• 대한전자공학회논문지
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• 제26권11호
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• pp.1658-1665
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• 1989

Reactor design considerations over several critical parameters for a planar type reactive ion etcher are given. The etch uniformity is taken as a principal design constraint. The characteristics of economicaly available vacuum pumping system are taken as practical design constraints. A set of theoretical conditions on the chamber geometry and on the gas delivery and vacuum system, that satisfy the design constraints, are derived from basic properties of RF glow discharge and gas dynamics. The theoretical results are applied to decide design parameters of a practical single-wafer-per-chamber planar type reactive ion etching machine.

• 한국의학물리학회지:의학물리
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• 제4권2호
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• pp.9-17
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• 1993

본 논문의 목적의 NEC LINAC 6 MVX 선의 소조사면에 대한 선량분포를 복잡한 물팬톰 및 ion chamber대신 film 및 고체 물팬톰을 이용하여 간단히 측정하고 분석하는 시스템을 개발하는 데 있다. 단일 선속측정을 위하여 필름과 고체 물팬톰이 이용되었으며, 측정된 데이타는 percent depth dose (PDD), off-axis ratio (OAR) 등을 포함하며, 한변이 1, 2, 3cm의 정사각형 소조사면에 대하여 측정이 이루어 졌다. 또한 Output factor측정은 ion chamber로 측정되었으며, 필름에 의하여 측정된 PDD, OAR 등은 ion chamber측정기로 측정된 값과 비교 검토되었다. 필름으로 부터 측정된 PDD값으로 부터 환산식을 이용하여 tissue maximum ratio (TMR) 값을 얻었으며, 본 실험에서 얻어진 TMR, OAR 값들은 같은 에너지를 나타내는 Philips LINAC의 선량 데이타와 유사한 결과를 보여주었다. 고체 물팬톰 및 필름을 이용한 소조사면 측정은 간편하고도 유용한 방법이었으며, 특히, 자체 개발된 필름팬톰은 뇌정위적 방사선 수술을 위한 OAR 선량을 측정하는 데 유용하였다.

• Journal of Radiation Protection and Research
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• 제34권2호
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• pp.43-48
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• 2009

When the PDD (percentage depth dose) in the megavoltage beams is measured in the water phantom, the polarity and ion recombination effects of ionization chambers with depth in water are not usually taken into consideration. We try to investigate if those variations with depth should be taken into consideration or could be ignored for the thimble type semiflex ionization chamber (PTW $31010^{TM}$, SN 1551). According to the recommendation of IAEA TRS-398, the 4 representative depths of $d_s$, $d_{max}$, $d_{90}$ and $d_{50}$ were used for the electron beams. For the photon beams, the 4 depths were arbitrarily chosen for the photon beams, which were $d_s$, $d_{max}$, $d_{10}$ and $d_{20}$. For the high energy photon beam both polarity and ion recombination factors of the chamber with depth in water gives the good agreements within the maximum $\pm$0.2%, while the $C_{polS}$ with depth came within the maximum $\pm$ 0.4% and the $C_{IRS}$ within the maximum $\pm$0.6% in every electron beam used. This study shows that PDI (percentage depth ionization) could be a good approximation to PDD for the chamber used.

• 한국의학물리학회지:의학물리
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• 제2권2호
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• pp.155-160
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• 1991

전자선 측정에 사용되는 원통형 전리함의 유효 측정점 깊이에 관한 연구를 하였다. 물팬톰 속에서 Markus 평판형 전리함을 사용하여 여러 에너지(전자선 6MeV 및 9MeV, 12MeV, 20MeV) 방사선의 선량 백분율을 구하고, 이 값을 기준으로 하여 원통형 전리함으로(PW233643 내경 5.5mm 및 PR-05P 내경 4mm, PM30 내경 15mm) 구한 선량 백분율과 비하여 선량 백분율 곡선의 변위를 유효 측정점으로 계산하였다. 이 결과 전자선에서는 0.4～0.6r 만큼, $^{60}$Co 감마선에서는 0.3～0.7r 만큼 표면쪽으로 이동한 값을 측정점으로 정하여야 하는 것을 알았다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.154.1-154.1
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• 2014

Indium gallium zinc oxide (IGZO)는 차세대 디스플레이 평판 패널에 사용되는 반도체 화합물의 일종으로 최근 주목받고 있는 물질의 하나이다. 기존의 IGZO를 사용하여 박막을 증착한 뒤 표면 처리를 통해 박막의 특성 변화에 대한 연구들이 진행되어 왔으며, 기존의 연구들은 plasma 환경에 노출을 시켜 간접적인 plasma treatment를 통해 박막의 특성을 향상시켜 왔다. 본 연구에서는 기존의 plasma treatment에서 발견된 방식인 ion beam treatment를 통해 플라즈마를 직접적으로 표면에 조사하여 박막의 특성 변화를 알아보았다. 한국표준과학연구원에서 자체 제작한 chamber를 이용하여 RF sputter로 Si wafer 위에 IGZO 박막을 증착하고 수소 ion beam treatment를 한 뒤, SEM과 XPS를 사용하여 박막 표면의 물성 변화를 분석하였다. 실험에 사용된 chamber에는 sputter gun과 ion beam이 함께 장착되어 있으며, scroll pump와 TMP를 사용하여 pressure를 유지하였다. 실험 시 base pressure는 $1.4{\times}10^{-6}Torr$였다. RF power 150 W. ion beam power 2,000 V에서 실험을 진행하였다.

