• 대한기계학회논문집A
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• 제34권12호
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• pp.1865-1870
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• 2010

이 논문에서는 뉴럴네트워크 모델에 기초하여 셀프 센싱이 가능한 IPMC 액추에이터를 개발하고자 한다. IPMC의 양면에 있는 두 개의 지정된 점에서 측정된 입력 전압과 입력 신호들을 뉴럴네트워크 모델의 입력 신호로 사용한다. CCD 레이저 변위 센서는 제시된 뉴럴네트워크 모델의 학습된 출력값으로 사용되는 IPMC 끝의 변위를 정확히 측정하기 위해 설치된다. 결과적으로 뉴럴네트워크 모델은 수집된 입력/출력 학습데이터에 의해 최대한으로 활용된 IPMC의 끝의 변위를 평가하기 위해 만들어진다. IPMC 액추에이터를 위해 설계된 모델의 효율성은 결과들을 모델링함으로서 증명되어진다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제17권1호
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• pp.141-146
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• 2017

In this letter, we propose the use of tunneling field effect transistors (TFET) as a biosensor that detects bio-molecules on the gate oxide. In TFET sensors, the charges of target molecules accumulated at the surface of the gate oxide bend the energy band of p-i-n structure and thus tunneling current varies with the band bending. Sensing parameters of TFET sensors such as threshold voltage ($V_t$) shift and on-current ($I_D$) change are extracted as a function of the charge variation. As a result, it is found that the performances of TFET sensors can surpass those of conventional FET (cFET) based sensors in terms of sensitivity. Furthermore, it is verified that the simultaneous sensing of two different target molecules in a TFET sensor can be performed by using the ambipolar behavior of TFET sensors. Consequently, it is revealed that two different molecules can be sensed simultaneously in a read-out circuit since the multi-sensing is carried out at equivalent current level by the ambipolar behavior.

• 센서학회지
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• 제24권4호
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• pp.264-269
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• 2015

An infrared (IR) bolometer measures the change of resistance by absorbing incident IR radiation and generates a signal as a function of the radiation intensity. Since a bolometer requires temperature stabilization and light filtering except for the infrared rays, it is essential for the device to be packaged meeting conditions that above mentioned. Minimization of heat loss is needed in order to stabilize temperature of bolometer. Heat loss by conduction or convection requires a medium, so the heat loss will be minimized if the medium is a vacuum. Therefore, vacuum packaging for bolometer is necessary. Another important element in bolometer packaging is germanium (Ge) window, which transmits IR radiation to heat the bolometer. To ensure a complete transmittance of IR light, anti-reflection (AR) coatings are deposited on both sides of the window. Although the transmittance of Ge window is high for IR rays, it is difficult to use frequently in low-price IR bolometer because of its high price. In this paper, we fabricated IR window by utilizing silicon (Si) substrate instead of Ge in order to reduce the cost of bolometer packaging. To enhance the IR transmittance through Si substrate, it is textured using Reactive Ion Etching (RIE). The texturing process of Si substrate is performed along with the change of experimental conditions such as gas ratio, pressure, etching time and RF power.

• 센서학회지
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• 제29권4호
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• pp.255-260
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• 2020

In this study, we developed a method of improving the surface-enhanced Raman spectroscopy (SERS) response characteristics by depositing a nanoporous Ag metal thin film through cluster source sputtering after forming a pyramidal texture structure on the Si substrate surface. A reactive ion etching (RIE) system with a metal mesh inside the system was used to form a pyramidal texture structure on the Si surface without following a complicated photolithography process, unlike in case of the conventional RIE system. The size of the texture structure increased with the RIE process time. However, after a process time of 60 min, the size of the structure did not increase but tended to saturate. When the RF power increased from 200 to 250 W, the size of the pyramidal texture structure increased from 0.45 to 0.8 ㎛. The SERS response characteristics were measured by depositing approximately 1.5 ㎛ of nanoporous Ag metal thin film through cluster sputtering on the formed texture structure by varying the RIE process conditions. The Raman signal strength of the nanoporous Ag metal thin film deposited on the Si substrate with the texture structure was higher than that deposited on the general silicon substrate by up to 19%. The Raman response characteristics were influenced by the pyramid size and the number of pyramids per unit area but appeared to be influenced more by the number of pyramids per unit area. Therefore, further studies are required in this regard.

