• 한국진공학회지
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• 제12권S1호
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• pp.107-112
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• 2003

The alignment effect of liquid crystals on Polyimide surfaces bombarded by a low energy argon ion beam and the effect of pretilt angle on viewing characteristics of an LCD cell are discussed. The unidirectional out-of-plane liquid crystal tilt angle is varied with various ion beam irradiation conditions, such as the energy of the incident ions, the angle of incidence and exposure time. As low pretilt angle is profitable for wider viewing property, LCD cell with ion beam modified Polyimide layer show wider viewing characteristics.

• Transactions on Electrical and Electronic Materials
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• 제8권6호
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• pp.265-267
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• 2007

The liquid crystal(LC) aligning capabilities of a nematic liquid crystal(NLC) on a homeotropic polyimide(PI) surface using a new ion-beam method were studied. Exposure ion-beam of $45^{\circ}$ incidence angle shows a good LC alignment of the NLC on the homeotropic PI surface. Also, on the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam of $45^{\circ}$ incidence angle had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good at 1500 eV. And we achieved satisfactory result for EO character.

• 대한기계학회논문집
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• 제14권3호
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• pp.747-754
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• 1990

본 연구에서는 장시간 가공하는 경우 가공량과 가공물에 입사되는 이온 빔의 입사각도에 따라 이온 스파터 가공이 표면거칠기에 미치는 영향에 대해서 연구해 보았 다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.409-412
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• 2002

We found that polyimide surfaces bombarded by a low energy argon ion beam align liquid crystals. The pretilt angle of the liquid crystals is controlled by ion beam parameters, such as the energy of the incident ions, the angle of incidence, exposure time and current density. The alignment direction of liquid crystal on substrates corresponded to ion beam direction. By argon ion beam the pretilt angle of the liquid crystals was controlled between $0.5^{\circ}$ and $4^{\circ}$for SE-3140 under the proper conditons. By the atomic force microscope (AFM), polyimide surfaces before and after bombarded by ion beam are compared.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.818-821
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• 2006

We demonstrate the vertical alignment of liquid crystal on $a-SiO_x$ film surface using the ion beam exposure. Liquid crystal can be aligned vertically by the rotational oblique evaporation of $a-SiO_x$ film. However, the electro-optic switching behavior of liquid crystal along random directions results in disclination lines. We found that we can achieve highly uniform alignment of liquid crystal without disclination lines by using the ion beam exposure. We found from XRD and XPS data that the vertical alignment can be achieved when x approaches 1.5 at the $a-SiO_x$ film surface. We have shown that the pretilt angle can be controlled by changing ion beam parameters, such as the ion beam energy, the angle of incidence, and the exposure time. We found that whether liquid crystals can be aligned vertically or homogeneously on $a-SiO_x$ film can be predicted simply by measuring the change in optical transmittance by deposition of $a-SiO_x$ thin film layers. We also have shown that a liquid crystal cell aligned vertically by the ion beam exposure exhibits the voltage-transmittance curve similar to that of a rubbed polyimide cell.

• 한국진공학회지
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• 제17권2호
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• pp.81-89
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• 2008

분자동역학을 이용하여 이온빔 스퍼터링 과정에서 원자의 거동을 연구하였다. Ar이온이 Au와 Pd(001) 표면에 다양한 에너지와 입사각도로 충돌할 때, 표면원자들 중 일부는 공간으로 떨어져 나갔으며, 반응 후 일부 원자들은 초기 표면보다 위쪽에 재증착 되는 현상이 관찰되었다. 재증착 원자의 수율은 스퍼터된 원자보다 Au의 경우 약 5배, Pd의 경우 약 3배 많이 입사 에너지와 입사 각도에 상관없이 발생됨을 확인하였다. 연속된 입사계산을 통해, 스퍼터링 과정에 발생되는 다양한 표면 패턴 형성 메커니즘을 식각만으로 설명하고 있는 종래의 개념과는 달리, 이온빔으로 인해 끊임없이 발생되는 재증착 원자들이 표면의 구조를 형성하는데 중요한 역할을 하는 것으로 확인되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.429-429
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• 2007

