• Proceedings of the KIEE Conference
• /
• 2006.07c
• /
• pp.1731-1732
• /
• 2006

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. However, the COO(cost of ownership) is very high, because of high consumable cost. Especially, among the consumables, slurry dominates more than 40 %. So, we focused how to reduce the consumption of raw slurry. In this paper, $ZrO_2$, $CeO_2$, and $MnO_2$ abrasives were added de-ionized water (DIW) and pH control as a function of KOH contents. We have investigate the possibility of new abrasive for the oxide CMP application.

• Macromolecular Research
• /
• v.9 no.6
• /
• pp.332-338
• /
• 2001

Waterborne polyurethane as a new polymer electrolyte was synthesized by using relatively hydrophilic polyols. The morphology of polyurethane was changed as it was dispersed in water. In contrast to polyurethane ionomer, waterborne polyurethane did not form an ionic cluster but produced a binary system composed of hydrophilic and hydrophobic groups. In the colloidal system, the former and the latter existed at outward and inward, respectively. Waterborne polyurethane was prepared from poly(ethylene glycol) (PEG) /poly(propylene glycol) (PPG) copolymer, 4,4'-diphenylmethane diisocyanate(MDI), ethylene diamine as a chain extender, and three ionization agents, 1,3-propane sultone, sodium hydride and lithium hydroxide. PEG/PPG copolymer was used for suppressing the crystallinity of PEG and N-H bond was ionized for increasing the electrochemical stability of polyurethane. Low molecular weight poly(ethylene glycol) and poly(ethylene glycol dimethyl ether) (PEGDME) were used as plasticizers. DSC, FT-IR and $^1$H-NMR of the waterborne polyurethane were measured. Also, the ionic conductivity of solid polymer electrolytes based on waterborne polyurethane and various concentrations of low molecular weight poly(ethylene glycol) or PEGDME were measured by AC impedance.

• 한국가시화정보학회:학술대회논문집
• /
• 2002.11a
• /
• pp.49-50
• /
• 2002

In micro-channels, the electro-viscous effect is caused by the electrical double layer on pressure-driven liquid flow. Velocity fields of flow inside micro-channels were measured using micro-PIV system for investigating the electro-viscous effect. De-ionized water and aqueous NaCl solutions with four different concentrations were used as working fluid in a PDMS micro-channel of $100{\mu}m$ width and $66{\mu}m$ height. The pressure gradient, dP/dx, was determined from the pre-determined input flow rate Q of syringe pump. The mean velocity $u_m$ used for calculating Reynolds number was obtained from the PIV velocity field data. These are used to plot the pressure gradient as a function of Reynolds numbers. The pressure gradient far lower concentration solution $(10^{-5}\;M)$ was higher than that for the higher concentration solution. The increase of flow resistance was about $30\%\;and\;37.5\%$ at Re=0.02 and 0.06, respectively.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.18 no.8
• /
• pp.38-43
• /
• 2019

Electrowetting on dielectric (EWOD) is a unique method of shape control of small-volume droplets in microfluidic biochips that relies on modification of surface wetting characteristics using electrical methods. In this study, the droplet shape control on various dielectric surfaces by the EWOD and the effect of droplets on the contact angle as well as the shape were investigated. The droplet used in the experiment was on a sample substrate with $5{\mu}l$ of de-ionized water (DIW) using a micropipette, and wettability was measured with a contact angle meter. This study is expected to be helpful for the development of various micro-total-analysis-systems (${\mu}TAS$) and microfluidic systems with MEMS technology.

• Journal of Korean Vacuum Science & Technology
• /
• v.6 no.1
• /
• pp.30-35
• /
• 2002

We show that a combined technique of Cs$^{+}$ reactive ion scattering (Cs$^{+}$ RIS) and low-energy secondary ion mass spectrometry (LESIMS) provides a powerful means for probing molecular films and their surface reactions. Simple molecules, including HCI, NH$_3$, D$_2$O, and their mixtures, were deposited into a thin film of several monolayer thickness on Ru(001) at low temperature in vacuum, and the surface was characterized by Cs$^{+}$ RIS and LESIMS. On pure films, D$_2$O, HCI, and NH$_3$ existed in the corresponding molecular states. When HCI and NH$_3$ were co-deposited, ammonium ion(NH$_4$$^{+}$) was readily formed by proton transfer from HCI to NH$_3$. In the presence of water molecules, HCI ionized first to hydronium ion(H$_3$O$^{+}$), which subsequently transferred proton to NH$_3$ to form NH$_4$$^{+}$. The proton transfer, however, did not occur to a completion on ice, in contrast to the complete reaction in aqueous solutions.s solutions.