• 센서학회지
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• 제29권4호
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• pp.215-219
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• 2020

MnCo₂S₄/CoS₂ electrode with highly accessible electroactive sites is prepared using the hydrothermal method. The electrode exhibits an areal capacitance of 0.75 Fcm^-2 at 6 mAcm^-2 in 1 M KOH. The capacitance is further increased to 2.06 Fcm^-2 by adding K₃Fe(CN)₆ and K₄Fe(CN)₆ (a redox couple) to KOH. This increment is associated with the redox-active properties of cobalt and manganese transition metals, as well as the ion pair of [Fe(CN)₆]^-3/[Fe(CN)₆]^-4. The capacitance retention of the MnCo₂S₄/CoS₂ electrode is 87.5% for successive 4000 charge-discharge cycles at 10 mAcm^-2 in a composite electrolyte system of KOH and ferri/ferrocyanide. The capacitance enhancement is supported by the lowest equivalent series resistance (0.62 Ωcm^-2) of MnCo₂S₄/CoS₂ in the presence of redox additive couple compared with the bare KOH electrolyte.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.68-71
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• 2004

본 연구는 싱크로트론 방사광의 단색광 (monobeam)을 이용한 영상을 획득하였다. 영상센서로서 CMOS를 사용하였으며 센서 앞단에는 형광체 (phosphor)를 이용하여 방사광에 대한 빛의 신호로서 영상을 획득하였다. 사용된 싱크로트론 방사광의 beam size는 $5mm{\times}2mm$ 이며 ion chamber를 통한 beam intensity 는 $10{\times}10^{-7}$이다. 형광체는 각각 ZnS(Cu:Al), ZnS(Ag,Al), $BiTiO_3$, $Y_2O_2S(Tb)$로서 4가지를 사용하였으며 여기에 사용된 형광체는 기계식 스크린 프린팅 (Screen Printing) 방식으로 직접 제조하였다. 두께는 모두 동일하게 $10{\mu}m$이며 각각에 대한 PL(Photoluminescence)을 측정하여 분석하였다. object로는 물고기와 20linepair를 사용하였으며 CMOS센서를 이용하여 각각의 phosphor에 대하여 영상을 획득하였다. 영상의 평가는 20line pair 영상의 MTF를 이용하였다. 각각의 형광체에 대한 MTF는 5 lp/mm 에서는 0.5650, 0.2150, 0.7890, 0.3840 이며 10 lp/mm 은 0.4500, 0.0900, 0.2510, 0.1500이고 15 lp/mm 는 0.1900, 0.0300, 0.1430, 0.0500이며 마지막으로 20 lp/mm 은 0.0810, 0.004, 0.0500, 0.0320의 MTF 값을 나타내었다. $10{\mu}m$ 두께에 대하여 ZnS(Cu:Al)이 가장 좋은 MTF의 값을 나타내었다.

• 한국항공우주학회지
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• 제45권2호
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• pp.140-147
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• 2017

본 논문에서는 전기추진 무인항공기의 동력원으로 주로 사용되고 있는 리튬폴리머 배터리의 상태 모니터링을 위해 기존에 자체 개발한 동력 모니터링 장치인 PMU의 개선 및 제작에 관하여 기술하였다. 개선된 PMU는 비행에 필요한 다양한 센서와 모터의 구동에 안정적인 전압과 전류를 제공하며 모니터링 채널과 온도센서의 추가로 상태 모니터링의 정밀도가 향상되었다. 지상 시험환경을 통해 무인항공기에 탑재되는 PMU의 전압전류 측정값을 보정하고 실제 비행시험을 통해 개선된 성능을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.2003-2005
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• 2002

