Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.05c
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- Pages.185-188
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- 2002
The analysis of electrons drift velocity in $SF_6+O_2$ mixture gas by Boltzmann-Equation
볼츠만 방정식을 이용한 $SF_6+O_2$ 혼합가스의 전자이동속도
- Published : 2002.05.17
Abstract
This paper describes the information for quantitative simulation of weakly ionized plasma. We should grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in