The Study on the surface of SBT Thin Film after Etching in Ar/$CI_2$ Plasma
(Ar/$CI_2$ 식각 후 SBT 박막의 표면에 관한 연구)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2000.11a
- /
- pp.363-366
- /
- 2000