• Journal of ILASS-Korea
• /
• v.17 no.1
• /
• pp.14-19
• /
• 2012

The present study conducts experimental investigation on spreading and deposition characteristics of a $4.3{\mu}l$ de-ionized (DI) water droplet impacting upon aluminum (Al 6061) flat and textured surfaces. The micro-textured surface consisted the micro-hole arrays (hole diameter: $125{\mu}m$, hole depth: $125{\mu}m$) fabricated by the conventional micro-computer numerical control (${\mu}$-CNC) milling machine process. We examined the surface effect of texture area fraction ${\varphi}_s$ ranging from 0 to 0.57 and impact velocity of droplet ranging from 0.40 m/s to 1.45 m/s on spreading and deposition characteristics from captured images. We used a high-speed camera to capture sequential images for investigate spreading characteristics and the image sensor to capture image of final equilibrium deposition droplet for analyze spreading diameter and contact angle. We found that the deposition droplet on textured surfaces have different wetting states. When the impact velocity is low, the non-wetting state partially exists, whereas over 0.64 m/s of impact velocity, totally wetting state is more prominent due to the increase kinetic energy of impinging droplet.

• Journal of Environmental Science International
• /
• v.21 no.3
• /
• pp.363-368
• /
• 2012

The influence of plasma discharge on the nutrient components ($NO_3$-N, $NH_4$-N, $PO_4$-P, K, Ca, and Mg) and water quality [pH, ORP (oxidation-reduction potential) and electric conductivity] of hydroponic water were investigated. It was observed that the $NH_4$-N, $PO_4$-P, K, Ca, and Mg were kept at the constant concentrations for plasma discharging of 90 min. On the other hand, $NO_3$-N concentration was increased with proceeding of the plasma discharge. The increase of $NO_3$-N concentration was considered with the fact that nitric acid was created from nitrogen among supplying air for the insulation of inside of dielectric barrier. ORP and electric conductivity was increased with plasma discharging time. However, pH was decrease with what because of the generation of the nitric acid. When adjusting the hydroponic ingredients, pH and conductivity must to be considered because of the change of pH and conductivitiy with the discharging.

• Journal of the Korean institute of surface engineering
• /
• v.52 no.6
• /
• pp.364-370
• /
• 2019

Fe-Mn-Si-Ni-Cr-TiC alloys have a shape memory property, recovering initial shape by heating. With an aim to improve a durability and stability of building and infrastructure, this Fe-based shape memory alloy (FSMA) can be employed to reinforce concrete structure with creation of compressive residual stress. In this work, corrosion resistance of FSMA was compared with general rebar and S400 carbon steel to evaluate the stability in concrete environment. Potentiodynamic polarization test in de-ionized water, tap-water and 3.5 wt.% NaCl solution with variations of pH was used to compare the corrosion resistance. FSMA shows better corrosion resistance than rebar and S400 in tested solutions. However, Cl-containing solution is critical to significantly reduce the corrosion resistance of FSMA. Therefore, though FSMA can be a promising candidate to replace the rebar and S400 for the reinforcement of concrete structure, serious cautions are required in marine environments.

• Korean Journal of Materials Research
• /
• v.33 no.5
• /
• pp.222-228
• /
• 2023

Transition metal oxides formed by a single or heterogeneous combination of transition metal ions and oxygen ions have various types of crystal structures, which can be classified as layered structures and non-layered structures. With non-layered structures, it is difficult to realize a two-dimensional structure using conventional synthesis methods. In this study, we report the synthesis of cobalt oxide into wafer-scale nanosheets using a surfactant-assisted method. A monolayer of ionized surfactant at the water-air interface acts as a flexible template for direct cobalt oxide crystallization below. The nanosheets synthesized on the water surface can be easily transferred to an arbitrary substrate. In addition, the synthesizing morphological and crystal structures of the nanosheets were analyzed according to the reaction temperatures. The electrochemical properties of the synthesized nanosheets were also measured at each temperature. The nanosheets synthesized at 70 ℃ exhibited higher catalytic properties for the oxygen evolution reaction than those synthesized at other temperatures. This work suggests the possibility of changing material performance by adjusting synthesis temperature when synthesizing 2D nanomaterials using a wide range of functional oxides, resulting in improved physical properties.

• Journal of Digital Convergence
• /
• v.15 no.1
• /
• pp.509-517
• /
• 2017

As the effectiveness of ionic water that mainly used for the purpose of treatment has been widely known with the recent "well-being" trend, people's interest in it is also gradually increasing. Especially, the alkaline ionic water for drinking purpose could conveniently provide different types/amount of inorganics required for different dietary life depending on nature and race, could effectively provide alkaline inorganics that could be insufficient to modern Korean people, and also could provide alkaline inorganics that prevent/cure/relieve pregnant women's morning sickness. Applying the suggested performance/manufacturing method of alkaline ionic water through the performance assessment of alkaline electrolytic ionic water of the developed product, it would be necessary to have additional researches on the improvement of product or parallel development that could be applied to diverse areas.