate constants $(k'_{R-BI^-})$ and the second order rate constants $(k_{m(R-BI^-)})$ of the reactions mediated by R-$BI^-$in the micellar pseudophase are much smaller than those mediated by $BI^-$. In order to explain the slower rates of the micellar reactions mediated by R-$BI^-$, we compared the concentration-ratios ([R-$BI^-$]/[$BI^-$]) with the first order rate constant-ratios $(k'_{R-BI^-}/k'_{BI^-})$ and the second order constant-ratios $(k_{m(R-BI^-)}/k_{m(BI^-)})$ for the reactions taking place in the micellar pseudophase. The rate constant-ratios were much smaller than the concentration-ratios. For example in a 5 ${\times}10^{-4}$M butyl-BI solution, the two ratios were 0.089 and 0.430 (for the first order) respectively, and in a $10^{-4}$M butyl-BI solution the former was 0.100 (for the second order). This predicts that the reactivities of R-$BI^-$ in the micellar pseudophase are much smaller than that of $BI^-$. Based on the values of several kinetic parameters measured for dephosphorylation of p-NPDPP mediated by R-$BI^-$, a schemetic model is proposed. Due to the hydrophobicity and the steric effect of the alkyl substituents, these groups would penetrate into the core of the micelle for stabilization by van der Waals interaction with long cetyl groups of CTABr. Consequently, the movements of R-$BI^-$ bound to the micelle should be restricted, leading to decreased collison frequencies between the nucleophiles and p-NPDPP. We refer this as an "anchor effect". This effect became more predominent when a larger alky group in R-BI was employed and when a greater concentration of R-BI was used.

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Study on Pretreatment Methods to Prevent Tissue Softening of Heated Onion (가열 양파의 조직 연화 방지를 위한 전처리 방법에 관한 연구)

  • Choi, Jun-Bong;Cho, Won-Il
    • Korean Journal of Food Science and Technology
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    • v.47 no.1
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    • pp.56-62
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    • 2015
  • Various pretreatment methods were evaluated to prevent tissue softening of heated onion. Changes in onion tissue firmness during heating were explained by 3-mechanism model consisting of texture hardening at low temperature ($60-80^{\circ}C$) and substrate softening at high temperature. Preheating of onion in a $Ca^{2+}$-containing solution significantly improved its texture after high-temperature heating. The improvement of firmness by preheating at low temperature was related to the formation of strong cross-linking between carboxyl groups and $Ca^{2+}$ by the action of pectin methylesterase in onion. The highest firmness was obtained by pre-heating at $70^{\circ}C$ for 120 min in 0.5% calcium solution. This result was supported by chemical analysis showing that the amount of bound calcium was the highest at $70^{\circ}C$. Further investigation should be carried out to establish the optimal conditions to prevent the softening of various vegetables.

A Biomechanical Analysis of Judo's Kuzushi(balance-breaking) Motion (유도 팔방기울이기 동작의 생체역학적 특성 분석)

