• Journal of Advanced Marine Engineering and Technology
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• 제23권3호
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• pp.360-368
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• 1999

The paper describes spectroscopic characteristics of plasma induced in the pulsed YAG laser welding of alloys containing a large amount of volatile elements. The authors have conducted the spectroscopic analyses of laser induced Al-Mg alloys plasma in the air and argon atmosphere. In the air environment the identified spectra were atomic lines of Al, Mg, Cr, Mn, Cu, Fe and Zn and singly ionized Mg lines as well as the intense molecular spectra of ALO and MgO formed by chemi-cal reactions of evaporated Al and Mg atoms from the pool surface with oxygen in the air. In argon atmosphere MgO and AlO spectra vanished but AlH spectrum was detected. the hydrogen source was presumable hydrogen dissolved in the base metals water absorbed on the surface oxide layer or $H_2$ and $H_2O$ in the shielding gas. The resonant lines of Al and Mg were strongly self-absorbed in particular self-absorption of the Mg line was predominant. These results show that the laser induced plasma was made of metallic vapor with relatively low temperature and high density.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1539-1542
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• 2008

Plasma is 4th state of matters, which consists of electrons, neutral, and ionized particles. In biomedical research, cold plasma, which is generated in atmospheric condition, has been applied to disinfect microorganisms such as bacteria and yeast cells. Because of its low temperature condition, the heat-sensitive medical device can be easily sterilized by the cold plasma treatment. In recent years, the effects of plasma on mammalian cells have arisen as a new issue. Generally, plasma induces intensity dependent necrotic cell death. In this research, we investigate the feasibility of cold plasma treatment for cancer therapy by conducting comparative study of plasma effects on normal and cancer cells. We use THLE-2 (human liver normal cell) and SK-Hep1 (human liver metathetic cancer cell) as our target cells. The needle type of cold plasma is generated by the Helium plasma device. Two types of cells have different onset plasma conditions for the necrosis, which may be explained by difference in electrical properties of these two cell types.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.180-180
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• 2010

The design and implementation of high rate deposition process and anti-scratch property of silicon oxide film by PECVD with UHF power were investigated according to the effect of UHF input power with HF bias. New regime of high rate deposition of SiOx films by hybrid plasma process was investigated. The dissociation of OMCTS (C8H24Si4O4) precursor was controlled by plasma processes. SiOx films were deposited on polyethylene terephthalate (PET) and polycarbonate substrate by plasma enhanced chemical vapor deposition (PECVD) using OMCTS with oxygen carrier gas. As the input energy increased, the deposition rate of SiOx film increased. The plasma diagnostics were performed by optical emission spectrometry. The deposition rate was characterized by alpha-step. The mechanical properties of the coatings were examined by nano-indenter and pencil hardness, respectively. The deposition rate of the SiOx films could be controlled by the appropriate intensity of excited neutrals, ionized atoms and UHF input power with HF bias at room temperature, as well as the dissociation of OMCTS.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2007년도 추계종합학술대회
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• pp.747-750
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• 2007

본 연구는 부식을 방지하기 위해서는 metal line식각 후 염소 잔유물 과 plasma charge up을 식각 조건, PR strip조건 및 후속 세정 조건을 최적화함으로써 제거해야 한다고 제안 하였다. Metal line에 다량 분포하는 charge up은 후속 세정의 적정 PH와 만났을 때, 하부 tungsten plug의 부식을 유발 하게 된다. Metal line식각 및 PR strip후 세정에 있어 약액의 종류는 부식에 결정적인 영향을 미친다. Galvanic corrosion을 최소화하기 위한 적정 PH, metal attack을 최소화 할 수 있는 chemistry선택, 높은 식각 부산물 제거 효율의 약액, 최적의 $H_2O$처리 조건 등이 metal부식방지에 있어 결정적인 요소임을 확인하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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• pp.185-188
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• 2002

This paper describes the information for quantitative simulation of weakly ionized plasma. We should grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in $SF_6+O_2$ mixture gas calculated for range E/N values l~900[Td] at the temperature is 300[$^{\circ}K$] and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. It has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with pure $SF_6$, pure $O_2$ and mixture gas.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1890-1892
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• 2002

The technology of sulfur lamps that has physical and electrical characteristics comparable to current HID source has been reported. The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases: (l) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

• 분석과학
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• 제5권3호
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• pp.269-276
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• 1992

An ion-exchange/conductometric method is applied for the determination of total acidity in simulated atmospheric samples. Non-$H^+$ cations and strong acid anions are enriched by the preconcentrator columns in series and eluted through the corresponding parallel suppressor units. The conductivities from each channel correspond to the concentrations of the resulting ionized species in equivalents per unit volume. The difference is the measure of acidity due to strong acids. With 5-min sampling at a flow rate of 0.3 mL/min, the detection limits for ${NH_4}^+$ and ${SO_4}^{2-}$ are 0.3 and $0.1{\mu}equiv/L$, respectively. The acidity for samples composed of various ions can be determined without significant error, usually less than 5%. The proposed method discriminates against the artifact from the $CO_2$ dissolution. Principles of acidity measurements are also presented.