For various applications of liquid crystal displays (LCDs), the uniform alignment of liquid crystal (LC) molecules on treated surfaces is significantly important. Generally, a rubbing method has been widely used to align the LC molecules on polyimide (PI) surfaces. Rubbed PI surfaces have suitable characteristics, such as uniform alignment. However, the rubbing method has some drawbacks, such as the generation of electrostatic charges and the creation of contaminating particles. Thus, we strongly recommend a non contact alignment technique for future generations of large high-resolution LCDs. Most recently, the LC aligning capabilities achieved by ultraviolet and ion-beam exposures which are non contact methods, on diamond-like carbon (DLC) inorganic thin film layers have been successfully studied because DLC thin films have a high mechanical hardness, a high electrical resistivity, optical transparency, and chemical inertness. In addition, nitrogen-doped DLC (NDLC) thin films exhibit properties similar to those of the DLC thin films and a higher thermal stability than the DLC thin films because C:N bonding in the NDLC thin filmsis stronger against thermal stress than C:H bonding in the DLC thin films. Our research group has already studied the NDLC thin films by an ion-beam alignment method. The $SiN_x$ thin films deposited by plasma-enhanced chemical vapor deposition are widely used as an insulation layer for a thin film transistor, which has characteristics similar to those of DLC inorganic thin films. Therefore, in this paper, we report on LC alignment effects and pretilt angle generation on a $SiN_x$, thin film treated by ion-beam irradiation for various N ratios

• 분석과학
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• 제19권5호
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• pp.400-406
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• 2006

탄성되튐검출(Elastic Recoil Detection)법에 의한 박막시료의 수소 정량은 빔전류 측정의 신뢰성을 전제로 유기물 필름을 정량 비교체로 사용하여 이루어진다. 그러나 탄성되튐검출법에서 일반적으로 사용되는 편향각(tilt angle)인 $75^{\circ}$에서는 시편에 조사되는 일차 이온빔의 조사량을 정확하게 측정하기 어렵다. 시편의 편향각을 바꿔가며 탄성산란 신호를 비교하면 편향각이 커질수록 단위 조사량 당 산란신호는 감소하며 또한 시편의 표면 물질에 따라 이온빔전류 적산의 효율이 달라진다. 이러한 빔전류 적산과정의 오류를 제거하여 정량의 신뢰성을 제고하는 방법으로 되튐스펙트럼과 동시에 측정한 산란스펙트럼을 이용하여 빔 조사량을 결정하였다. 산란스펙트럼에 의한 조사량 결정법은 수 10%에 이르는 전류적산과정의 오차요인을 근본적으로 제거하여 되튐반응에 의한 수소정량의 신뢰성을 향상시켰다. 수소정량의 비교체로 사용해 왔던 폴리이미드 필름과 수소이온주입 시료, 그리고 카본웨이퍼를 대상으로 시험분석하고 기존의 전류적산에 의한 직접정량법과 비교하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.188.1-188.1
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• 2014

Aluminum is widely used as a material for electrode on silicon based devices. Especially, aluminum films are used as backside and front-side electrodes in silicon quantum dot (QD) solar cells. In this point, the diffusion of aluminum is very important for the enhancement of power conversion efficiency by improvement of contact property. Aluminum was deposited on a Si (100) wafer and a Si QD layer by ion beam sputter system with a DC ion gun. The Si QD layer was fabricated by $1100^{\circ}C$ annealing of the $SiO_2/SiO_1$ multilayer film grown by ion beam sputtering deposition. Cs ion beam with a low energy and a grazing incidence angle was used in SIMS depth profiling analysis to obtain high depth resolution. Diffusion behavior of aluminum in the Al/Si and Al/Si QD interfaces was investigated by secondary ion mass spectrometry (SIMS) as a function of heat treatment temperature. It was found that aluminum is diffused into Si substrate at $450^{\circ}C$. In this presentation, the effect of heat treatment temperature and Si nitride diffusion barrier on the diffusion of Al will be discussed.

• Bulletin of the Korean Chemical Society
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• 제16권2호
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• pp.101-104
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• 1995

In an attempt to understand the nature of hyperthermal ion-surface collisions, noble gas ion beams (He+, Ne+, Ar+, and Xe+) are scattered from a Si(100) surface for collision energies of 20-300 eV and for 45°incidence angle. The scattered ions are mass-analyzed using a quadrupole mass spectrometer and their kinetic energy is measured in a time-of-flight mode. The scattering event for He+ and Ne+ can be approximated as a sequence of quasi-binary collisions with individual Si atoms for high collision energies (Ei > 100 eV), but it becomes of a many-body nature for lower energies, Ar+ and Xe+ ions undergo mutliple large impact parameter collisions with the surface atoms. The effective mass of a surface that these heavy ions experience during the collision increases drastically for low beam energies.