  • Kim, Sung-Sup;Kim, Eui-Hwan;Kim, Tae-Whan
    • Korean Journal of Applied Biomechanics
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    • v.17 no.2
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    • pp.207-216
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    • 2007
  • The purpose of this study was to biomechanical analysis Judo's Kuzushi throwing motion in order to increase the effectiveness of Nage-waja(throwing technique). The Tori was a Judo player with 18 years experience(4th degree) while the Uke was a player with 2 years experience(1st degree). The kinematic data was captured using the Vicon motion system (7 cameras) and the kinetics were recorded by force plates(2 AMTI). The following were the results; While leaning to the front the subject's trunk's angle was $14.5^{\circ}$, the lower limbs angle was $23.8^{\circ}$, knee angle was $179.6^{\circ}$ and the vertical reaction of the left leg was 325.42N(BW 0.34) and the right leg was 233.7N(BW 0.47). While leaning back the subject's trunk's angle was $11.3^{\circ}$, the lower limbs angle was $4.1^{\circ}$, knee angle was $1761^{\circ}$ and the vertical reaction of the left leg was 299.53N(BW 0.43) and the right leg was 441.7N(BW 0.64). While leaning to the left the subject's trunk's angle was $30.8^{\circ}$, the lower limbs angle was $2.7^{\circ}$, knee angle was $175.2^{\circ}$ and the vertical reaction of the left leg was 711N(BW 1.03) and the right leg was 9.2N(BW 0.01). While leaning to the right the subject's trunk's angle was $36.5^{\circ}$, the lower limbs angle was $10.4^{\circ}$, knee angle was $175.2^{\circ}$ and the vertical reaction of the left leg was 13.2N(BW 0.02) and the right leg was 694.7N(BW 1.01). While leaning to the left front corner the subject's trunk's angle was $19.8^{\circ}$ (front) and $15.1^{\circ}$ (left), the lower limbs angle was $17.8^{\circ}$ (front) and $2.4^{\circ}$ (left), knee angle was $177.8^{\circ}$ (front) and $173.9^{\circ}$(left), and the vertical reaction of the left leg was 547.4N(BW 0.8) and the right leg was 117.8N(BW 0.17). While leaning to the right front corner the subject's trunk's angle was $15.4^{\circ}$ (front) and $17.7^{\circ}$ (right), the lower limbs angle was $21.1^{\circ}$, (front) and $5.7^{\circ}$ (right), knee angle was $175.5^{\circ}$ (front) and $178.9^{\circ}$(right), and the vertical reaction of the left leg was 53N(BW 0.08) and the right leg was 622.4N(BW 09). While leaning to the left rear corner the subject's trunk's angle was $9.2^{\circ}$ (back) and $13.8^{\circ}$ (left), the lower limbs angle was $2^{\circ}$, (back) and $5.7^{\circ}$ (left), knee angle was $175.5^{\circ}$ (back) and $172.8^{\circ}$(left), and the vertical reaction of the left leg was 698.2N(BW 1.02) and the right leg was 49.6N(BW 0.07). While leaning to the right rear corner the subject's trunk's angle was $8.9^{\circ}$ (back) and $19.6^{\circ}$ (right), the lower limbs angle was ${0.6^{\circ}}_"$ (back) and $3.1^{\circ}$ (right), knee angle was $174.6^{\circ}$ (back) and $175.6^{\circ}$(right), and the vertical reaction of the left leg was 7.2N(BW 0.01) and the right leg was 749.4N(BW 1.09). It was observed that during the Judo motion Kuzushii the range of the COM varied from $26.5{\sim}39.9cm$. It was concluded that the upper body leaned further than the lower body as there was knee extension. There was high left leg reaction forces while leaning to the left and likewise for the right side. It was therefore deduced that the Kuzushi was a more effective throwing technique for the left side.

Prediction of Growth of Escherichia coli O157 : H7 in Lettuce Treated with Alkaline Electrolyzed Water at Different Temperatures

  • Ding, Tian;Jin, Yong-Guo;Rahman, S.M.E.;Kim, Jai-Moung;Choi, Kang-Hyun;Choi, Gye-Sun;Oh, Deog-Hwan
    • Journal of Food Hygiene and Safety
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    • v.24 no.3
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    • pp.232-237
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    • 2009
  • This study was conducted to develop a model for describing the effect of storage temperature (4, 10, 15, 20, 25, 30 and $35^{\circ}C$) on the growth of Escherichia coli O157 : H7 in ready-to-eat (RTE) lettuce treated with or without (control) alkaline electrolyzed water (AIEW). The growth curves were well fitted with the Gompertz equation, which was used to determine the specific growth rate (SGR) and lag time (LT) of E. coli O157 : H7 ($R^2$ = 0.994). Results showed that the obtained SGR and LT were dependent on the storage temperature. The growth rate increased with increasing temperature from 4 to $35^{\circ}C$. The square root models were used to evaluate the effect of storage temperature on the growth of E. coli O157 : H7 in lettuce samples treated without or with AIEW. The coefficient of determination ($R^2$), adjusted determination coefficient ($R^2_{Adj}$), and mean square error (MSE) were employed to validate the established models. It showed that $R^2$ and $R^_{Adj}$ were close to 1 (> 0.93), and MSE calculated from models of untreated and treated lettuce were 0.031 and 0.025, respectively. The results demonstrated that the overall predictions of the growth of E. coli O157: H7 agreed with the observed data.

Decomposition of 2,4,6-Trinitrotoluene (TNT) by Gamma Ray Irradiation (감마선 조사에 의한 2,4,6-Trinitrotoluene (TNT)의 분해)

  • Lee, Byung-Jin;Lee, Myun-Joo
    • Journal of Korean Society of Environmental Engineers
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    • v.27 no.1
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    • pp.1-10
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    • 2005
  • The purpose of this study was to evaluate the potential of a gamma irradiation to decompose 2,4,6-trinitrotoluene(TNT) in an aqueous solution. The decomposition reaction of TNT by gamma irradiation was a pseudo first-order kinetic over the applied initial concentrations($25{\sim}100mg/L$). The dose constant was strongly dependent on the initial TNT concentration. The removal of TNT was more efficient at pH below 3 and at pH above 11 than at neutral pH(pH 5-9). The required irradiation dose to remove over 99% of TNT was 40, 80 and 10 kGy, individually at pH 2, 7 and 13. The dose constant was increased by 1.6 fold and over 15.6 fold at pH 2 and 13, respectively, when compared with that at pH 7 When irradiation dose of 200 kGy was applied, the removal efficiencies of TOC were 91, 46 and 53% at pH 2, 7 and 13, respectively. Ammonia and nitrate were detected as the main nitrogen byproducts of TNT and glyoxalic acid and oxalic acid were detected as organic byproducts. The results showed that a gamma irradiation was an attractive method for the decomposition of TNT in an aqueous solution. However, regarding the application of high energy radiation for the TNT decomposition and mineralization, an application of an acidic pH below 3 to the solution before irradiation should be considered.