바이오 마이크로 시스템 및 바이오 MEMS 분야, 특히 실리콘을 기질로 하는 바이오 센서 제작에서 반도체 공정 기술은 센서의 대량 생산과 초소형화를 위해서 반드시 필요한 기술이다. 그러나, 감지전극의 마이크로화에 따른 센서의 감도 및 안정성 저하 문제는 해결해야 할 과제이다. 최근, 다공질 실리콘이 갖는 대면적이 실리콘 기질과 생체 고분자 (예: 단백질, 핵산 등) 간의 결합력을 향상시킬 수 있음이 알려지면서, 바이오 센서 분야에서, 새로운 형태의 드랜스듀서 재료로서의 다공질 실리콘에 대한 논의가 활발히 전개되고 있으며 또한, ISFET (Ion-Selective Field-Effect Transistors) 와는 달리 다공질 실리콘 층은 저항이 크기 때문에 센서 제작 과정에서의 부가적인 절연막을 필요로 하지 않는다. 본 연구에서는, 백금을 증착한 다공질 실리콘 표면에 전도성 고분자로서 Polypyrrole (PPy) 필름과 생체 고분자 물질로서 Urease를 각각 전기화학적으로 흡착하였다. 다공질 실리콘 층의 형성을 위해 테플론 소재의 전기화학 전지에 불산 (49%), 에탄올 (95%), $H_2O$ 혼합 용액을 넣고 실리콘 웨이퍼에 일정시간 수 mA의 산화 전류를 흘려주었으며, 약 $200{\AA}$의 티타늄 박막과 $200{\AA}$의 백금 박막을 RF 스퍼터링하여 작업 전극을 제작하였고, 백금 박막 및 Ag를 기화 증착하여 제작한 Ag/AgCl 박막을 각각 상대 전극과 기준전극으로 하였다. 박막 전극의 표면 분석을 위해 SEM (Scanning Electron Microscopy), EDX (Energy Dispersive X-ray spectroscopy) 등을 이용하였다. 제작된 요소 센서로부터 요소 농도 범위 0.01 mmol/L ${\sim}$ 100 mmol/L에서 약 0.2 mA/decade의 감도를 얻었다.

• Journal of Astronomy and Space Sciences
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• 제35권3호
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• pp.185-193
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• 2018

Jang Bogo Station (JBS), the second Korean Antarctic research station, was established in Terra Nova Bay, Antarctica ($74.62^{\circ}S$ $164.22^{\circ}E$) in February 2014 in order to expand the Korea Polar Research Institute (KOPRI) research capabilities. One of the main research areas at JBS is space environmental research. The goal of the research is to better understand the general characteristics of the polar region ionosphere and thermosphere and their responses to solar wind and the magnetosphere. Ground-based observations at JBS for upper atmospheric wind and temperature measurements using the Fabry-Perot Interferometer (FPI) began in March 2014. Ionospheric radar (VIPIR) measurements have been collected since 2015 to monitor the state of the polar ionosphere for electron density height profiles, horizontal density gradients, and ion drifts. To investigate the magnetosphere and geomagnetic field variations, a search-coil magnetometer and vector magnetometer were installed in 2017 and 2018, respectively. Since JBS is positioned in an ideal location for auroral observations, we installed an auroral all-sky imager with a color sensor in January 2018 to study substorms as well as auroras. In addition to these observations, we are also operating a proton auroral imager, airglow imager, global positioning system total electron content (GPS TEC)/scintillation monitor, and neutron monitor in collaboration with other institutes. In this article, we briefly introduce the observational activities performed at JBS and the preliminary results of these observations.

• 센서학회지
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• 제23권3호
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• pp.197-201
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• 2014

TEPC (Tissue Equivalent Proportional Counter) was usually used for high LET radiation dosimetry. We developed a prototype TEPC for micro-dosimetry in the range of $0.2{\sim}300 keV/{\mu}m$. And, the simulated site diameter of the TEPC is $2{\mu}m$, of similar size to a cell nucleus. For purposes of characterization the response for high LET radiation of the TEPC has been investigated under 135MeV/u Carbon ions in HIMAC (Heavy Ion Medical Accelerator). We determined the gas multiplication factor and measured the lineal energy spectrum [yd(y)] of 135 MeV/u Carbon ions. The value of the gas multiplication factor was 315 at 700 V bias voltage. As a result of the experiment, we could more understand the performance of the TEPC for high LET (Linear Energy Transfer) radiation. And the procedure of high LET radiation dosimetry using TEPC is established.