• 열처리공학회지
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• 제14권5호
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• pp.292-296
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• 2001

In this work, an ultra-high vacuum activated reactive evaporation equipment was built. With reaction of Al and oxygen plasma, $Al_2O_3$ was deposited on the surface of etched Al foil. The chamber was evacuated down to $2{\times}10^{-7}$ torr initially. The Ar and $O_2$ gas introduced into the chamber to maintain $5{\times}10^{-5}$ torr during deposition. Ar gas prevents recombining of the ionized oxygen. Evaporation was maintained by electron beam evaporator continuously. Heating filament and electrode were used in order to generate plasma. The substrate bias of -300V was introduced to accelerate deposition of evaporated Al atoms. The composition and morphology of deposited $Al_2O_3$ films were analyzed by x-ray photoelectron spectroscopy(XPS) and atomic force microscopy (AFM), respectively. The Al oxide was formed on the surface of etched Al foil. According to AFM results, the surface morphology of $Al_2O_3$ film indicates uniform feature. Dielectric characteristic was measured as a function of frequency. Measured withstanding voltage and capacitance were 52V and $24{\mu}F/cm^2$, respectively. The obtained $Al_2O_3$ film shows clean condition without contaminants, which could be adapted to capacitor production.

• 대한수의학회지
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• 제53권3호
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• pp.159-162
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• 2013

Galectin-3 is a ${\beta}$-galactoside-binding lectin that plays a role in neuroinflammation through cell migration, proliferation, and apoptosis. In the present study, regulation of galectin-3 was examined in the brain of mice infected with the Daniel strain of Theiler's murine encephalomyelitis virus (TMEV) at days 7 and 81 post-infection by immunohistochemistry. Immunohistochemistry revealed that galectin-3 was mainly localized in ionized calcium-binding adapter 1-positive macrophages/activated microglia, but not in Iba-1-positive ramified microglia. Galectin-3 was also weakly detected in some astrocytes in the same encephalitic lesions, but not in neurons and oligodendrocytes. Collectively, the present findings suggest that galectin-3, mainly produced by activated microglia/macrophages, may be involved in the pathogenesis of virus induced acute inflammation in the early stage as well as the chronic demyelinating lesions in Daniel strain of TMEV induced demyelination model.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.95-95
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• 2012

스터퍼링 기술이 1852년 Grove에 의해서 최초 발견되어 1979년 Chapin에 의해서 planar magnetron cathode 개발로 진공코팅기술의 새로운 영역을 열게 되어 현재까지 디스플레이, 반도체, 태양전지, 광학산업 및 전자부품 등 나노 산업에 필수적으로 적용되고 있다. 스퍼터링 입자는 운동량 전달에 의한 것으로 운동량을 갖는 나노 스퍼터링 입자는 기판에 대한 박막의 부착력이 우수하고 대면적에 균일하고 재현성 있게 성막되는 특징을 갖고 있다. 마그네트론 스퍼터링 기술이 산업에 응용되면서 주로 4분야에서 많은 연구, 개발이 되어져 왔다. 첫째는 타겟의 고순도 및 고밀도화와 더불어 가격이 고가로 됨에 따라 타겟 사용효율의 향상이다. 플라즈마를 발생시키는 캐소드의 자기회로를 1차원, 2차원 및 회전운동을 통해서 사용효율을 향상시키고 있다. 둘째는 기판에 대해서 박막특성이 균일하도록 코팅하는 것이다. 디스플레이에서는 글래스 기판이 대면적으로 됨에 따라서 핸들링이 어려워져 여러 개의 캐소드 자기회로를 선형적으로 이동시켜 박막두께분포를 최적화하며 반응성 가스를 사용해서 균일한 특성의 박막을 제작하는 경우에는 가스분사관과 배기펌프계의 기하학적 위치 및 가스 유동학적 해석이 필요하다. 셋째는 스퍼터링 입자의 이온화로 의한 박막의 특성향상과 반도체 trench의 높은 aspect ratio hole을 채우는 것이다. 이온화 방법으로는 inductively coupled plasma (ICP), microwave amplified (MA), high power impulse (HIPI), hollow cathode magnetron (HCM), self-sustained sputtering 등이 사용되어져 왔으며 최근에는(neutral beam-assisted sputtering (NBAS)에 의한 박막특성향상 방법이 발표되고 있다. 넷째는 플라즈마 및 박막두께 시뮬레이션에 대해서 많은 발표가 되고 있다. 본 발표에서는 상기의 4 분야를 포함한 향후 개발방향에 대해서 소개할 예정이다.