Characterization of Lactate Dehydrogenase in Acanthogobius hasta (풀망둑(Acanthogobius hasta) 젖산탈수소효소의 특성)

  • Yum, Jung-Joo
    • Journal of Life Science
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    • v.18 no.2
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    • pp.264-272
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    • 2008
  • The lactate dehydrogenase (EC 1.1.1.27, LDH) isozymes in tissues from Acanthogobius hasta were characterized by biochemical, immunochemical and kinetic methods. The activities of LDH in skeletal muscle and eye tissues were 65.30 and 53.25 units, but LDH activities in heart and liver tissues were very low. LDH/CS (EC 4.1.3.7, citrate synthase) in skeletal muscle was the highest as 22.29. Specific activities of LDH in brain, eye and skeletal muscle were 56.45, 38.04 and 11.0 units/mg, respectively. The LDH isozymes in tissues were separated by polyacrylamide gel electrophoresis after immunoprecipitation with antiserum against $A_4,\;B_4$ eye-specific $C_4$ and liver-specific $C_4$. LDH $AC_4$ isozymes were detected predominantly in skeletal muscle, brain and eye tissues, and $B_4$ isozyme was detected in heart. Anodal eye-specific $C_4$ and cathodal liver-specific $C_4$ were coexpressed in A. hasta. The eye-specific $C_4$ isozyme showed higher activity in eye tissue, but liver-specific $C_4$ isozyme showed lower activity in liver. As a result, one part of molecular structures in $A_4\;and\;C_4,\;A_4\;and\;B_4$, and eye-specific $C_4$ and liver-specific $C_4$ were similar, but in $B_4\;and\;C_4$ were different with each other. Therefore the subunit A may be conservative in evolution, and the evolution of subunit B seems to be faster than that of subunit A. The LDH $A_4$ isozyme of skeletal muscle was purified in the fraction from elution with NAD+ containing buffer of affinity chromatography and eye-specific $C_4$ isozyme was eluted right after $A_4$, so the structure of eye-specific $C_4$ isozyme is similar to $A_4$. And LDH activity remained 35.22-43.47% as a result of the inhibition by pyruvate, the Michaelis-Menten constant values for pyruvate was 0.080-0.098 mM, and Vmax were 153.85 units, 35.09 units in skeletal muscle and eye, respectively. Also the $B_4$ isozyme was the thermo-stablest and $C_4$ was stabler than $A_4$ isozyme. The optimum pH of LDH was 6.5. The results mentioned above indicate that isozymes in tissues showed the properties between LDH $A_4\;and\;B_4$ isozyme as A. hasta was adapted to hypoxic conditions. Also LDH seems to function more effectively under anaerobic condition because LDH in skeletal muscle and eye tissues have high affinity for pyruvate.

Evaluation of friction of ceramic brackets in various bracket-wire combinations (브라켓 각도 변화에 따른 세라믹 브라켓의 마찰력 측정)

  • Cha, Jung-Yul;Kim, Kyung-Suk;Kim, Dong-Choon;Hwang, Chung-Ju
    • The korean journal of orthodontics
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    • v.36 no.2 s.115
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    • pp.125-135
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    • 2006
  • The purpose of this study was to measure and compare the level of frictional resistance generated from three currently used ceramic brackets; 1, Crystaline $V^{(R)}$, Tomy International Inc., Tokyo, Japan; 2, $Clarity^{(R)}$, 3M Unitek, Monrovia, CA, USA; 3, $Inspire^{(R)}$, Ormco, Orange, CA, USA; with composite resin brackets, Spirit, Ormco, Orange, CA, USA; and conventional stainless steel brackets, Kosaka, Tomy International Inc., Tokyo, Japan used as controls. In this experiment, the resistance to sliding was studied as a function of four angulations $(0^{\circ},\;5^{\circ},\;10^{\circ}\;and\;15^{\circ})$ using 2 different orthodontic wire alloys: stainless steel (stainless steel, SDS Ormco, Orange, CA, USA), and beta-titanium (TMA, SDS Ormco, Orange, CA, USA). After mounting the 22 mil brackets to the fixture and $.019{\times}.025$ wires ligated with elastic ligatures, the arch wires were slid through the brackets at 5mm/min in the dry state at $34^{\circ}C$. Silica-insert ceramic brackets generated a significantly lower frictional force than did other ceramic brackets, similar to that of stainless steel brackets. Beta-titanium archwires had higher frictional resistance than did stainless steel, and all the brackets showed higher static and kinetic frictional force as the angulation increased. When the angulation exceeded $5^{\circ}$, the active configuration emerged and frictional force quickly increased by 2.5 to 4.5-fold. The order of frictional force of the different wire-bracket couples transposed as the angle increased. The silica-insert ceramic bracket is a valuable alternative to conventional stainless steel brackets for patients with esthetic demands.