• 한국의학물리학회지:의학물리
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• 제29권1호
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• pp.16-22
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• 2018

Current dosimetry protocols recommend the use of parallel-plate chambers in electron dosimetry because the electron fluence perturbation can be effectively minimized. However, substitutable methods to calibrate and measure the electron output and energy with the widely used cylindrical chamber should be developed in case a parallel-plate chamber is unavailable. In this study, we measured the correction factors and absolute dose-to-water of electrons with energies of 4, 6, 9, 12, 16, and 20 MeV using Farmer-type and Roos chambers by varying the dose rates according to the AAPM TG-51 protocol. The ion recombination factor and absolute dose were found to be varied across the chamber types, energy, and dose rate, and these phenomena were remarkable at a low energy (4 MeV), which was in good agreement with literature. While the ion recombination factor showed a difference across chamber types of less than 0.4%, the absolute dose differences between them were largest at 4 MeV at approximately 1.5%. We therefore found that the absolute dose with respect to the dose rate was strongly influenced by ion-collection efficiency. Although more rigorous validation with other types of chambers and protocols should be performed, the outcome of the study shows the feasibility of replacing the parallel-plate chamber with the cylindrical chamber in electron dosimetry.

• 한국진공학회지
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• 제8권4B호
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• pp.548-555
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• 1999

The NBI (Neutral BGeam Injection) System for the Korea Superconducting Tokamak Advanced Research (KSTAR) is composed of ion sources, neutralizers, bending magnets, ion dumps, and calorimeter. The vacuum chamber, in which all of the beam line components are enclosed, is composed of differential pumping system for the effective transfer of the neutral beams. The needed pumping speeds of each of the divided vacuum chamber and the optimized gas flow rate ot the neutralizer were calculated with the help of the particle balance equations. The minimum gas flow rate to the ion sources for producing needed beam current (120kV, 65A, 78MW), the pressure distributions in the vacuum chamber for minimizing re-ionization loss, and the beam loss rate on the beam line components were used as the input in the calculation. Also the scenario for short pulse operation was determined by analysing the time dependent equations. It showed that beam extraction during less than 0.5 sec could be made only with TMP.

• Journal of Korean Vacuum Science & Technology
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• 제7권1호
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• pp.1-7
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• 2003

The pressure distributions in the test stand built for developing KSTAR NBI ion sources were obtained using a network system composed of conductance elements modeling the ion source, the neutralizer, and other beam line components. The allowable regime was defined on the coordinates of the gas supply rate to the ion source and the neutralizer, considering the proper conditions of the three critical parameters, the ion source pressure for good arc discharge, the pressure integral in the neutralizer for sufficient neutralization, and the chamber pressure for minimum neutral beam loss. The neutral beam evolution along the path from the ion source extraction grid to the calorimeter through the neutralizer, the bending magnet and the vacuum chamber was estimated for typical pressure distributions.

• 한국생산제조학회지
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• 제24권4호
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• pp.400-406
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• 2015

This study researched the structure of the source of an ion milling machine used to fabricate a scanning electron microscope (SEM) sample. An ion source is used to mill out samples of over 1 mm dimension using a broad ion beam to generate plasma between the anode and cathode using a permanent magnet. To mill the sample in the vacuum chamber, the ion source should be greater than 6 kV for a positive ion current over $200{\mu}A$. To discover the optimum operating conditions for the ion miller, the diameter of the extractor, anode shape, and strength of the permanent magnet were varied in the experiments. A silicon wafer was used as the sample. The sputter yield was measured on the milled surface, which was analyzed using the SEM. The wafer was milled by injecting 1 sccm of argon gas into the 0.5 mTorr vacuum chamber.

• 대한기계학회논문집A
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• 제32권9호
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• pp.728-732
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• 2008

This paper presents ion-based micro vibration sensor for the ultra-high frequency vibration detection. Presented sensor uses the motion of anion and cation in an electrolyte. Electrolyte vibration sensors have the high shock survival characteristics and a simple read-out circuit because of the small mass and own charges of ions. Presented sensor measures the induced electric potential by the mechanical-electrical coupling. It consist of electrolyte chamber and detection electrode. Electrolyte chamber was fabricated by PDMS molding. Detection electrode was made of gold evaporation on pyrex glass. Size of electrolyte chamber was designed as $600{\times}600{\times}100um$. Detection electrode had 200nm-thick and 42um-gap. In the experimental study, 5.8M sodium Chloride (NaCl) solution was used as electrolyte in 36nl-chamber. Mechanical vibration was measured from 2kHz to 4MHz.