Effect of Heat Processing on Thermal Stability of Kudzu (Pueraria thumbergiana Bentham) Root Isoflavones (가열처리가 칡 이소플라본의 열 안정성에 미치는 영향)

  • Choi, Sung-Won;Kim, Kyung-Seon;Hur, Nam-Yun;Kim, Kyung-Seon;Ahn, Soon-Cheol;Park, Cheon-Seok;Kim, Byung-Yong;Baik, Moo-Yeol;Kim, Dae-Ok
    • Journal of Life Science
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    • v.18 no.10
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    • pp.1447-1454
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    • 2008
  • Effect of heat processing on thermal stability of kudzu root isoflavone was investigated for future use such as various processed foods and functional foods. Kudzu root extracts were heated at 80, 100, 121, 140, 165, and $180^{\circ}C$ for up to 90 minutes before and after concentration, respectively. Changes in the amount of isoflavones were monitored using HPLC and thermal stability was investigated using Arrhenius equation. The amount of both daidzin and genistin decreased slightly during heating at 80, 100 and $121^{\circ}C$ but decreased significantly above $140^{\circ}C$. This indicated that daidzin and genistin are stable at temperatures near the boiling point of water. The degradation of both daidzin and genistin occurred in two steps and each step showed typical first order kinetic. The degradation rates were faster in the first step than the second step in both daidzin and genistin. Additionally, the degradation was accelerated when they heated after concentration compared to the sample heated before concentration. These results suggested that degradation of kudzu root isoflavone was highly dependent on both their concentration and heating temperature. This study provides the basic information on thermal stability of kudzu root isoflavones, which can be used for future processing of functional foods.

Effect of temperature on pharmacokinetics of nalidixic acid and piromidic acid in black rockfish Sebastes schlegeli following oral administration (조피볼락, Sebastes schlegeli에 경구투여된 nalidixic acid 및 piromidic acid의 약물동태에 미치는 수온의 영향)

  • Jung, Sung-Hee;Seo, Jung-Soo;Jee, Bo-Young;Kim, Jin-Woo;Park, Myoung-Ae
    • Journal of fish pathology
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    • v.24 no.1
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    • pp.29-37
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    • 2011
  • Effects of temperature ($13{\pm}1.5^{\circ}C$, $23{\pm}1.5^{\circ}C$) on the pharmacokinetic properties of nalidixic acid (NA) and piromidic acid (PA) were studied after oral administration to cultured black rockfish, Sebastes schlegeli. Serum concentrations of NA and PA were determined using HPLC-UV detector after a single dosage of 60 mg/kg body weight. At $23{\pm}1.5^{\circ}C$, the peak serum concentrations of NA and PA, which attained at 24 h post-dose, were 5.87 and $0.43\;{\mu}g/ml$, respectively. At $13{\pm}1.5^{\circ}C$, the peak serum concentrations of NA and PA, which attained at 10 h post-dose, were 6.22 and $1.57\;{\mu}g/ml$, respectively. Better absorption of PA was noted at $13{\pm}1.5^{\circ}C$ compared to $23{\pm}1.5^{\circ}C$. However, absorption of NA was not affected significantly by temperature. The elimination of NA and PA from serum of black rockfish was considerably faster at $23{\pm}1.5^{\circ}C$ than at $13{\pm}1.5^{\circ}C$. The kinetic profile of absorption, distribution and elimination of NA and PA in serum were analyzed by fitting to a one compartment model, with WinNonlin program. The AUC, $T_{1/2}$, $T_{max}$ and $C_{max}$, respectively, were: $161.25\;{\mu}g{\cdot}h/ml$, 0.15 h, 12.29 h and $8.91\;{\mu}g/ml$ at $23{\pm}1.5^{\circ}C$, and $134.12{\mu}g{\cdot}h/ml$, 0.18 h, 8.79 h and $5.00\;{\mu}g/ml$ at $13{\pm}1.5^{\circ}C$ with NA; $41.57\;{\mu}g{\cdot}h/ml$, 0.58 h, 8.24 h and $0.21\;{\mu}g/ml$ at $23{\pm}1.5^{\circ}C$, and $40.36\;{\mu}g{\cdot}h/ml$, 0.59 h, 5.04 h and $1.20\;{\mu}g/ml$ at $13{\pm}1.5^{\circ}C$ with PA.